An intermediate connecting member according to one aspect of the present disclosure is provided between a first member including multiple first terminals and a second member including multiple second terminals. The intermediate connecting member includes multiple connection parts configured to electrically connect the first terminals to the second terminals, and a retainer holding the multiple connection parts. Each of the multiple connection parts is formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member.

A cassette magazine for thin semiconductor wafers comprises first and second sidewalls, one or more rods or plates coupling the first and second sidewalls to one another, and a plurality of slot supports configured to support sides of the thin semiconductor wafers extending inward from both the first sidewall and the second sidewall, the plurality of slot supports having widths sufficient to cause a distance by which centers of the thin semiconductor wafers sag to be less than about 0.3 cm when the thin semiconductor wafers have thicknesses of about 100 μm and diameters of 200 mm.

A probe card in an automated test equipment (ATE) is disclosed. The probe card may be a portion of a vertical-type probe card assembly in which pads on a circuit board are contacted by probe pins, with vertical vias in the circuit board interconnecting various conductive elements. Disclosed herein is a probe card having ground vias in a coaxial arrangement around a signal via that provide electromagnetic shielding to a signal via to reduce crosstalk between adjacent signal vias.

A method for electrically contacting components in a semiconductor wafer includes providing a flexible board comprising a first main surface on which a plurality of conductor tracks are arranged, positioning the board with respect to a semiconductor wafer such that the first main surface of the board faces the semiconductor wafer, the board is bent and pressed onto the semiconductor wafer in such a way that contact elements of a plurality of components arranged in a row in the semiconductor wafer come into contact with the conductor tracks, and electrical signals are applied to the components through the conductor tracks.

A tubular body extending in a longitudinal direction and having conductivity includes a first spring portion having a spiral notch formed in a peripheral surface of the tubular body, a second spring portion having a spiral notch formed in the peripheral surface of the tubular body and a first body portion sandwiched between the first spring portion and the second spring portion in the longitudinal direction. The distance from the longitudinal direction center of the tubular body to the longitudinal direction inner end of the first spring portion is equal to the distance from the longitudinal direction center to the longitudinal direction inner end of the second spring portion. The number of turns of the first spring portion is equal to the number of turns of the second spring portion. The first spring portion includes a first winding spring portion and a second winding spring portion.

A method for testing at least one single chip in a wafer probing system, at least comprising: providing an adapter plate having an interface surface for contacting a vacuum chuck of the wafer probing system, the adapter plate being configured to accommodate the at least one single chip in a cutout with a chip rear surface being flush with the interface surface; loading the adapter plate with the at least one single chip into the wafer probing system; determining an exact position of the at least one single chip in the adapter plate in the search area; and testing the at least one single chip with test routines stored in a controller of the wafer probing system. A device and an adapter plate for testing at least one single chip in a wafer probing system.

A test board for testing a semiconductor apparatus includes a first board configured to support a plurality of first Devices Under Test (DUTs) such that the plurality of first DUTs are mounted on the first board, a plurality of first inter-board connectors arranged on the first board, and a plurality of second boards stacked on the first board through the plurality of first inter-board connectors, each second board of the plurality of second boards having a surface configured to support a separate second DUT of a plurality of second DUTs such that the plurality of second DUTs are mounted on separate, respective second boards of the plurality of second board.

A board-like connector, a dual-ring bridge of a board-like connector, and a wafer testing assembly are provided. The board-like connector includes a plurality of dual-ring bridges spaced apart from each other and an insulating layer. Each of the dual-ring bridges includes two carrying rings, two cantilevers respectively extending from and being coplanar with the two carrying rings, two abutting columns respectively extending from the two cantilevers along two opposite directions, and a bridging segment that connects the two carrying rings. The insulating layer connects the two carrying rings of the dual-ring bridges, and the two abutting columns of the dual-ring bridges respectively protrude from two opposite sides of the insulating layer. The two abutting columns of each of the dual-ring bridges are configured to be respectively abutted against two boards.

An electrical characteristics inspection tool capable of inspecting electrical characteristics even when an oxide film is formed on pads or bumps formed at a fine pitch. The electrical characteristics inspection tool includes: a flexible sheet; a through electrode having a recess that is recessed from one surface of the flexible sheet; and a conductive elastomer disposed in the recess of the through electrode. Electrical characteristics can be inspected even when an oxide film is formed on pads or bumps of an inspection object by bringing the conductive elastomer into contact with the pads or bumps and bringing a probe into contact with the through electrode since the conductive particles in the conductive elastomer break through the oxide film.

Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.