Wavelength division multiplexing (WDM) has enabled telecommunication service providers to provide multiple independent multi-gigabit channels on one optical fiber. To Microoptoelectromechanical systems (MOEMS) integrating optical waveguides upon a MEMS can provide further integration opportunities and functionality options. Improvements to the design and implementation of MOEMS devices are presented where monolithically integrated optical waveguides are directly supported, moved and/or deformed upon a beam coupled to and manipulated by a MEMS. Accordingly, such MOEMS can provide programmable functionality by enabling alignment of the optical waveguide upon the MEMS to one of multiple optical waveguides disposed relative to the moving facet of the rotating optical waveguide.

An optical device includes a first substrate, a second substrate, a plurality of separation walls, one or more optical waveguides, and one or more spacers. The first substrate has a surface which extends in a first direction and a second direction intersecting the first direction. The second substrate faces the first substrate. The plurality of separation walls are positioned between the first substrate and the second substrate and extend in the first direction. The one or more optical waveguides are positioned between the first substrate and the second substrate and include one or more dielectric members which are positioned between the plurality of separation walls and which extend in the first direction. The one or more spacers are directly or indirectly sandwiched between the first substrate and the second substrate and positioned around the one or more optical waveguides.

A display device includes a scanned projector for projecting a beam of light, and a diffraction grating for dispersing the light at a plurality of angles into a waveguide, wherein at least a portion of the diffraction grating includes a nanovoided polymer. Manipulation of the nanovoid topology, such as through capacitive actuation, can be used to reversibly control the effective refractive index of the nanovoided polymer and hence the grating efficiency. The switchable grating can be used to control the amount of diffraction of an incident beam of light through the grating thereby decreasing optical loss. Various other methods, systems, apparatuses, and materials are also disclosed.

A LIDAR system includes a LIDAR chip configured to output a LIDAR output signal. The LIDAR chip includes a redirection component and alternate waveguides. The redirection component receives an outgoing LIDAR signal from any one of multiple alternate waveguides. The LIDAR output signal includes light from the outgoing LIDAR signal. A direction that the LIDAR output signal travels away from the LIDAR chip is a function of the alternate waveguide from which the redirection component receives the outgoing LIDAR signal.

In some examples, a device includes a nanovoided polymer element, a planarization layer disposed on a surface of the nanovoided polymer element, a first electrode disposed on the planarization layer, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. The planarization layer may be located between the nanovoided polymer element and the first electrode.

A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

An example system includes a grating coupled laser, a laser optical interposer (LOI), an optical isolator, and a light redirector. The grating coupled laser includes a laser cavity and a transmit grating optically coupled to the laser cavity. The transmit grating is configured to diffract light emitted by the laser cavity out of the grating coupled laser. The LOI includes an LOI waveguide with an input end and an output end. The optical isolator is positioned between the surface coupled edge emitting laser and the LOI. The light redirector is positioned to redirect the light, after the light passes through the optical isolator, into the LOI waveguide of the LOI.

An integrated optical component includes at least one input waveguide, at least one output waveguide; a first slab waveguide having a first refractive index, n1. The first slab waveguide may be disposed between at least one of the input waveguides and at least one of the output waveguides. The integrated optical component may further include a second slab waveguide having a second refractive index, n2. The integrated optical component may also include a third cladding slab having a third refractive index, n3. The third cladding slab may be disposed between the first slab and the second slab. The thickness of the second slab waveguide and the thickness of the third slab waveguide are adjustable to reduce a birefringence of the integrated optical component.

An integrated optical component includes at least one input waveguide, at least one output waveguide; a first slab waveguide having a first refractive index, n1. The first slab waveguide may be disposed between at least one of the input waveguides and at least one of the output waveguides. The integrated optical component may further include a second slab waveguide having a second refractive index, n2. The integrated optical component may also include a third cladding slab having a third refractive index, n3. The third cladding slab may be disposed between the first slab and the second slab. The thickness of the second slab waveguide and the thickness of the third slab waveguide are adjustable to reduce a birefringence of the integrated optical component.