In an embodiment a sensor device includes a substrate with a first membrane and a first cover layer, the first membrane and the first cover layer being monolithically integrated into the substrate and a first pellistor element including a heater element and a temperature sensor element, the heater element and/or the temperature sensor element being arranged in or on the first membrane, wherein the first cover layer is arranged over or under the first membrane, and wherein the first membrane, the first cover layer and a part of the substrate surround a first cavity.

In an embodiment a sensor device includes a substrate with a first membrane and a first cover layer, the first membrane and the first cover layer being monolithically integrated into the substrate and a first pellistor element including a heater element and a temperature sensor element, the heater element and/or the temperature sensor element being arranged in or on the first membrane, wherein the first cover layer is arranged over or under the first membrane, and wherein the first membrane, the first cover layer and a part of the substrate surround a first cavity.

A gas detection device and a process monitor an area for a combustible target gas. A heating segment of a detector (10) is heated when electrical current flows therethrough. A heating segment of a compensator (1) is heated when electrical current flows therethrough. An electrical voltage is applied to both the detector and the compensator. The heating of the detector (10) causes a combustible target gas to be oxidized in an interior of the gas detection device. A detection variable, which depends on the temperature (Temp_10) of the detector, and a detection variable, which depends on the temperature (Temp_11) of the compensator, are measured. A presence and/or a concentration of a target gas are determined as a function of the detection variables. A quality parameter is measured and increases as the detection variable depending on the detector temperature increases and as the detection variable depending on the compensator temperature decreases.

A gas detection device and a process monitor an area for a combustible target gas. A heating segment of a detector (10) is heated when electrical current flows therethrough. A heating segment of a compensator (1) is heated when electrical current flows therethrough. An electrical voltage is applied to both the detector and the compensator. The heating of the detector (10) causes a combustible target gas to be oxidized in an interior of the gas detection device. A detection variable, which depends on the temperature (Temp_10) of the detector, and a detection variable, which depends on the temperature (Temp_11) of the compensator, are measured. A presence and/or a concentration of a target gas are determined as a function of the detection variables. A quality parameter is measured and increases as the detection variable depending on the detector temperature increases and as the detection variable depending on the compensator temperature decreases.

A method for operating a sensor device for measuring a concentration of a gas species in a gas is disclosed. In an embodiment, the method includes recording a set of data points by performing a plurality of measurements of a temperature sensor element reading, wherein each of the measurements is performed with a different heater setting of the first pellistor element and each of the measurements results in a data point of the set of data points, performing a curve fit of an evaluation function to the set of data points, wherein the evaluation function comprises a first function and a second function, wherein the first function is based on an ideal behavior of the first pellistor element, and wherein the second function is a temperature-dependent steadily rising or steadily falling function and determining the concentration of the gas species in the gas from the curve fit.

A method for operating a sensor device for measuring a concentration of a gas species in a gas is disclosed. In an embodiment, the method includes recording a set of data points by performing a plurality of measurements of a temperature sensor element reading, wherein each of the measurements is performed with a different heater setting of the first pellistor element and each of the measurements results in a data point of the set of data points, performing a curve fit of an evaluation function to the set of data points, wherein the evaluation function comprises a first function and a second function, wherein the first function is based on an ideal behavior of the first pellistor element, and wherein the second function is a temperature-dependent steadily rising or steadily falling function and determining the concentration of the gas species in the gas from the curve fit.

The filter of a gas sensor comprises an inorganic porous support supporting both an organic sulfonic acid compound including sulfo group (—SO3H) and a Lewis acid having at least a metal element of transitional metal elements, Al element, Ga element, In element, Ge element, and Sn element. The Lewis acid loaded in the inorganic porous support adsorbs low concentration siloxanes. The organic sulfonic acid compound including sulfo group polymerizes adsorbed siloxanes in the filter so as not to desorb from the filter.

Various embodiments described herein relate to methods, apparatuses, and systems for recovering gas sensors from silicone poisoning. In an example embodiment, a method of recovering a gas sensing apparatus from silicone poisoning is provided. The method includes exposing the gas sensing apparatus to a predetermined hydrogen concentration for a period of hydrogen exposure time. The predetermined hydrogen concentration breaks down the silicon oxide bonds formed on a catalytic bead of the gas sensing apparatus. The method also includes providing a methane concentration to the gas sensing apparatus for a period of methane exposure time. The method further includes determining that the gas sensing apparatus satisfies a predetermined calibration sensitivity based on the reaction of the gas sensing apparatus to the methane concentration.

Various embodiments described herein relate to methods, apparatuses, and systems for recovering gas sensors from silicone poisoning. In an example embodiment, a method of recovering a gas sensing apparatus from silicone poisoning is provided. The method includes exposing the gas sensing apparatus to a predetermined hydrogen concentration for a period of hydrogen exposure time. The predetermined hydrogen concentration breaks down the silicon oxide bonds formed on a catalytic bead of the gas sensing apparatus. The method also includes providing a methane concentration to the gas sensing apparatus for a period of methane exposure time. The method further includes determining that the gas sensing apparatus satisfies a predetermined calibration sensitivity based on the reaction of the gas sensing apparatus to the methane concentration.

A hydrogen sensor includes a substrate, an insulating part formed on the substrate and provided with a plurality of holes, a first catalyst part formed on an upper end of the insulating part to accelerate the reaction between hydrogen and oxygen, a second catalyst part formed on a surface of the holes to accelerate the reaction between hydrogen and oxygen, and a heater part disposed inside the insulating part to heat the first catalyst part and the second catalyst part, and having an temperature increased by reaction heat generated by the reaction between hydrogen and oxygen.