The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.

The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.

An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

Disclosed herein is a method of operating an imaging system which comprises (A) an image sensor comprising (a) a top surface, (b) M physically separate active areas on the top surface, and (c) a dead zone on the top surface and between the M active areas, and (B) a radiation source system which comprises an electron bombardment target, the method comprising: for i=1, . . . , N, sequentially causing emission of X-ray photons (i) from a radiation position (i) by causing electrons to bombard a target surface of the electron bombardment target at the radiation position (i); and for i=1, . . . , N, in response to the emission of the X-ray photons (i), capturing M images (i) of portions (i) of a same object, respectively in the M active areas, resulting in M×N images, wherein each point of the object is captured in at least one image of the M×N images.

Disclosed herein is a method of operating an imaging system which comprises (A) an image sensor comprising (a) a top surface, (b) M physically separate active areas on the top surface, and (c) a dead zone on the top surface and between the M active areas, and (B) a radiation source system which comprises an electron bombardment target, the method comprising: for i=1, . . . , N, sequentially causing emission of X-ray photons (i) from a radiation position (i) by causing electrons to bombard a target surface of the electron bombardment target at the radiation position (i); and for i=1, . . . , N, in response to the emission of the X-ray photons (i), capturing M images (i) of portions (i) of a same object, respectively in the M active areas, resulting in M×N images, wherein each point of the object is captured in at least one image of the M×N images.

The invention relates to method and system configured for material analysis and mineralogy. At least one image based on first emission from a sample is provided. First spectra of the sample based on second emissions from the second scan locations of the image are provided. A confidence score is calculated for every first spectrum, and second scan location(s) with confidence score(s) below a threshold value are selected. Second emissions from the selected second scan location(s) are acquired to provide new image and determine new second scan locations within the respective new image.

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.

Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.