A radio frequency identification (RFID) tag includes a power harvesting circuit that operates generate power for the RFID tag from a continuous wave of a radio frequency (RF) signal. The RFID tag further includes a tuning circuit that is tuned based on a capacitance setting, where the capacitance setting is indicative of a power level of the power. The RFID tag further includes a processing module operably coupled to the tuning circuit, where the processing module operates to generate the capacitance setting to obtain a desired power level for the power.

A sensor for determining plural parameters includes a housing that defines a chamber and a parallel plate capacitor having a first plate located inside the chamber and a second plate fixedly attached to a first external side of the housing. A dielectric multi-layer placed between the first and second plates includes a pressure sensitive layer and a humidity sensitive layer.

A capacitive relative humidity sensor includes a first electrode and a second electrode, where at least the one of the electrodes is a water-permeable electrode. The electrodes act in conjunction with a water-sensitive hygroscopic dielectric material. The design enables low-cost and simple fabrication of fast-responding and stable relative humidity sensors using digital fabrication techniques.

A capacitive matrix suction sensor measures the matrix suction exhibited by a porous medium surrounding the sensor. The sensor is constructed from a capacitive moisture probe having a sensing body, and a jacket that encases the sensing body. The jacket is made of a hydrophilic, non-conductive, porous (HN-CP) material. In operation, the sensing body is energized, and the voltage produced is read. The matrix suction exhibited by the HN-CP jacket material is then computed based on the voltage, and an indicator of the current value of the matrix suction exhibited by the porous medium is established based on the matrix suction computed for the HN-CP jacket material.

An electronic device for sensing a target analyte in a gas, liquid or vapor sample, the device has at least two sensing elements, each sensing element having an exposed layer of a transduction material supported on a dielectric substrate. The dielectric substrate of at least one of the sensing elements is made of a different dielectric material than the dielectric substrate of at least one other of the sensing elements. The different dielectric materials providing a different sensing response according to one or more transduction modes. The plurality of sensing elements in the device yield a specific transduction pattern for a specific target analyte in a gas, liquid or vapor sample.

An apparatus and a method for measuring pressure, gas and/or humidity, the apparatus having at least one sensor with at least one capacitor comprising at least two electrodes that are arranged in a horizontal direction relative to one another along and on a flexible support material. At least one dielectric layer is arranged between the electrodes and at least one at least partially moisture-permeable and/or moisture-absorbing and/or gas-permeable and/or gas-absorbing moisture layer is arranged at least in some places on a side, facing away from a support material, of at least one electrode and/or the dielectric layer. At least one electrode and/or the dielectric layer are thus arranged transversely between the support material and the moisture layer. A capacitance is at least partially changed by moisture hitting the dielectric layer, and a processing unit measures and/or stores this change, so as to create a capacitive moisture sensor.

The invention relates to a control system for measuring pressure and/or humidity, comprising at least one apparatus for measuring pressure and/or humidity, comprising at least one sensor for measuring pressure and/or humidity, wherein the sensor comprises at least one capacitor comprising at least two electrodes that are arranged, in particular, in a horizontal direction along and on an, in particular, flexible support material relative to one another. At least one dielectric layer is arranged between the electrodes, wherein at least one at least partially liquid-permeable and/or liquid-adsorbing moisture layer is arranged at least in some places on a side, facing away from the support material, of at least one electrode and/or of the dielectric layer. The at least one electrode and/or the dielectric layer are thus then arranged between the support material and the moisture layer in a transverse direction, such that a capacitance is at least partially changed by the liquid at least partially hitting the dielectric layer, wherein a processing unit is designed and provided to measure and/or store measurement values of the sensor. This creates a capacitive moisture sensor. The invention is characterized in that the data measured by the sensor is transmitted by the processing unit to a central CPU, wherein this data is processed by the processing unit.

A composite sensor including a temperature sensor unit that has a temperature-sensitive member and a humidity sensor unit including a moisture-sensitive member. The composite sensor further includes a first terminal used for the temperature sensor unit and the humidity sensor unit; a second terminal disposed to measure an electrical characteristic of the temperature-sensitive member with the first terminal; and a third terminal disposed to measure an electrical characteristic of the moisture-sensitive member with the first terminal.

Novel integrated circuit environmental and temperature sensors in combination with measurement circuitry fully integrated as part of an ASIC die, which may be co-packaged with a pressure sensor integrated circuit to create a compact yet sensitive environment monitoring product. Embodiments may include one or more integrated local heating elements and control circuitry that are power supply independent, make efficient use of battery power, include an accurate in-built temperature detection capability, and provide digital close-loop control of the heating elements.

A humidity sensor includes a semiconductor substrate, an insulating film, an interconnect layer formed above the semiconductor substrate via the insulating film, a protective film that covers the interconnect layer, a moisture sensitive film formed above the protective film, and a metal oxide film formed between the protective film and the moisture sensitive film.