A method of making a grating in a waveguide includes forming a waveguide material over a substrate, the waveguide material having a thickness less than or equal to about 100 nanometers (nm). The method further includes forming a photoresist over the waveguide material and patterning the photoresist. The method further includes forming a first set of openings in the waveguide material through the patterned substrate and filling the first set of openings with a metal material.

A phase shift element includes a substrate and a dielectric ridge waveguide (DRW) disposed on the substrate. The DRW includes a dielectric material, and a width of the DRW is less than 500 nanometers (nm). A meta-grating includes a substrate and multiple dielectric ridge wave-guides (DRWs) disposed on the substrate.

A phase shift element includes a substrate and a dielectric ridge waveguide (DRW) disposed on the substrate. The DRW includes a dielectric material, and a width of the DRW is less than 500 nanometers (nm). A meta-grating includes a substrate and multiple dielectric ridge wave-guides (DRWs) disposed on the substrate.

The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.

The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.

An optical device and a spectral detection apparatus are provided. The optical device includes an optical waveguide, including: a polychromatic light channel configured to transport a polychromatic light beam, and provided with a light incident surface for receiving the incident polychromatic light beam at an input end of the polychromatic light channel; a chromatic dispersion device arranged downstream from the polychromatic light channel in an optical path and configured to separate the polychromatic light beam from the polychromatic light channel into a plurality of monochromatic light beams; and a plurality of monochromatic light channels arranged downstream from the chromatic dispersion device in the optical path and configured to respectively conduct the plurality of monochromatic light beams with different colors from the chromatic dispersion device. Monochromatic light output surfaces are respectively provided at output ends of the plurality of monochromatic light channels and configured to output the monochromatic light beams.

An integrated optoelectronic or optical device is formed by a polarization-splitting grating coupler including two optical waveguides, a common optical coupler and flared optical transitions between the optical coupler and the optical waveguides. The optical coupler is configured for supporting input/output of optical waves. A first region of the optical coupler lies at a distance from the flared optical transitions. The first region includes a first recessed pattern. Second regions of the optical coupler lie between the first region and the flared optical transitions, respectively, in an adjoining relationship. The second regions include a second recessed pattern different from the first recessed pattern.

An optical device includes: a first multilayer reflective film mirror; a second multilayer reflective film mirror facing the first multilayer reflective film mirror; an optical waveguide layer that is located between the first and second multilayer reflective film mirrors and propagates light whose wavelength in a vacuum is ; and a first transparent electrode layer located at at least one position of a position between the first multilayer reflective film mirror and the optical waveguide layer, a position between the second multilayer reflective film mirror and the optical waveguide layer, a position between two adjacent layers included in the first multilayer reflective film mirror, and a position between two adjacent layers included in the second multilayer reflective film mirror. The transmittance of the first multilayer reflective film mirror for the light is higher than the transmittance of the second multilayer reflective film mirror for the light.

Coupled resonators having two resonances are described. A first resonance occurs at the frequency of a pump signal. A second resonance occurs at the frequency of a first Stokes signal. The stop band of the coupled resonators suppresses the second Stokes signal and thus all other higher order Stokes signals. The coupled resonators can be used to more efficiently generate a first Stokes signal having a narrow line width signal.

Optical spectroscopy is a widely used method to identify the chemical composition of materials and the characteristics of optical signals. Silicon based integrated photonics offers a platform for many optical functions through microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS), silicon waveguides, integrated CMOS electronics and hybrid integration of compound semiconductor elements for optical gain. Accordingly, it would be beneficial to provide advanced optical tools for techniques such as optical spectroscopy and optical tomography exploiting MOEMS to provide swept filters that offer improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, reconfigurability, and lower cost. Further, such MOEMS elements can support the provisioning of swept optical sources, swept filters, swept receivers etc. in the planar waveguide domain without free space optics.