A photonic device and related method for forming a photonic device. In some embodiments, a method of fabricating a photonic device includes forming a layer stack over a substrate. In some cases, the layer stack includes a lower cladding layer, a core layer disposed over the lower cladding layer, and an upper cladding layer disposed over the core layer. In some examples, the method further includes patterning the layer stack to form a waveguide for the photonic device. In some cases, the waveguide includes the core layer, and the core layer includes a lateral surface having a convex profile.

Apparatuses, systems and methods for optical coupling, optical integration, electro-optical coupling, and electro-optical packaging are described herein. Optical couplers may comprise various optical elements (e.g., mirrors as described herein) to relax optical assembly requirements and improve producibility. Optical couplers may improve fiber-to-chip, fiber-to-fiber and chip-to-chip optical connection. Optical couplers and optical components may be used to improve integration of, connection of, and/or packaging of optical systems and/or components with electrical systems and/or components.

To couple light between an optical fiber and a grating coupler of a photonic integrated circuits, a mirror is provided to turn light to/from the optical fiber to allow the axis of the optical fiber to be oriented at small angles or parallel to the surface of the PIC, and lowered close to the surface of the PIC. The mirror is further configured to reshape light from a flat polished optical fiber to produce a mode field resembling the mode field of an angled polished optical fiber, to match the design angle of existing grating couplers that are designed to work with angled polished optical fibers. The mirror and optical fiber alignment structure in the optical connector are integrally/simultaneous formed by precision stamping.

To couple light between an optical fiber and a grating coupler of a photonic integrated circuits, a mirror is provided to turn light to/from the optical fiber to allow the axis of the optical fiber to be oriented at small angles or parallel to the surface of the PIC, and lowered close to the surface of the PIC. The mirror is further configured to reshape light from a flat polished optical fiber to produce a mode field resembling the mode field of an angled polished optical fiber, to match the design angle of existing grating couplers that are designed to work with angled polished optical fibers. The mirror and optical fiber alignment structure in the optical connector are integrally/simultaneous formed by precision stamping.

Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. The structure includes a waveguide core and a Bragg grating having a plurality of segments positioned with a spaced arrangement adjacent to the waveguide core. Each segment includes one or more exterior surfaces. The structure further includes a silicide layer located on the one or more exterior surfaces of each segment.

A three-dimensional photonic integrated structure includes a first semiconductor substrate and a second semiconductor substrate. The first substrate incorporates a first waveguide and the second semiconductor substrate incorporates a second waveguide. An intermediate region located between the two substrates is formed by a one dielectric layer. The second substrate further includes an optical coupler configured for receiving a light signal. The first substrate and dielectric layer form a reflective element located below and opposite the grating coupler in order to reflect at least one part of the light signal.

A three-dimensional photonic integrated structure includes a first semiconductor substrate and a second semiconductor substrate. The first substrate incorporates a first waveguide and the second semiconductor substrate incorporates a second waveguide. An intermediate region located between the two substrates is formed by a one dielectric layer. The second substrate further includes an optical coupler configured for receiving a light signal. The first substrate and dielectric layer form a reflective element located below and opposite the grating coupler in order to reflect at least one part of the light signal.

A form birefringent optical element includes a structured layer and a dielectric environment disposed over the structured layer. At least one of the structured layer and the dielectric environment includes a nanovoided polymer, the nanovoided polymer having a first refractive index in an unactuated state and a second refractive index different than the first refractive index in an actuated state. Actuation of the nanovoided polymer can be used to reversibly control the form birefringence of the optical element. Various other apparatuses, systems, materials, and methods are also disclosed.

A grating coupler couples a waveguide to a beam and is formed of patterned shapes in a first and second layer of planar material, the shapes embedded in background material, the layers separated by less than one wavelength. The shapes are organized as a plurality of adjacent unit cells arranged along a direction of propagation of light with each unit cell including a shape of the first material and a shape of the second material, each unit cell having design parameters including a period, a width wb of the shape of first planar material, a width wt of the shape of second planar material, and an offset between the shapes. The coupler has a directivity ratio D is at least 10 dB between “up” and “down” radiation; and unit cells differ in at least one parameter selected from period, wb, wt, and offset to provide a predetermined beam shape.

A grating coupler couples a waveguide to a beam and is formed of patterned shapes in a first and second layer of planar material, the shapes embedded in background material, the layers separated by less than one wavelength. The shapes are organized as a plurality of adjacent unit cells arranged along a direction of propagation of light with each unit cell including a shape of the first material and a shape of the second material, each unit cell having design parameters including a period, a width wb of the shape of first planar material, a width wt of the shape of second planar material, and an offset between the shapes. The coupler has a directivity ratio D is at least 10 dB between “up” and “down” radiation; and unit cells differ in at least one parameter selected from period, wb, wt, and offset to provide a predetermined beam shape.