In at least one embodiment, a specimen holder includes a specimen holder shaft unit having a specimen and/or specimen mesh setting unit, an outer tubular unit capable of housing the specimen holder shaft unit, a thermal drift adjusting unit made of a material having a different thermal expansion coefficient from a thermal expansion coefficient of the specimen holder shaft unit and partially in contact with the specimen holder shaft unit, and a control mechanism which controls movement of the thermal drift adjusting unit toward a center direction of a specimen.

In at least one embodiment, a specimen holder includes a specimen holder shaft unit having a specimen and/or specimen mesh setting unit, an outer tubular unit capable of housing the specimen holder shaft unit, a thermal drift adjusting unit made of a material having a different thermal expansion coefficient from a thermal expansion coefficient of the specimen holder shaft unit and partially in contact with the specimen holder shaft unit, and a control mechanism which controls movement of the thermal drift adjusting unit toward a center direction of a specimen.

Provided are a cell for X-ray analysis and an X-ray analysis apparatus that enable simultaneous X-ray diffraction and X-ray absorption fine structure measurements of a material (sample) in the same field of view on the sample (same position on the sample). The cell for X-ray analysis of the present invention enables simultaneous X-ray diffraction and X-ray absorption fine structure measurements of a sample in the same field of view on the sample and includes a furnace including a space where the sample is held and a focused heater heating the sample, a first window provided to the furnace and through which X-rays directed at the sample is incident, a second window provided to the furnace and from which X-rays emerging from the sample exit, a third window provided to the furnace, and a holder that positions the sample in the space. The cell for X-ray analysis makes it possible to simultaneously measure X-ray diffraction of the sample at outside of the second window and X-ray absorption fine structure of the sample through the third window.

Provided are a cell for X-ray analysis and an X-ray analysis apparatus that enable simultaneous X-ray diffraction and X-ray absorption fine structure measurements of a material (sample) in the same field of view on the sample (same position on the sample). The cell for X-ray analysis of the present invention enables simultaneous X-ray diffraction and X-ray absorption fine structure measurements of a sample in the same field of view on the sample and includes a furnace including a space where the sample is held and a focused heater heating the sample, a first window provided to the furnace and through which X-rays directed at the sample is incident, a second window provided to the furnace and from which X-rays emerging from the sample exit, a third window provided to the furnace, and a holder that positions the sample in the space. The cell for X-ray analysis makes it possible to simultaneously measure X-ray diffraction of the sample at outside of the second window and X-ray absorption fine structure of the sample through the third window.

An analysis device includes a vapor phase decomposition unit, a heating unit, an evacuation unit, a recovery unit and an analysis unit. The vapor phase decomposition unit performs vapor phase decomposition of a first film on a substrate. The heating unit heats the substrate. The evacuation unit evacuates gas in the heating unit to an outside of the heating unit. The recovery unit supplies liquid on a front surface of the substrate, moves the liquid on the front surface of the substrate, and recovers the liquid. The analysis unit analyzes contents of the liquid.

An analysis device includes a vapor phase decomposition unit, a heating unit, an evacuation unit, a recovery unit and an analysis unit. The vapor phase decomposition unit performs vapor phase decomposition of a first film on a substrate. The heating unit heats the substrate. The evacuation unit evacuates gas in the heating unit to an outside of the heating unit. The recovery unit supplies liquid on a front surface of the substrate, moves the liquid on the front surface of the substrate, and recovers the liquid. The analysis unit analyzes contents of the liquid.

The invention relates to an apparatus (1) for clamping flat samples (6), in particular pouch battery cells, for x-ray diffractometry, wherein the apparatus has a housing (2) having a sample holder (4), which has holding elements (5) that are able to be tensioned in relation to one another for clamping the sample (6), at least two x-ray windows (11a, 11b, 12) for letting in and out x-rays, and at least one first temperature control device (7) for controlling the temperature of the sample (6). At least one first temperature control device (7) is in each case attached to the holding elements (5), wherein the first temperature control devices (7) are thermally coupled to the housing (2), and the apparatus has at least one second temperature control device (9), which is configured to dissipate heat, which is output by the first temperature control device (7) to the housing (2), out of the housing (3) to the outside and/or to introduce heat from the outside into the housing (2).

The invention relates to an apparatus (1) for clamping flat samples (6), in particular pouch battery cells, for x-ray diffractometry, wherein the apparatus has a housing (2) having a sample holder (4), which has holding elements (5) that are able to be tensioned in relation to one another for clamping the sample (6), at least two x-ray windows (11a, 11b, 12) for letting in and out x-rays, and at least one first temperature control device (7) for controlling the temperature of the sample (6). At least one first temperature control device (7) is in each case attached to the holding elements (5), wherein the first temperature control devices (7) are thermally coupled to the housing (2), and the apparatus has at least one second temperature control device (9), which is configured to dissipate heat, which is output by the first temperature control device (7) to the housing (2), out of the housing (3) to the outside and/or to introduce heat from the outside into the housing (2).

An in-situ coin cell support device for transmission mode X-ray diffraction analysis capable of controlling temperature. The device includes a coin cell seating unit including a seating part for receiving an in-situ coin cell, a positive electrode tab coupled to the seating part and connected to a positive electrode of the in-situ coin cell, and a negative electrode tab coupled to the seating part and connected to a negative electrode of the in-situ coin cell, a housing having a heat-insulating function, which surrounds the coin cell seating unit such that the positive and negative electrode tabs extend outwards from the housing and which includes one side wall and an opposite side wall arranged opposite each other with the in-situ coin cell interposed therebetween, and a temperature control unit coupled to the exterior of the housing and including an inlet port, an outlet port, and a flow passage.

An in-situ coin cell support device for transmission mode X-ray diffraction analysis capable of controlling temperature. The device includes a coin cell seating unit including a seating part for receiving an in-situ coin cell, a positive electrode tab coupled to the seating part and connected to a positive electrode of the in-situ coin cell, and a negative electrode tab coupled to the seating part and connected to a negative electrode of the in-situ coin cell, a housing having a heat-insulating function, which surrounds the coin cell seating unit such that the positive and negative electrode tabs extend outwards from the housing and which includes one side wall and an opposite side wall arranged opposite each other with the in-situ coin cell interposed therebetween, and a temperature control unit coupled to the exterior of the housing and including an inlet port, an outlet port, and a flow passage.