According to an aspect of the present principles, methods are provided for fabricating an integrated structure. A method includes forming a very large scale integration (VLSI) structure including a semiconductor layer at a top of the VLSI structure. The method further includes mounting the VLSI structure to a support structure. The method additionally includes removing at least a portion of the semiconductor layer from the VLSI structure. The method also includes attaching an upper layer to the top of the VLSI structure. The upper layer is primarily composed of a material that has at least one of a higher resistivity or a higher transparency than the semiconductor layer. The upper layer includes at least one hole for at least one of a photonic device or an electronic device. The method further includes releasing said VLSI structure from the support structure.

According to an aspect of the present principles, methods are provided for fabricating an integrated structure. A method includes forming a very large scale integration (VLSI) structure including a semiconductor layer at a top of the VLSI structure. The method further includes mounting the VLSI structure to a support structure. The method additionally includes removing at least a portion of the semiconductor layer from the VLSI structure. The method also includes attaching an upper layer to the top of the VLSI structure. The upper layer is primarily composed of a material that has at least one of a higher resistivity or a higher transparency than the semiconductor layer. The upper layer includes at least one hole for at least one of a photonic device or an electronic device. The method further includes releasing said VLSI structure from the support structure.

A method of manufacturing a coupling element configured to couple light between an optical device and one or more optical fiber comprises forming one or more waveguide in the silica. The one or more waveguide having a refractive index configured to guide the light between the optical device and the optical fiber. The forming of the one or more waveguide comprises photo-inducing a refractive index variation of the silica material.

A method of manufacturing a coupling element configured to couple light between an optical device and one or more optical fiber comprises forming one or more waveguide in the silica. The one or more waveguide having a refractive index configured to guide the light between the optical device and the optical fiber. The forming of the one or more waveguide comprises photo-inducing a refractive index variation of the silica material.

A wafer-level technique to couple an optical fiber to an integrated photonic circuit is presented. A connector is fabricated on top of a substrate. The connector comprises hollow structures with high aspect ratio. The connector receives an optical fiber or a ribbon of optical fibers for connection to the integrated photonic circuit. The connector is made with a certain angle to achieve optimal coupling. The base of connector is aligned to a coupler on the substrate. Light can propagate in both directions from the fiber to the chip or from the chip to the fiber.

A wafer-level technique to couple an optical fiber to an integrated photonic circuit is presented. A connector is fabricated on top of a substrate. The connector comprises hollow structures with high aspect ratio. The connector receives an optical fiber or a ribbon of optical fibers for connection to the integrated photonic circuit. The connector is made with a certain angle to achieve optimal coupling. The base of connector is aligned to a coupler on the substrate. Light can propagate in both directions from the fiber to the chip or from the chip to the fiber.

Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other. The role of the MEMS is essential and it is responsible for altering the paths of the different wavelengths in either device. It would be beneficial to improve the performance of such MEMS and thereby the performance of the optical components and optical systems they form part of. The inventors have established improvements to the design and implementation of such MEMS mirrors as well as optical waveguide technologies to in-plane optical processing as well as the mid infrared for optical spectroscopy.

Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other. The role of the MEMS is essential and it is responsible for altering the paths of the different wavelengths in either device. It would be beneficial to improve the performance of such MEMS and thereby the performance of the optical components and optical systems they form part of. The inventors have established improvements to the design and implementation of such MEMS mirrors as well as optical waveguide technologies to in-plane optical processing as well as the mid infrared for optical spectroscopy.

The invention discloses a subwavelength grating based on bounds state in the continuum as the optical antenna for optical phased array, which includes a substrate and a grating layer atop the substrate. The grating layer includes a strip waveguide and sub-gratings symmetrically arranged on both sides of the strip waveguide. The sub-gratings may also be placed on different layers to build a multi-layer grating. The sub-grating excites the radiation modes, and destructive interference is formed between the sideward radiation modes by adjusting the width of the strip waveguide, which is used to establish the bounds state in the continuum. By designing the grating structure and adjusting the width of the strip waveguide, the invention establishes a diffraction-limited bound state in the continuum between sub-gratings to suppress sideward emission, thereby suppressing crosstalk between gratings, reducing the antenna pitch of the optical phased array, and increasing the phase-tuned beam steering range.

The invention discloses a subwavelength grating based on bounds state in the continuum as the optical antenna for optical phased array, which includes a substrate and a grating layer atop the substrate. The grating layer includes a strip waveguide and sub-gratings symmetrically arranged on both sides of the strip waveguide. The sub-gratings may also be placed on different layers to build a multi-layer grating. The sub-grating excites the radiation modes, and destructive interference is formed between the sideward radiation modes by adjusting the width of the strip waveguide, which is used to establish the bounds state in the continuum. By designing the grating structure and adjusting the width of the strip waveguide, the invention establishes a diffraction-limited bound state in the continuum between sub-gratings to suppress sideward emission, thereby suppressing crosstalk between gratings, reducing the antenna pitch of the optical phased array, and increasing the phase-tuned beam steering range.