A distance measurement processing device according to an embodiment includes an information acquisition circuit and a reliability-degree generation circuit. The information acquisition circuit acquires a two-dimensional distance image having a measured distance as a pixel value and signal information concerning a signal value corresponding to the measured distance image. The reliability-degree generation circuit sets, for each of the pixels of the two-dimensional distance image, each of the pixels as a center pixel and generates a reliability degree based on information concerning the pixels having distance values equal to or smaller than a predetermined value from a distance value of the center pixel among the pixels contiguous within a predetermined range from the center pixel and a signal value corresponding to the center pixel.

A method for optical sensing includes providing a mirror comprising a central reflective region surrounded by a peripheral glare-suppressing region. A beam of light from a laser light source is directed to reflect from the central region so as to pass through an output optic along an axis toward a target scene. The light returned from the target scene through the output optic is focused onto an optical sensor, via collection optics having a collection aperture surrounding the mirror.

A ranging apparatus for use in a plasma processing chamber having an internal space and a window is disclosed. The ranging apparatus includes at least one external light emitting device disposed external to the plasma processing chamber. The external light emitting device emits at least one source light beam to the internal space through the window. The ranging apparatus includes a base wafer disposed on a stage in the internal space. The ranging apparatus includes at least one optical circuit fixed to the base wafer. The optical circuit deflects the source light beam to a target in the internal space, and deflects a reflection light beam to the window. The ranging apparatus includes at least one external light receiving device disposed external to the plasma processing chamber. The external light receiving device receives the deflected reflection light beam through the window.

A light detection and ranging (LiDAR) scanning system is provided. The system comprises a light steering device; a galvanometer mirror controllable to oscillate between two angular positions; and a plurality of transmitter channels configured to direct light to the galvanometer mirror. The plurality of transmitter channels are separated by an angular channel spacing from one another. The system further comprises a control device. Inside an end-of-travel region, the control device controls the galvanometer mirror to move based on a first mirror movement profile. Outside the end-of-travel region, the control device controls the galvanometer mirror to move based on a second mirror movement profile. The second mirror movement profile is different from the first mirror-movement profile. Movement of the galvanometer mirror based on the first mirror movement profile facilitates minimizing instances of scanlines corresponding to the end-of-travel region having a pitch exceeding a first target pitch.

Various technologies described herein pertain to a time of flight lidar sensor system that uses a coherent detection scheme. The lidar sensor system includes a laser source, a semiconductor optical amplifier, a combiner, and a balanced detector. The laser source emits an input optical signal. The semiconductor optical amplifier receives a first portion of the input optical signal and outputs a modulated optical signal (amplified and modulated). The combiner receives a second portion of the input optical signal and a returned optical signal received responsive to transmission of at least a portion of the modulated optical signal. The combiner coherently mixes the second portion of the input optical signal with the returned optical signal and outputs mixed optical signals. The balanced detector detects the mixed optical signals and generates an output signal (e.g., a differential photocurrent), which can be used to detect a distance to a target.

Aspects for an on-chip or integrated continuous-wave Light Detection and Ranging (LiDAR) are described herein. The aspects may include one or more laser light sources configured to generate one or more light beams and multiple light engines configured to respectively receive the light beams. The light frequency is modulated in a predefined pattern. A light transmitter of each light engine may be configured to receive a first portion of one of the light beams and transmit the first portion of the light beam at a predetermined angle. A light receiver of each light engine may be configured to receive the first portion of the light beam reflected from an object and transmit the reflected first portion of the light beam to a balanced detector. The balanced detector may be configured to detect a beat between the reflected first portion of the light beam with a second portion of the light beam.

One example system comprises a light source configured to emit light. The system also comprises a waveguide configured to guide the emitted light from a first end of the waveguide toward a second end of the waveguide. The waveguide has an output surface between the first end and the second end. The system also comprises a plurality of mirrors including a first mirror and a second mirror. The first mirror reflects a first portion of the light toward the output surface. The second mirror reflects a second portion of the light toward the output surface. The first portion propagates out of the output surface toward a scene as a first transmitted light beam. The second portion propagates out of the output surface toward the scene as a second transmitted light beam.

A micro-pulse LiDAR and a method for detecting water vapor, temperature, and pressure of the atmosphere are provided. The micro-pulse LiDAR includes a first transmitter, a second transmitter, a third transmitter, an optical path transmission module, a water vapor channel detection module, a pressure channel detection module, a temperature channel detection module, a multi-channel data accumulator, a processing device, and a pulse generator. The method for detecting the water vapor, the temperature, and the pressure of the atmosphere comprises: chopping, via the processing device, multi-wavelength continuous lasers emitted by the transmitters to obtain multi-wavelength pulsed lasers; transmitting the multi-wavelength pulsed lasers according to established optical paths, and comprehensively detecting the water vapor, the temperature, and the pressure of the atmosphere, so that the three parameters can be input conditions for each other in an inversion process, which improves an iteration speed and inversion accuracy.

According to one aspect, an optical transceiver includes a substrate and a laser fixed to a first surface of the substrate, the laser generating output light for transmission along a transmission axis into a region. An optical detection element is fixed to a second surface of the substrate opposite the first surface, the optical detection element receiving input light reflected from the region along a reception axis through an opening in the substrate between the first and second surfaces of the substrate, the transmission axis and the reception axis being substantially parallel.

The present disclosure relates to a mapping system adapted for detecting objects in an environmental scene, by scanning an environmental scene with propagating energy, and receiving reflected energy back from objects present in the environmental scene, in a prioritized manner, for later use. The system may comprise an imaging subsystem which includes a detection and ranging subsystem for initially identifying primitive objects in the environmental scene. The imaging subsystem may also include an identification and mapping subsystem for prioritizing the primitive objects for further scanning and analysis, to ultimately identify one or more of the primitive objects as one or more abstract objects. An environmental model, updated in real time, is used to maintain a map of the primitive objects and the known abstract objects within the environmental scene, as new primitive objects and new abstract objects are obtained with repeated scans of the environmental scene.