An apparatus and method for measuring pressure and/or humidity, having at least one sensor for measuring pressure and/or humidity. The sensor has at least one capacitor having at least two electrodes that are arranged in a horizontal direction relative to one another along and on a flexible support material. At least one dielectric layer is arranged between the electrodes. At least one at least partially moisture-permeable and/or moisture-absorbing layer is arranged in some places on a side, facing away from a support material, of the electrode and/or the dielectric layer. The at least one electrode and/or the dielectric layer are arranged transversely between the support material and the moisture layer. In this way, a capacitance is at least partially changed by moisture hitting the dielectric layer, and a processing unit is designed and provided to measure and/or store this change, so as to create a capacitive moisture sensor.

According to an example aspect of the present invention, there is provided a method in connection with a radiosonde, the method comprising measuring a humidity of the atmosphere at several different altitudes in the atmosphere, measuring a pressure at several different altitudes in the atmosphere or calculating the pressure from an altitude of the radiosonde obtained from GPS or other satellite navigation system, measuring or estimating a temperature of a humidity sensor, and measuring a relative humidity by a capacitor with a polymer insulator, wherein the relative humidity value is corrected based on a correction factor, which is a function of pressure, humidity sensor temperature, and relative humidity, such that the humidity value decreases when pressure decreases.

A sensor chip is used for multi-physical quantity measurement. This sensor chip comprises a substrate and at least two of the following sensors: a temperature sensor, a humidity sensor, or a pressure sensor, which are integrated onto the same substrate, wherein the pressure sensor consists of electrically interconnected resistive elements. The humidity sensor is an interdigitated structure. Thermistor elements are placed around the pressure sensor and the humidity sensor to form a temperature sensor. The temperature sensor has a resistance adjusting circuit. A microcavity is etched on the back of the substrate in a place on the opposite side pressure sensor's location. Also disclosed is a preparation method for a sensor chip used for multi-physical quantity measurement. This multi-physical quantity measurement single chip sensor chip has the advantages of low cost, low power consumption, easy fabrication, and wide applicability.

A moisture-sensitive film formed from a resin composition and containing a polyimide resin component. The polyimide resin component comprises a fluorinated polyimide resin. The polyimide resin component comprises a phthalimide ring and a benzene ring different from a benzene ring included in the phthalimide ring. Based on a total amount of the polyimide resin component, the benzene ring different from the benzene ring included in the phthalimide ring has a mass fraction W (Be) and the phthalimide ring has a mass fraction W (PhI) satisfying the following formula: W (PhI)/W (Be)1.2.

There is provided a moisture detection element including: an insulating portion composed of an insulating material; a voltage-applied electrode to which a voltage is applied; a detection electrode configured to output a voltage signal corresponding to a current flowing through an electric path including water molecules adhering to the surface of the insulating portion in accordance with the voltage applied to the voltage-applied electrode; and a conductive film that is conductive and electrically insulated from the voltage-applied electrode and the detection electrode, in which the voltage-applied electrode, the detection electrode, and the conductive film are disposed on the insulating portion. When dew condensation is detected, a DC voltage is applied to the voltage-applied electrode.

A capacitive matrix suction sensor measures the matrix suction exhibited by a porous medium surrounding the sensor. The sensor is constructed from a capacitive moisture probe having a sensing body, and a jacket that encases the sensing body. The jacket is made of a hydrophilic, non-conductive, porous (HN-CP) material. In operation, the sensing body is energized, and the voltage produced is read. The matrix suction exhibited by the HN-CP jacket material is then computed based on the voltage, and an indicator of the current value of the matrix suction exhibited by the porous medium is established based on the matrix suction computed for the HN-CP jacket material.

The disclosed subject matter relates generally to methods of forming a semiconductor device, such as a moisture sensor. A plurality of electrodes and a bond pad are formed in a dielectric region. A passivation layer is formed on each electrode in the plurality of electrodes and the bond pad. A barrier layer is formed on the passivation layer. A plurality of trenches are formed to extend through the barrier layer and into the dielectric region. Formation of the trenches simultaneously exposes an upper surface of the bond pad. A moisture sensitive dielectric layer is formed on the barrier layer. Formation of the moisture sensitive dielectric layer also fills the trenches to form a plurality of projections, each projection being formed between two electrodes in the plurality of electrodes.

A humidity meter includes a humidity sensor, a heating device oriented towards the humidity sensor, a signal generator capable of modulating a power output of the heating device, and a lock-in amplifier capable of demodulating a response signal of the humidity sensor as induced by the modulated heating device. A method of measuring humidity includes the steps of providing a humidity sensor positioned along a channel, a heating device positioned opposite the humidity sensor along the channel, and a controller including a signal generator and a lock-in amplifier; providing an airflow along the channel; modulating a power supply to the heating device using the signal generator; and demodulating a response signal of the humidity sensor induced by the modulated heating device.

In order to provide a moisture detection element, a gas detection device, and a breath inspection system that are compact and have high response performance, the moisture detection element includes an insulating section made of an insulating material, an application electrode to which an voltage is applied, and a detection electrode that detects a voltage signal corresponding to a current flowing through an electrical path via water molecules adsorbed on the insulating section by the voltage applied to the application electrode.

A water leakage detector includes: an electrostatic capacity sensor that is arranged at a bottom portion of a housing; and a leg portion that provides a space between the bottom portion and a floor of the housing including the electrostatic capacity sensor. With this configuration, it may be possible to detect quickly in an earlier stage of water leakage and achieve resistance to deterioration caused by an environment.