A system for measuring thermal degradation of composites includes a cylindrical body; a bottom cover having a lower central aperture; an upper concave mirror facing the bottom cover with an upper central orifice concentric with a central axis of the body; a lower concave mirror facing the upper concave mirror with a lower central orifice concentric with the central axis; a source of actinic radiation between the upper concave mirror and the lower concave mirror on the central axis to direct actinic radiation through the lower central orifice and lower central aperture; and a camera with an image sensor positioned concentrically relative to the upper central orifice; wherein the bottom cover is adjustable relative to the cylindrical body to provide a focusing function for the image sensor by varying the distance from the lower central orifice and the upper reflective surface.

A system for measuring thermal degradation of composites, may include a housing having an interior with an opening shaped to expose a test area of the composite to be tested to the interior; a light-emitting diode that emits primarily ultraviolet radiation, the diode mounted on the housing to direct the ultraviolet radiation into the interior and through the opening; an image sensor mounted on the housing and open to the interior to receive radiation emitted from the test area passing through the opening into the interior; and an image processor connected to receive a signal from the image sensor, the image processor determining a presence or absence of thermal degradation of the test area in response to the signal.

A system for measuring thermal degradation of composites, may include a housing having an interior with an opening shaped to expose a test area of the composite to be tested to the interior; a light-emitting diode that emits primarily ultraviolet radiation, the diode mounted on the housing to direct the ultraviolet radiation into the interior and through the opening; an image sensor mounted on the housing and open to the interior to receive radiation emitted from the test area passing through the opening into the interior; and an image processor connected to receive a signal from the image sensor, the image processor determining a presence or absence of thermal degradation of the test area in response to the signal.

An illumination optical unit is part of a mask inspection system for use with EUV illumination light. A hollow waveguide serves to guide the illumination light. For the illumination light, the hollow waveguide has an entrance opening in an entrance plane and an exit opening in an exit plane. An input coupling mirror optical unit is disposed upstream of the hollow waveguide in the beam path of the illumination light and has at least one mirror for imaging a source region of an EUV light source into the entrance opening of the hollow waveguide. An output coupling mirror optical unit serves to image the exit opening of the hollow waveguide into an illumination field. This yields an illumination optical unit whose use efficiency for the EUV illumination light has been optimized.

Methods and configurations are disclosed for an efficient collection of fluorescence emitted by the nitrogen vacancies of a diamond of a DNV sensor. Some implementations may include a diamond having a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond. In some implementations the reflector may be parabolic or ellipsoidal. In some implementations, DNV sensor may have a reflector and a concentrator. Other implementations may include a diamond with a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond using a dielectric mirror film applied to the reflector. Still other implementations may have a diamond with a nitrogen vacancy and a dielectric mirror film coated on the diamond.

A small-sized gas detection apparatus with high measurement accuracy is provided. The gas detection apparatus includes a light emitting portion (1); a light receiving portion (2); a first mirror (3) that has a quadric reflective surface and reflects light emitted from the light emitting portion; and a second mirror (4) that has a quadric reflective surface and reflects the light reflected by the first mirror to the first mirror. The quadric surfaces of the first mirror and the second mirror have convex portions facing in a same direction. The first mirror reflects the light reflected by the second mirror to the light receiving portion. When one surface of a substrate on which the light emitting portion and the light receiving portion are mounted is used as a reference plane, the first mirror and the second mirror are provided at positions higher than the reference plane and have different heights.

A gas detection apparatus is provided. The gas detection apparatus includes: a light emitting portion; a first mirror that has a reflective surface being a quadric surface and reflects light emitted from the light emitting portion; and a second mirror that has a reflective surface being a quadric surface and reflects the light reflected by the first mirror to the first mirror. The quadric surface of the first mirror and the quadric surface of the second mirror have convex portions facing in a same direction.

Included are a light-emitting unit that irradiates a specimen having a film-like shape and having optical transparency with the inspection light, a scattered light detection unit that detects scattered light from the specimen, a diffracted light detection unit that detects diffracted light from the specimen, and a signal processing unit that determines the presence of a contaminant attached to the specimen and the presence of a pinhole formed in the specimen, on the basis of a scattered light intensity signal from the scattered light detection unit and a diffracted light intensity signal from the diffracted light detection unit.

A system for measuring a bidirectional reflectance distribution function (BRDF). The system includes a light source configured to generate light beams, a series of reflective elements and a two-axis mirror configured to direct the light beams. A beam splitter configured to allow allows a first portion of the light beams to pass therethrough. An ellipsoidal mirror is configured to receive the first portion of light beams at multiple predetermined locations on the ellipsoidal mirror as directed by the two-axis mirror with the two-axis mirror being located at a second focal point of the ellipsoidal mirror. The ellipsoidal mirror is configured to direct the first portion of light beams through a first focal point to reflect off a sample and generate reflected light beams. The reflected light beams are directed to the beam splitter and through a third focal point before being received by a first detector.