An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.

A sensor for sensing a physical transmitter field dependent on a physical quantity to be measured, including: a sensor circuit for sensing the transmitter field and for outputting a sensor signal dependent on the transmitter field a circuit carrier having a first region in which at least a part of the sensor circuit is supported and a second region in which at least a first mechanical interface and a second mechanical interface for connecting the circuit carrier to a retainer are arranged, and a noise resistance element, which is arranged between the first region and the second region and which is designed to conduct structure-borne noise entering via the first mechanical interface to the second mechanical interface.

A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.

The disclosure relates to a microelectromechanical device where the device structure includes a rotating mass structure and a linear mass structure. The rotating mass structure is formed of two rotating mass parts elastically coupled to the support through one or more springs that enable rotary motion of each of the rotating mass parts about respective rotary axes that extend parallel to each other along a first in-plane direction (IP1). The linear mass structure includes at least one elongate rigid body that extends in a second in-plane direction (IP2). One end of the linear mass structure is coupled to the first rotating mass part and the other end of the linear mass structure is coupled to the second rotating mass part such that rotary motions of the first and second masses result into linear motion of the linear mass structure in the out-of-plane direction (OP).

A physical quantity sensor includes, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a substrate; and a moving member facing the substrate in the third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first region that has a plurality of penetration holes penetrating the moving member in the third direction and having a square opening shape as viewed from the third direction, and a second region having no penetration hole. At least one of a length in the first direction and a length in the second direction of the second region is equal to or greater than S0+2×S1, where S0 is a length of one side of the penetration hole, and S1 is a space between the penetration holes next to each other.

An inertial sensor includes a movable mass spaced apart from a surface of the substrate. The movable mass is adapted for motion about a rotational axis positioned between first and second ends of the movable mass in response to a first force imposed upon the movable mass in a first direction that is perpendicular to the surface of the substrate. The inertial sensor further includes a damping system configured to limit motion of the movable mass in a second direction perpendicular to the first direction. The damping system includes a first damping structure coupled to the movable mass, a second damping structure adjacent to the first damping structure, the first and second damping structures being spaced apart from the surface of the substrate, and a spring structure interconnected between the movable mass and the second damping structure.

A vibration sensor having a moveable mass adapted to move in response to vibrations or accelerations. The sensor includes a damping arrangement that includes a damping fluid or gel. The moveable mass is arranged to interact directly or indirectly with the damping fluid or gel in order to reduce a mechanical resonance peak of the vibration sensor. The damping fluid or gel has a viscosity between 1000 cP and 100000 Cp and damping properties that are substantially stable over time.

To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

A physical quantity sensor includes a substrate, and a moving member facing the substrate in a third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first part and a second part, and a plurality of penetration holes arranged at the first part and the second part and penetrating the moving member in the third direction. In at least one of a first area overlapping the first part and a second area overlapping the second part, as viewed in a plan view from the third direction, C≤1.5×Cmin is satisfied, where C is a damping and Cmin is a minimum value of the damping.

The disclosure describes techniques to adjust the geometry of a pendulous proof mass VBA to operate with sufficient signal-to-noise performance while avoiding nonlinear mechanical coupling at specified frequencies. The techniques of this disclosure include adding anchor support flexures to a resonator connection structure, adjusting shape, thickness, and the material of VBA components and of the VBA support structure to both control the frequency of any mechanical resonant modes and to adjust the mechanical mode frequencies away from desired operating frequencies and, in some examples, away from harmonics of desired operating frequencies.