An inertial sensor module includes: a first inertial sensor having a first axis as a detection axis; and a second inertial sensor having the first axis as a detection axis, in which detection accuracy of the first inertial sensor is higher than detection accuracy of the second inertial sensor, and the operation circuit receives a detection signal of the first axis output from the first inertial sensor and a detection signal of the first axis output from the second inertial sensor, and selects and outputs either a first output signal based on the detection signal of the first axis output from the first inertial sensor or a second output signal based on the detection signal of the first axis output from the second inertial sensor.

Systems and methods are described herein for extracting inertial information from nonlinear periodic signals. A system for determining an inertial parameter can include circuitry configured for receiving first and second analog signals from first and second sensors, each sensor responsive to motion of a proof mass. The system can include circuitry configured for determining a difference between the first and second analog signals, determining a plurality of timestamps corresponding to times at which the difference crosses a threshold, and determining a plurality of time intervals based on the timestamp. The system can include circuitry configured for determining a result of applying a trigonometric function to a quantity, the quantity based on the plurality of time intervals and determining the inertial parameter based on the result.

According to one embodiment, a sensor is disclosed. The sensor includes a substrate, a first fixed electrode arranged on the substrate, a movable electrode arranged above the first fixed electrode and being movable non-parallely, a second fixed electrode arranged above the movable electrode. The sensor further includes a detector to detect a difference between a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the movable electrode and the second fixed electrode.

A microelectromechanical system (MEMS) accelerometer incorporates deformation sensing with a plurality of sense electrodes positioned to facilitate determining a deformation pattern (e.g., asymmetric or symmetric) of an underlying substrate layer relative to a MEMS layer. The deformation pattern of the substrate layer contributes to offset and/or sensitivity of the accelerometer, so the determination of the deformation pattern enables processing circuitry to compensate and improve offset and/or sensitivity stability. Tilt sense electrodes and/or comparison electrodes may be incorporated alongside the plurality of sense electrodes to monitor deformation of the substrate layer relative to a fixed portion of the MEMS layer.

An aircraft recorder system is provided in which a vibration sensor including at least one of a micro-electromechanical systems (MEMS) microphone and a MEMS accelerometer. The system further includes a cockpit voice recorder (CVR) and an active microphone. The active microphone and the vibration sensor each output signals to a signal processor including a subtractor configured to output, to the CVR, a signal that is a result of a subtraction of the signal from the vibration sensor from the signal from the active microphone.

A weight estimation apparatus 1 includes: an impulsive force calculation unit 2 calculating an impulsive force using an acceleration response indicating vibration generated in a structure by the moving object (vehicle 27) moving through the structure, and a weight estimation unit 3 estimating a weight of the moving object using the impulsive force.

A signal processing method includes a processing target signal generation step of generating a processing target signal which is a time-series signal based on a source signal which is a time-series signal output from an object, and a vibration rectification error calculation step of calculating a plurality of vibration rectification errors by performing product-sum operation processing of a first signal based on the processing target signal and a second signal based on a phase-shifted signal of the processing target signal a plurality of times by changing a shift amount.

A signal processing device includes detection circuitry and correction circuitry. The detection circuitry includes a first detection unit and a second detection unit. The first detection unit generates at least one detection signal based on an associated one of output signals corresponding to each of at least two directions. The second detection unit has a broader detection range than the first detection unit and generates at least one correction signal based on the associated one of the output signals corresponding to each of the at least two directions. The correction circuitry corrects an associated one of the detection signals corresponding to each of the at least two directions with at least an associated one of the correction signals corresponding to at least one direction, other than one direction subjected to correction, out of the at least two directions.

According to an embodiment, a sensor including a machine learning core (MLC) and a finite state machine (FSM) circuit for detecting a shock event is provided. The MLC continuously calculates a value based on the change in velocity. The FSM circuit compares the value to a first threshold and generates a first interrupt if it is greater than the first threshold. The FSM circuit then compares the value to a second threshold less than the first threshold and generates a second interrupt if it is less than or equal to the second threshold after the first interrupt. The MLC calculates a maximum value between the first and second interrupts and stores it in a register, which is read by an application processor of a host device after receiving the second interrupt. The maximum acceleration norm value is reset after a delay after the second interrupt is generated.

This application relates to circuitry for processing sense signals generated by MEMS capacitive transducers for compensating for distortion in such sense signals. The circuitry has a signal path between an input (204) for receiving the sense signal and an output (205) for outputting an output signal based on said sense signal. Compensation circuitry (206, 207) is configured to monitor the signal at a first point along the signal path and generate a correction signal (Scorr); and modify the signal at at least a second point along said signal path based on said correction signal. The correction signal is generated as a function of the value of the signal at the first point along the signal path so as to introduce compensation components into the output signal that compensate for distortion components in the sense signal. The first point in the signal path may be before or after the second point in the signal path. The monitoring may be performed in an analogue or a digital part of the signal path and in either case the modification may be applied in an analogue or a digital part of the signal path.