A head-mounted display system (100) includes a lens element (110) supported by a support structure (102). The lens element (110) includes a waveguide (212) to couple light from an image source. The waveguide (212) includes a waveguide surface (207) and a grating (250). The grating (250) is disposed onto the waveguide surface (207) and includes rows of three-dimensional, 3D, primitive structures (435), with a height of the 3D primitive structures being smaller than a wavelength of visible incident light at a surface of the sub-wavelength grating.

A head-mounted display system (100) includes a lens element (110) supported by a support structure (102). The lens element (110) includes a waveguide (212) to couple light from an image source. The waveguide (212) includes a waveguide surface (207) and a grating (250). The grating (250) is disposed onto the waveguide surface (207) and includes rows of three-dimensional, 3D, primitive structures (435), with a height of the 3D primitive structures being smaller than a wavelength of visible incident light at a surface of the sub-wavelength grating.

A splitter includes an optical input section, N optical branch sections, and at least (N?1) optical filter structures. Each optical filter structure reflects an optical signal of one wavelength. The at least (N?1) optical filter structures include a special optical filter structure and at least (N?3) common optical filter structures, and a wavelength of an optical signal reflected by each of the common optical filter structures is a common wavelength. A wavelength of an optical signal reflected by a first/second special optical filter structure is a first/second special wavelength. At least (N?3) common wavelengths constitute an arithmetic sequence, a difference between the first special wavelength and a largest common wavelength is greater than a tolerance of the arithmetic sequence, and a difference between the second special wavelength and a smallest common wavelength is greater than the tolerance of the arithmetic sequence.

A method for forming a device structure is disclosed. The method of forming a device structure includes forming a variable-depth structure in a device material layer using a laser ablation. A plurality of device structures is formed in the variable-depth structure to define slanted device structures therein. The variable-depth structure and the slanted device structures are formed using an etch process.

A light source device according to an embodiment of the present disclosure includes: an optical waveguide path including a diffraction grating; a light source unit that outputs laser light having an optical center axis inclined, with respect to the diffraction grating, in a direction in which the optical waveguide path extends; and a light receiving unit that receives light leaking from the optical waveguide path through the diffraction grating from among the laser light outputted from the light source.

The embodiments of the present disclosure provide a method for manufacturing an optical waveguide and an optical waveguide, the method for manufacturing includes: providing a substrate; forming a first thin film layer, a second thin film layer and a sacrificial layer on the substrate in a stacked manner, a refractive index of the first thin film layer is larger than 2; exposing and developing the sacrificial layer so that the sacrificial layer forms a first mask layer; etching the second thin film layer by taking the first mask layer as mask so that the second thin film layer forms a second mask layer; removing the first mask layer, and etching the first thin film layer by taking the second mask layer as mask so that the first thin film layer forms a grating layer; and removing the second mask layer to form the optical waveguide comprising the grating layer and the substrate.

The embodiments of the present disclosure provide a method for manufacturing an optical waveguide and an optical waveguide, the method for manufacturing includes: providing a substrate; forming a first thin film layer, a second thin film layer and a sacrificial layer on the substrate in a stacked manner, a refractive index of the first thin film layer is larger than 2; exposing and developing the sacrificial layer so that the sacrificial layer forms a first mask layer; etching the second thin film layer by taking the first mask layer as mask so that the second thin film layer forms a second mask layer; removing the first mask layer, and etching the first thin film layer by taking the second mask layer as mask so that the first thin film layer forms a grating layer; and removing the second mask layer to form the optical waveguide comprising the grating layer and the substrate.

A compact micro electrical mechanical actuated ring-resonator includes a bus waveguide disposed on a platform; a ring resonator disposed on the platform, including at least a first optical coupler, wherein the ring resonator is optically coupled with the bus waveguide; and a selective waveguide disposed on a piezoelectric cantilever mounted in a trench defined in the platform, wherein the selective waveguide includes a second optical coupler and is controllable to selectively adjust a coupling ratio between the first optical coupler with the second optical coupler by physically changing a distance between the first optical coupler and the second optical coupler.

An optical system includes a tunable laser that generates an optical signal at an output that is wavelength tunable. A wavelength router directs particular wavelength bands of the optical signal to particular ones of the plurality of outputs. An optical emitter emits an optical beam at an output, wherein tuning the tunable laser steers the emitted beam.

Provided herein include various examples of an apparatus, flow cells that include these examples of the apparatus, and methods of making these examples of the apparatus. The apparatus can include a molding layer over a substrate and covering sides of a light detection device. The molding layer comprises a first region and a second region, which, with the active surface of the light detection device, form a contiguous surface. A waveguide integration layer is between the contiguous surface and a waveguide. The waveguide integration layer comprises optical coupling structures over the first and second regions, to optically couple light waves from a light source to the waveguide. The waveguide utilizes the light waves to excite light sensitive materials in nanowells. A nanostructure layer over the waveguide comprises the nanowells. Each nanowell shares a vertical axis with a location on the active surface of the light detection device.