A gas measuring device (100) and a gas measuring process measure a concentration of a combustible target gas relatively reliably. An electrical voltage (U10, U11) is applied to both a detector (10) and a compensator (11). The applied electrical voltage heats an electrically conductive segment (20) of the detector (10) and an electrically conductive segment (38) of the compensator. The heated detector segment (20) oxidizes combustible target gas (CH.sub.4), while a passivation coating on the compensator segment (38) largely prevents the compensator segment (38) from oxidizing combustible target gas (CH.sub.4). The passivation coating includes iodine. The gas measuring device (100) determines the target gas depending on the temperature of the detector segment (20) and the temperature of the compensator segment (38) when operated in an oxidation measurement mode, and depending only on the temperature of the compensator segment (38) when operated in a heat conduction measurement mode.

A gas measuring device (100) and a gas measuring process measure a concentration of a target gas. A detector detection variable sensor (12.1) measures a detection variable (U10) of a detector, which detector detection variable correlates with the concentration of the target gas in a gas sample (Gp). A compensator detection variable sensor (12.2) measures a detection variable (U11) of a compensator, wherein this compensator detection variable correlates less with the target gas concentration. The gas measuring device can be operated in a pressure-compensating mode and/or in a humidity-compensating mode. In pressure-compensating mode, the influence of the ambient pressure on a measurement result is compensated as best as possible under the boundary condition that the influence of the ambient humidity remains sufficiently small. In humidity-compensating mode, the influence of the ambient humidity on a measurement result is compensated as best as possible under a corresponding boundary condition.

A gas measuring device (100) and a gas measuring process measure a concentration of a target gas. A detector detection variable sensor (12.1) measures a detection variable (U10) of a detector, which detector detection variable correlates with the concentration of the target gas in a gas sample (Gp). A compensator detection variable sensor (12.2) measures a detection variable (U11) of a compensator, wherein this compensator detection variable correlates less with the target gas concentration. The gas measuring device can be operated in a pressure-compensating mode and/or in a humidity-compensating mode. In pressure-compensating mode, the influence of the ambient pressure on a measurement result is compensated as best as possible under the boundary condition that the influence of the ambient humidity remains sufficiently small. In humidity-compensating mode, the influence of the ambient humidity on a measurement result is compensated as best as possible under a corresponding boundary condition.

Provided is a gas sensor including a substrate, a first membrane disposed on the substrate, a heating structure disposed on the first membrane, a second membrane disposed on the heating structure, a sensing electrode disposed on the second membrane, and a sensing material structure disposed on the sensing electrode. Here, the substrate provides an isolation space defined by a recessed surface obtained as a portion of a top surface of the substrate is spaced downward from a bottom surface of the first membrane, and the first membrane provides a first membrane etching hole that vertically extends to connect a top surface and the bottom surface of the first membrane and is connected with the isolation space. Also, the first membrane etching hole has a diameter of about 3 m to about 20 m.

A system includes a primary combustible gas sensor and a trigger combustible gas sensor including a first trigger element of low-thermal-mass which includes a first trigger heating element in operative connection with electronic circuitry. The trigger combustible gas sensor also includes a second trigger element of low thermal mass including a second trigger heating element. The second trigger element is also in operative connection with the electronic circuitry. The electronic circuitry further has a first trigger mode of operating in which the first trigger element is heated to a temperature at or above a temperature at which the first trigger element causes combustion of the at least one combustible gas analyte and wherein the second trigger element is operated as a trigger compensating element. The electronic circuitry is configured to operate the trigger combustible gas sensor to detect a value of a response at or above a threshold value. The primary combustible gas sensor is activated from a low-power state upon the threshold value being detected by the trigger combustible gas sensor.

A system includes a primary combustible gas sensor and a trigger combustible gas sensor including a first trigger element of low-thermal-mass which includes a first trigger heating element in operative connection with electronic circuitry. The trigger combustible gas sensor also includes a second trigger element of low thermal mass including a second trigger heating element. The second trigger element is also in operative connection with the electronic circuitry. The electronic circuitry further has a first trigger mode of operating in which the first trigger element is heated to a temperature at or above a temperature at which the first trigger element causes combustion of the at least one combustible gas analyte and wherein the second trigger element is operated as a trigger compensating element. The electronic circuitry is configured to operate the trigger combustible gas sensor to detect a value of a response at or above a threshold value. The primary combustible gas sensor is activated from a low-power state upon the threshold value being detected by the trigger combustible gas sensor.

A gas measuring device (100) and a gas measuring process measure a concentration of a target gas. A detector detection variable sensor (12.1) measures a detection variable (U10) of a detector, which detector detection variable correlates with the concentration of the target gas in a gas sample (Gp). A compensator detection variable sensor (12.2) measures a detection variable (U11) of a compensator, wherein this compensator detection variable correlates less with the target gas concentration. The gas measuring device can be operated in a pressure-compensating mode and/or in a humidity-compensating mode. In pressure-compensating mode, the influence of the ambient pressure on a measurement result is compensated as best as possible under the boundary condition that the influence of the ambient humidity remains sufficiently small. In humidity-compensating mode, the influence of the ambient humidity on a measurement result is compensated as best as possible under a corresponding boundary condition.

A gas measuring device (100) and a gas measuring process measure a concentration of a target gas. A detector detection variable sensor (12.1) measures a detection variable (U10) of a detector, which detector detection variable correlates with the concentration of the target gas in a gas sample (Gp). A compensator detection variable sensor (12.2) measures a detection variable (U11) of a compensator, wherein this compensator detection variable correlates less with the target gas concentration. The gas measuring device can be operated in a pressure-compensating mode and/or in a humidity-compensating mode. In pressure-compensating mode, the influence of the ambient pressure on a measurement result is compensated as best as possible under the boundary condition that the influence of the ambient humidity remains sufficiently small. In humidity-compensating mode, the influence of the ambient humidity on a measurement result is compensated as best as possible under a corresponding boundary condition.