An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.

A signal processing device includes detection circuitry and correction circuitry. The detection circuitry includes a first detection unit and a second detection unit. The first detection unit generates at least one detection signal based on an associated one of output signals corresponding to each of at least two directions. The second detection unit has a broader detection range than the first detection unit and generates at least one correction signal based on the associated one of the output signals corresponding to each of the at least two directions. The correction circuitry corrects an associated one of the detection signals corresponding to each of the at least two directions with at least an associated one of the correction signals corresponding to at least one direction, other than one direction subjected to correction, out of the at least two directions.

Disclosed are an environment information sensor circuit and an environment information measurement device which can sense various kinds of environment information, such as pressure, humidity, acceleration and the like, and simply reduce quantization noise by employing a dual quantization capacitance-to-digital converter structure. The environment information sensor circuit comprises: a switch capacitor that outputs one among pressure information, humidity information, and acceleration information on the basis of a first clock signal and a second clock signal that do not overlap; a single-bit first order delta-sigma converter that includes an integrator which integrates the output from the switch capacitor and outputs the integrated output as an analog value, and a single-bit quantizer which compares the output from the integrator and a preset threshold voltage and outputs a single-bit digital signal corresponding to a comparison result; and a multi-bit quantizer that is connected to an output end of the integrator via a sampling switch, and quantizes the output from the integrator at the moment the sampling switch is turned on according to a sampling signal.

In a MEMS electrostatic capacitor type acceleration sensor, the manufacturing costs of MEMS elements are reduced, and at the same time, the variations of the electrical and mechanical characteristics of the MEMS elements are reduced. A detection circuit generates a voltage signal corresponding to the product of a difference between the two capacitance values of a pair of MEMS capacitors and a servo signal. A modulation circuit outputs a signal corresponding to the difference between the capacitance values using the servo signal. The control circuit outputs the servo signal on the basis of a signal corresponding to the difference between the capacitance values.

An inertial sensor according to the embodiment includes a first sensor, a first detection circuit, a second sensor, a second detection circuit, and a range setting unit. The first sensor detects a first physical quantity on a first axis. The first detection circuit outputs first detection information based on a first sensor signal from the first sensor. The second sensor detects a second physical quantity on a second axis. The second detection circuit outputs second detection information based on a second sensor signal from the second sensor. The range setting unit performs range setting processing of setting a detection range of the first physical quantity in the first detection circuit based on the first detection information and the second detection information.

According to one embodiment, a sensor includes a stage, a driver, and a detector. The stage includes a first portion and a second portion. The driver is configured to rotate the stage. A rotation axis of the stage passes through the first portion and is along a first direction. A second direction from the first portion to the second portion crosses the first direction. The second portion is configured to rotate along a circumferential direction with the rotation axis as a center when the stage rotating. The detector is provided at the second portion. The detector includes a first detection element configured to detect a first acceleration including a component along the second direction, and a second detection element configured to detect a second acceleration including a component along the first direction.

The disclosure describes techniques to damp the proof mass motion of an accelerometer while achieving an underdamped resonator. In an example of an in-plane micro-electromechanical systems (MEMS) VBA, the proof mass may contain one or more damping combs that include one or more banks of rotor comb fingers attached to the proof mass. The rotor comb fingers may be interdigitated with stator comb fingers that are attached to fixed geometry. These damping comb fingers may provide air damping for the proof mass when the MEMS die is placed into a package containing a pressure above a vacuum. The geometry of the damping combs with a reduced air gap and large overlap area between the rotor comb fingers and stator comb fingers. The geometry of resonator of the VBA of this disclosure may be configured to avoid air damping.

Methods and systems for compensation of a microelectromechanical system (MEMS) sensor may include associating test temperature values with input test signal values, identifying temperature-input signal pairs, and applying one of the test temperature values and one of the test signal values to the MEMS sensor. Desired output signal values may be determined, with each of the desired output signal values corresponding to one of the applied temperature-input signal pairs. Measured output signal values from the MEMS sensor may be measured, with each of the measured output signal values corresponding to one of the applied temperature-input signal pairs. Compensation terms may be determined based on the plurality of temperature-input signal pairs, the corresponding plurality of measured output signal values, and the corresponding plurality of desired output signal values. Compensation terms may be used to modify a sense signal of the MEMS sensor.

The disclosure describes techniques to adjust the geometry of a pendulous proof mass VBA to operate with sufficient signal-to-noise performance while avoiding nonlinear mechanical coupling at specified frequencies. The techniques of this disclosure include adding anchor support flexures to a resonator connection structure, adjusting shape, thickness, and the material of VBA components and of the VBA support structure to both control the frequency of any mechanical resonant modes and to adjust the mechanical mode frequencies away from desired operating frequencies and, in some examples, away from harmonics of desired operating frequencies.

The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: a readout circuit used for analog signal processing of the output signal of the MEMS sensor to generate detection voltage; a cancellation voltage generation circuit used for generating a gravity cancellation voltage according to the detection voltage, wherein the gravity cancellation voltage and the gravity acceleration are in a positive proportional relationship; a selection circuit used for selecting the detection voltage output in a feedback phase and selecting the gravity cancellation voltage output in a gravity cancellation phase, wherein in one detection period, the feedback phase is located after the gravity cancellation phase; and a feedback circuit used for generating a feedback voltage according to the output voltage of the selection circuit, wherein the feedback voltage is in a positive proportional relationship with the output voltage of the selection circuit. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can cancel the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.