A mechanical link for a microelectromechanical and/or nanoelectromechanical structure, the structure includes a mobile component, a fixed component extending on a main plane and means for detecting the displacement of the mobile component relative to the fixed component, the mechanical link comprising: a first link linked to the fixed component and to the mobile component and capable of allowing the rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection means at a given distance relative to the axis of rotation in a direction at right angles to the axis of rotation; a third link linked to the fixed component and to the detection means, and configured to guide the detection means in translation in a direction of translation in the plane of the fixed component; such that the combination of the second link and of the third link is capable of transforming the rotational movement of the mobile component into a translational movement of the detection means in the direction of translation.

This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of attaching suspenders to the inertial mass with at least one flexure, which allows the end of the suspender which is attached to the inertial mass to rotate in relation to the inertial mass at this attachment point when the inertial mass is in motion. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 g and 0.01/hr, representing a dynamic range of 10 orders of magnitude.

The disclosure provides a charge output element and a piezoelectric acceleration sensor. The charge output element includes: a base including a supporting member and a connecting member disposed on the supporting member; a flexible member sleeved on the connecting member for bending deformation; a mass block assembly disposed around a circumference of the connecting member, wherein the mass block assembly is coupled to the connecting member by the flexible member and suspended above the supporting member to drive the flexible member to be bent and deformed in an extending direction of the connecting member; and a piezoelectric element attached to a surface of the flexible member away from the supporting member and disposed to move along with movement of the flexible member. Therefore, the sensitivity of the charge output element can be improved while the sensitivity of the charge output element is not susceptible to the strain of the base.

The disclosure provides a piezoelectric acceleration sensor including a charge output element, a casing, a cable assembly and a connector. The casing is snap-fitted to a supporting portion of a base of the charge output element, and forms a receiving space for receiving the charge output element, the piezoelectric, and the mass block with the supporting portion. The cable assembly is connected to the supporting portion. The connector is connected to an end of the cable assembly facing away from the supporting portion, and is insulated from the cable assembly. One end of either of a first lead and a second lead of the cable assembly is electrically connected to the piezoelectric element, while the other end of the first lead is electrically connected to a conductive terminal of the connector and the other end of the second lead is electrically connected to a housing of the connector.

The disclosure relates to a piezoelectric acceleration sensor. The piezoelectric acceleration sensor includes: a charge output member comprising a base, a piezoelectric element disposed on the base and a mass, wherein the base includes a supporting portion and a connecting portion disposed on the supporting portion and extending in a first direction, and the piezoelectric element and the mass are sleeved on the connecting portion; a shielding cover sleeved on the connecting portion, wherein the shielding cover is connected to the connecting portion and the supporting portion, the shielding cover forms a shielding space outside a periphery of the connecting portion and above the supporting portion, and the piezoelectric element and the mass are arranged in the shielding space; and a housing coupled with the supporting portion, wherein the housing and the supporting portion form an accommodating space for accommodating the charge output member and the shielding cover.

A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Poisson's ratio and orientation with a relatively low Poisson's ratio (hereinafter, referred to as low Poisson's ratio orientation) as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Poisson's ratio orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as high expansion and contraction direction) and a direction where a degree thereof is relatively low.

The present disclosure relates to a charge output device, an assembly method and a piezoelectric acceleration sensor. The charge output device includes a base, including a polygonal connecting member including a plurality of sides; a piezoelectric assembly, including at least two piezoelectric units distributed along a circumferential direction of the connecting member and spaced apart from each other, the at least two piezoelectric units are disposed corresponding to at least two of the plurality of sides of the connecting member, and each piezoelectric unit includes at least one piezoelectric crystal, wherein the respective piezoelectric crystals of the at least two piezoelectric units are connected in parallel; and a mass assembly, disposed on an outer circumferential side of the piezoelectric assembly such that the piezoelectric assembly is located between the connecting member and the mass assembly, the connecting member, the piezoelectric assembly and the mass assembly are interference-fitted with each other.

A microelectromechanical system (MEMS) apparatus is described. The MEMS apparatus may comprise inertial sensors and energy harvesters configured to convert mechanical vibrational energy into electric energy. The harvested energy may be used to power an electronic circuit, such as the circuit used to sense acceleration from the inertial sensors. The inertial sensors and the energy harvesters may be disposed on the same substrate, and may share the same proof mass. The energy harvesters may include a piezoelectric material layers disposed on a flexible structure. When the flexible structures flexes in response to vibration, stress arises in the piezoelectric material layer, which leads to the generation of electricity. Examples of inertial sensors include accelerometers and gyroscopes.

A method of determining whether parametric performance of an inertial sensor has been degraded comprises: recording first data output from an inertial sensor; then recording second data output from the inertial sensor; comparing the first data output with the second data output; and determining whether the parametric performance of the inertial sensor has been degraded based on the comparison between the first and second data output.