Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other. The role of the MEMS is essential and it is responsible for altering the paths of the different wavelengths in either device. It would be beneficial to improve the performance of such MEMS and thereby the performance of the optical components and optical systems they form part of. The inventors have established improvements to the design and implementation of such MEMS mirrors as well as optical waveguide technologies to in-plane optical processing as well as the mid infrared for optical spectroscopy.

Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other. The role of the MEMS is essential and it is responsible for altering the paths of the different wavelengths in either device. It would be beneficial to improve the performance of such MEMS and thereby the performance of the optical components and optical systems they form part of. The inventors have established improvements to the design and implementation of such MEMS mirrors as well as optical waveguide technologies to in-plane optical processing as well as the mid infrared for optical spectroscopy.

A transceiver system may include a laser and a silicon optical grating. The laser may be configured to emit a laser beam at an output of the laser. The laser beam may have a non-circular elliptical mode profile. The silicon grating may be configured to exhibit a mode profile having a shape corresponding to the non-circular elliptical mode profile of the laser beam.

A device and system for coupling optical vortex multiplexed light into and out of a photonic integrated circuit. The multi-mode forked grating coupler device comprises: (i) a multi-mode forked grating structure configured to receive at least one optical vortex multiplexed light beam, wherein the multi-mode forked grating structure comprises at least one forked region positioned amidst a plurality of grooves, wherein the forked region comprises a single groove forking into two grooves, wherein the single groove is noncontiguous with the two grooves, and wherein the plurality of grooves comprise a central bending region; (ii) an optical waveguide; and (iii) a tapered portion connecting the forked grating structure and the multi-mode optical bus waveguide.

A device and system for coupling optical vortex multiplexed light into and out of a photonic integrated circuit. The multi-mode forked grating coupler device comprises: (i) a multi-mode forked grating structure configured to receive at least one optical vortex multiplexed light beam, wherein the multi-mode forked grating structure comprises at least one forked region positioned amidst a plurality of grooves, wherein the forked region comprises a single groove forking into two grooves, wherein the single groove is noncontiguous with the two grooves, and wherein the plurality of grooves comprise a central bending region; (ii) an optical waveguide; and (iii) a tapered portion connecting the forked grating structure and the multi-mode optical bus waveguide.

A method of making a grating in a waveguide includes forming a waveguide material over a substrate, the waveguide material having a thickness less than or equal to about 100 nanometers (nm). The method further includes forming a photoresist over the waveguide material and patterning the photoresist. The method further includes forming a first set of openings in the waveguide material through the patterned substrate and filling the first set of openings with a metal material.

A method of making a grating in a waveguide includes forming a waveguide material over a substrate, the waveguide material having a thickness less than or equal to about 100 nanometers (nm). The method further includes forming a photoresist over the waveguide material and patterning the photoresist. The method further includes forming a first set of openings in the waveguide material through the patterned substrate and filling the first set of openings with a metal material.

An external resonator type light emitting system includes a light source oscillating a semiconductor laser light by itself and a grating device providing an external resonator with the light source. The system performs oscillation in single mode. The light source includes an active layer oscillating the semiconductor laser light. The grating device includes an optical waveguide having an incident face to which the semiconductor laser is incident and an emitting face of emitting an emitting light of a desired wavelength, a Bragg grating formed in the optical waveguide, and a propagating portion provided between the incident face and the Bragg grating. Formulas (1) to (5) are satisfied.

An external resonator type light emitting system includes a light source oscillating a semiconductor laser light by itself and a grating device providing an external resonator with the light source. The system performs oscillation in single mode. The light source includes an active layer oscillating the semiconductor laser light. The grating device includes an optical waveguide having an incident face to which the semiconductor laser is incident and an emitting face of emitting an emitting light of a desired wavelength, a Bragg grating formed in the optical waveguide, and a propagating portion provided between the incident face and the Bragg grating. Formulas (1) to (5) are satisfied.

Arrays of integrated analytical devices and their methods for production are provided. The arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The integrated devices allow the highly sensitive discrimination of optical signals using features such as spectra, amplitude, and time resolution, or combinations thereof. The arrays and methods of the invention make use of silicon chip fabrication and manufacturing techniques developed for the electronics industry and highly suited for miniaturization and high throughput.