A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to the support structure; and, a proof mass flexibly suspended by the suspension springs; wherein at least one of the suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.

Disclosed is a charge output element, comprising: a support comprising a connecting part; a piezoelectric element, which is an annular structural body and is sleeved on the connecting part, wherein the piezoelectric element is provided with a first deformation groove, and the first deformation groove passes through a side wall of the piezoelectric element to disconnect the piezoelectric element in a circumferential direction; and a mass block, which is an annular structural body and is sleeved on the piezoelectric element, wherein the piezoelectric element is in interference fit with the connecting part and the mass block, and the piezoelectric element, the mass block and the support of the charge output element are in rigid contact with each other. Further disclosed are a method for assembling the charge output element and a piezoelectric accelerometer.

The present disclosure relates to the technical field of wireless detection, in particular to a wireless communication point inspection vibrometer configured to monitor vibration and temperature of rotating equipment, comprising: a housing, internally provided with a piezoelectric transducer, a temperature detection component and a first printed circuit board, wherein the piezoelectric transducer and the temperature detection component are both in communication connection with the first printed circuit board, and the first printed circuit board is provided with a wireless transmitting component. The present disclosure solves the problems that an external antenna is adopted in signal transmission of a piezoelectric acceleration transducer in the prior art, and the external antenna is large in volume and is not convenient to be installed in a relatively small space.

A three-axis piezoelectric accelerometer, comprising: a housing, three charge output elements arranged inside the housing, and a connector electrically connected to the three charge output elements, wherein the three charge output elements are respectively used for detecting vibrations in directions along X-axis, Y-axis and Z-axis which are perpendicular to each other in pairs. The charge output element comprises: a support comprising a connecting part; a piezoelectric element being an annular structural body, wherein the piezoelectric element is connected to the connecting part in a sheathed manner and is provided with a first deformation groove penetrating a side wall of the piezoelectric element to disconnect the piezoelectric element in a circumferential direction; and a mass block being an annular structural body, wherein the mass block is connected to the piezoelectric element in the sheathed manner, and the piezoelectric element is in interference fit with the connecting part and the mass block.

Disclosed is a piezoelectric ceramic stacked structure and a piezoelectric accelerometer. The piezoelectric ceramic stacked structure comprises: a columnar piezoelectric ceramic body comprising a first end portion and a second end portion opposite to each other in the axial direction, wherein the columnar piezoelectric ceramic body comprises two or more piezoelectric ceramic stacked layers, and two adjacent electrodes of two adjacent piezoelectric ceramic stacked layers have same polarity; a surface, facing the first end portion, of each piezoelectric ceramic stacked layer is provided with an electrode lead terminal; and two adjacent electrode lead terminals have opposite polarities and are staggered in the axial direction, and the electrode lead terminal provided on each piezoelectric ceramic stacked layer in the columnar piezoelectric ceramic body is exposed to an external environment; and a connecting component, wherein the two or more piezoelectric ceramic stacked layers are connected by the connecting component.

The present disclosure relates to the technical field of sensors, in particular to a piezoelectric ceramic structure, comprising at least one first piezoelectric layer and at least one second piezoelectric layer stacked on each other, wherein the first piezoelectric layer having a first structure in which a piezoelectric coefficient decreases as temperature increases, and the second piezoelectric layer having a second structure in which a piezoelectric coefficient increases as temperature increases, and an electrode layer is disposed between the first piezoelectric layer and the second piezoelectric layer, and disposed on exposed end surfaces of the first piezoelectric layer and the second piezoelectric layer. A piezoelectric acceleration sensor having the above piezoelectric ceramic structure is also provided. The present disclosure provides a piezoelectric ceramic structure with good high temperature properties and a piezoelectric acceleration sensor having the same.

An accelerometer sensor with a protective sleeve for electric cables, the sensor having a base forming a body, a plastic coating being overmolded around an external wall of the base and around an end portion of the sleeve adjacent to the connecting pin. The end portion of the sleeve is surrounded by a connecting element at least partially embedded in the overmolding material and having, on the one hand, an anchorage to the sleeve which are arranged on the connecting element facing the end portion of the sleeve and, on the other hand, a retainer of a portion of overmolding material or bonding to the portion of overmolding material enveloping the end portion of sleeve.

A piezoelectric sensor device comprising a piezoelectric element and at least one metallic body, with an insulating body arranged between each metallic body and the piezoelectric element. The insulating body substantially consists of a crystalline material or ceramics. At least one surface of the insulating body in contact with the metallic body is covered by a metallic layer in order to suppress noise signals due to a stick-slip effect and differing thermal expansion coefficients

A method of manufacturing a low density accelerometer comprises the steps of: providing a rigid hollow housing having an upper member and a lower member and forming a groove circumferentially along an inner surface of the rigid hollow housing about a location where the upper member is configured to meet the lower member; providing a sensor assembly including a sensing element affixed to a solid proof mass; disposing the sensor assembly in the lower member of the rigid hollow housing, such that an outer edge of the sensing element engages and is in physical contact with the groove defined in the inner surface of the rigid hollow housing; and placing the upper member of the rigid hollow housing over the lower member of the rigid hollow housing, to enclose the sensor assembly within the rigid hollow housing, wherein the sensor assembly is in physical contact with the rigid hollow housing at the groove.

The present invention relates to a piezoelectric ceramic stacked structure, and the piezoelectric ceramic stacked structure includes at least one first layer including a KNN-based ceramic; and at least one second layer including a BFO-based ceramic, wherein a ratio of a number (n1) of the first layers stacked to a number (n2) of the second layers stacked in the piezoelectric ceramic stacked structure satisfies Equation (1) below:

0.8?|q|/|p|?n1/n2?1.2?|q|/|p|(1) (Equation (1) is as defined in the Description).