Patent classifications
G01R31/307
Apparatuses including test segment circuits having latch circuits for testing a semiconductor die
Apparatuses including test segment circuits and methods for testing the same are disclosed. An example apparatus includes a plurality of segment lines configured to form a ring around a die and a plurality of test segment circuits, each test segment circuit coupled to at least two segment lines of the plurality of segment lines. Each test segment circuit is coupled to a portion of a first signal line, a portion of a second signal line, and a portion of a third signal line and each test segment circuit is configured to control an operation performed on at least one segment line of the plurality of segment lines.
Apparatus for and method of net trace prior level subtraction
A method in which connectivity tests of integrated circuit structures in a die are performed. The connectivity tests are performed at a first level of the die. Potential defect locations are identified in the die indicating via locations susceptible to systematic failure due to via opens or via shorts. The potential defect locations are translated to via locations for a second level of the die. The second level is below the first level. After translating the hot spot, the second level is inspected for defects. The via locations on the first level are inspected for defects. All defects for the second level are translated to the via locations for the first level. A net trace of defects is created using prior level subtraction of the translated defects for the second level and the defects for the first level.
Apparatus for and method of net trace prior level subtraction
A method in which connectivity tests of integrated circuit structures in a die are performed. The connectivity tests are performed at a first level of the die. Potential defect locations are identified in the die indicating via locations susceptible to systematic failure due to via opens or via shorts. The potential defect locations are translated to via locations for a second level of the die. The second level is below the first level. After translating the hot spot, the second level is inspected for defects. The via locations on the first level are inspected for defects. All defects for the second level are translated to the via locations for the first level. A net trace of defects is created using prior level subtraction of the translated defects for the second level and the defects for the first level.
Forecasting Wafer Defects Using Frequency Domain Analysis
Defect information obtained from a test wafer is received. The test wafer was fabricated according to an Integrated Circuit (IC) design layout. A plurality of first regions of interest (ROIs) is received based on the defect information. The first ROIs each correspond to a region of the IC design layout where a wafer defect has occurred. A frequency domain analysis is performed for the first ROIs. A wafer defect probability is forecast for the IC design layout based at least in part on the frequency domain analysis.
Forecasting Wafer Defects Using Frequency Domain Analysis
Defect information obtained from a test wafer is received. The test wafer was fabricated according to an Integrated Circuit (IC) design layout. A plurality of first regions of interest (ROIs) is received based on the defect information. The first ROIs each correspond to a region of the IC design layout where a wafer defect has occurred. A frequency domain analysis is performed for the first ROIs. A wafer defect probability is forecast for the IC design layout based at least in part on the frequency domain analysis.
Test apparatus and methods for arc mitigation device
A test apparatus includes an output configured to be coupled to a sense input of an arc quenching device control circuit of an arc quenching system, a user interface, and a control circuit configured to generate a simulated sense signal at the output in response to an input at the user interface, the simulated sense signal representing a physical state associated with a fault condition of a bus coupled to the arc quenching system. The simulated sense signal may be configured to cause the arc quenching device control circuit to trigger an arc quenching device of the arc quenching system. The physical state may include, for example, a voltage condition, a current condition, a temperature, a pressure or a light intensity. In some embodiments, the simulated sense signal may include a current indicative of a current passing through a bus to which the arc quenching system is connected.
Test apparatus and methods for arc mitigation device
A test apparatus includes an output configured to be coupled to a sense input of an arc quenching device control circuit of an arc quenching system, a user interface, and a control circuit configured to generate a simulated sense signal at the output in response to an input at the user interface, the simulated sense signal representing a physical state associated with a fault condition of a bus coupled to the arc quenching system. The simulated sense signal may be configured to cause the arc quenching device control circuit to trigger an arc quenching device of the arc quenching system. The physical state may include, for example, a voltage condition, a current condition, a temperature, a pressure or a light intensity. In some embodiments, the simulated sense signal may include a current indicative of a current passing through a bus to which the arc quenching system is connected.
IN-LINE DETECTION OF ELECTRICAL FAILS ON INTEGRATED CIRCUITS
Embodiments of the present disclosure relate to in-line detection of electrical fails on integrated circuits. One embodiment is an apparatus including a device region with integrated circuits and a test region for in-line failure detection of the integrated circuits using an in-line voltage contrast test, the apparatus comprising: a substrate including a first area for the device region and a second different area for the test region; metal layers formed over both areas; wherein the integrated circuits are formed from first sections of the layers; and wherein a second section of an upper metal layer of the layers is segmented into test segments, each test segment to exhibit a predefined response during the in-line voltage contrast test depending on whether the test segment is shorted, or not, to the substrate and/or the second section of a gate layer of the layer. Other embodiments may be disclosed and/or claimed.
IN-LINE DETECTION OF ELECTRICAL FAILS ON INTEGRATED CIRCUITS
Embodiments of the present disclosure relate to in-line detection of electrical fails on integrated circuits. One embodiment is an apparatus including a device region with integrated circuits and a test region for in-line failure detection of the integrated circuits using an in-line voltage contrast test, the apparatus comprising: a substrate including a first area for the device region and a second different area for the test region; metal layers formed over both areas; wherein the integrated circuits are formed from first sections of the layers; and wherein a second section of an upper metal layer of the layers is segmented into test segments, each test segment to exhibit a predefined response during the in-line voltage contrast test depending on whether the test segment is shorted, or not, to the substrate and/or the second section of a gate layer of the layer. Other embodiments may be disclosed and/or claimed.
Process for making semiconductor dies, chips, and wafers using in-line measurements obtained from DOEs of NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
Improved processes for manufacturing wafers, chips, or dies utilize in-line data obtained from non-contact electrical measurements (NCEM) of fill cells that contain structures configured target/expose a variety of open-circuit, short-circuit, leakage, or excessive resistance failure modes. Such processes may involve evaluating Designs of Experiments (DOEs), comprised of multiple NCEM-enabled fill cells, in at least two variants, all targeted to the same failure mode(s).