An inertial sensor includes a substrate, a movable element having an edge, and a suspension system retaining the movable element in spaced apart relationship above a surface of the substrate. The suspension system includes an anchor attached to the surface of the substrate, the anchor having a first side laterally spaced apart from the edge of the movable element, and a spring structure having a first attach point coupled to the first side of the anchor and a second attach point coupled to the edge of the movable element. The spring structure includes beam sections serially adjoining one another, the beam sections extending from the first side of the anchor and surrounding the anchor to couple to the edge of the movable element. The spring structure makes no more than one coil around the anchor to position the first attach point in proximity to the second attach point.

The present disclosure discloses a vertical superconducting magnetic mass-spring oscillator with an adjustable natural frequency, comprising: a proof mass, a negative-stiffness superconducting coil and a positive-stiffness superconducting coil; the negative-stiffness superconducting coil is mounted at an opening of a semi-closed space of the proof mass, so that a part of magnetic lines of the negative-stiffness superconducting coil are in a compressed state in a closed space of the proof mass, and the other part of the magnetic lines of the negative-stiffness superconducting coil are in an expanded state outside the closed space of the proof mass; a vertical magnetic repulsive force applied to the proof mass by the negative-stiffness superconducting coil varies with a displacement of the proof mass from an equilibrium position, with the variation magnitude proportional to the displacement and the variation direction the same as the displacement direction; and the positive-stiffness superconducting coil is mounted in the semi-closed space of the proof mass, and a vertical magnetic repulsive force applied to the proof mass by the positive-stiffness superconducting coil varies proportionally to the displacement of the proof mass from the equilibrium position, with the variation direction opposite to the displacement direction. The present disclosure realizes that the natural frequency of the superconducting mass-spring oscillator is adjustable, and meanwhile, the cross-coupling effect of horizontal and vertical degrees of freedom of the proof mass can be reduced.

An acceleration sensor includes a semiconductor substrate that has a cavity formed in an interior, a fixed structure that includes a fixed electrode supported by the semiconductor substrate in a state of floating with respect to the cavity, and a movable structure that includes a movable electrode supported by the semiconductor substrate via an elastic structure in a state of floating with respect to the cavity and displacing with respect to the fixed electrode. The elastic structure includes a first end portion supported by the semiconductor substrate, a second end portion connected to the movable structure, and an intermediate portion connecting the first end portion and the second end portion and has a rectilinearly-extending rectilinear portion at least at a portion of the intermediate portion and the rectilinear portion includes a plurality of rectilinear frames extending in parallel to each other in a direction in which the rectilinear portion extends.

A flexure for a MEMS device includes an elongated beam and a protrusion element extending outwardly from a sidewall of the elongated beam. A MEMS inertial sensor includes a movable element spaced apart from a surface of a substrate, an anchor attached to the substrate, and a spring system. The spring system includes first and second beams, a center flexure between the first and second beams, a first end flexure interconnected between an end of the first beam and the anchor, and a second end flexure interconnected between an end of the second beam and the movable element. Each of the end flexures includes the elongated beam having first and second ends, and the sidewall defining a longitudinal dimension of the elongated beam, and the protrusion element extending from the sidewall of the elongated beam, the protrusion element being displaced away from the first and second ends of the beam.

The invention is directed at an optical sensor device, comprising a sensing element for receiving an input action, an optical fiber comprising an intrinsic fiber optic sensor, and a transmission structure arranged for exerting a sensing action on the optical fiber in response to the input action received by the sensing element, wherein the optical fiber in a first connecting part thereof is connected to a reference body and wherein the optical fiber in a second connecting part thereof is to the transmission structure for receiving the sensing action, the first connecting part and the second connecting part of the optical fiber being located on either side of the intrinsic fiber optic sensor, wherein the transmission structure comprises a bi-stable spring having a first and a second stable deflection position and a negative stiffness range around an unstable equilibrium position between the first and second stable deflection position, and wherein the optical fiber between the transmission structure and the reference body is pre-stressed such as to be tensed, said optical fiber thereby acting as a spring having a first spring constant of positive value, wherein the optical fiber thereby counteracts a spring action of the bi-stable spring such as to operate the bi-stable spring in a deflection position range within the negative stiffness range, the deflection position range not including the unstable equilibrium position of the bi-stable spring.

A sensor includes a weight body, a frame which is located so as to surround the weight body when viewed from above, a beam part which is provided with flexibility and in which a first end is connected to the weight body and a second end is connected to the frame, and a detection part which is provided on the beam part and detects deformation of the beam part as an electric signal. The beam part includes a main part in which a cross-sectional shape in a direction perpendicular to a longitudinal direction connecting the first end and the second end is a rectangular shape, and an extending part which protrudes from at least one of an upper surface or a lower surface of the main part and extends in the longitudinal direction or extends in a width direction perpendicular to the longitudinal direction when viewed from above.

This accelerometer (100) includes a substrate (30) and a bonding member (90) that bonds the substrate (30) and a supporting member (50) to each other, and the bonding member (90) is arranged in a region (R3) that straddles a first region (R1) in which a first sensor element (11) is arranged and a second region (R2) in which a second sensor element (12) is arranged in a plan view.

The MEMS device is formed by a substrate and a movable structure suspended on the substrate. The movable structure has a first mass, a second mass and a first elastic group mechanically coupled between the first and the second masses. The first elastic group is compliant along a first direction. The first mass is configured to move with respect to the substrate along the first direction. The MEMS device also has a second elastic group mechanically coupled between the substrate and the movable structure and compliant along the first direction; and an anchoring control structure fixed to the substrate, capacitively coupled to the second mass and configured to exert an electrostatic force on the second mass along the first direction. The anchoring control structure controls the MEMS device in a first operating state, wherein the second mass is free to move with respect to the substrate along the first direction, and in a second operating state, wherein the anchoring control structure applies a pull-in force on the second mass which anchors the second mass to the anchoring structure.

A microelectromechanical accelerometer for measuring acceleration, comprising a first proof mass and ae second proof mass. The first proof mass is adjacent to the second proof mass. A suspension structure allows the first proof mass to undergo rotation out of the device plane about a first rotation axis and the suspension structure allows the second proof mass to undergo rotation out of the device plane about a second rotation axis. The first and second rotation axes are parallel to each other and define an x-direction which is parallel to the first and the second rotation axes and a y-direction which is perpendicular to the x-direction. The y-coordinate of the first rotation axis is greater than the y-coordinate of the second rotation axis by a nonzero distance D.

A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam which are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction.