A diffraction grating pattern is formed in the first insulating film on the active layer by electron beam lithography, and at the same time an end facet formation pattern whose end portion corresponds to a position of an emission end facet of the optical modulator is formed in the first insulating film on the optical absorption layer by electron beam lithography. A second insulating film is formed on the end facet formation pattern. The diffraction grating formation layer is etched using the first and second insulating films as masks to form a diffraction grating, and is embedded with an embedded layer. The second insulating film is removed. A third insulating film is formed on the diffraction grating and the embedded layer not to cover the end facet formation pattern. The optical absorption layer is etched using the first and third insulating films as masks to form the emission end facet.

A diffraction grating pattern is formed in the first insulating film on the active layer by electron beam lithography, and at the same time an end facet formation pattern whose end portion corresponds to a position of an emission end facet of the optical modulator is formed in the first insulating film on the optical absorption layer by electron beam lithography. A second insulating film is formed on the end facet formation pattern. The diffraction grating formation layer is etched using the first and second insulating films as masks to form a diffraction grating, and is embedded with an embedded layer. The second insulating film is removed. A third insulating film is formed on the diffraction grating and the embedded layer not to cover the end facet formation pattern. The optical absorption layer is etched using the first and third insulating films as masks to form the emission end facet.

The present disclosure provides an optoelectronic component for a LiDAR system including a photonic integrated circuit. The photonic integrated circuit further includes a microresonator which is configured as an external resonator for an optical gain medium and to provide a frequency-modulated optical transmission field. A waveguide is optically coupled to an output side of the microresonator. A coherent in-line balanced detector comprises an electrical output, as well as a first optical connection side which is coupled to the waveguide to receive the transmission field, and a second optical connection side which is configured to receive a frequency-modulated optical reflection field. The coherent in-line balanced detector is further configured to superimpose the transmission field and the reflection field and to provide an electronic combination signal at the electrical output.

A grating device includes an optical material layer; a channel type optical waveguide region provided in the optical material layer; extension regions provided on the outsides of the channel type optical waveguide region, respectively; a Bragg grating provided in the channel type optical waveguide region; and periodic microstructures provided in the extension regions, respectively. The periodic microstructures are provided in 50 percent or larger of a total of areas of the extension regions.

An optoelectronic device. The device comprises: a silicon-on-insulator platform, including a silicon waveguide, formed in a silicon device layer, a silicon substrate, and a cavity; a III-V semiconductor based device, located within the cavity of the silicon-on-insulator platform and containing a III-V semiconductor based waveguide which is coupled to the silicon waveguide. A region of a bed of the cavity, located between the III-V semiconductor based device and the substrate, includes a patterned surface, which is configured to interact with an optical signal within the III-V semiconductor based waveguide of the III-V semiconductor based device.

Aspects of the technology provides a method of retransmitting signals. The method may include receiving, by a first optical phased array (OPA) of a device, an optical signal from a remote device; amplifying, by one or more amplifiers of the device, the optical signal in the optical domain; and retransmitting, by a second OPA of the device, the optical signal to one or more remote devices without converting the optical signal from the optical domain.