A light splitting device includes an optical waveguide body and a dispersion grating. The optical waveguide body is configured to transmit incident light to the dispersion grating, the dispersion grating is configured to disperse the incident light transmitted by the optical waveguide body into a plurality of spectral lines, and the optical waveguide body is further configured to change propagation directions of the plurality of spectral lines and to emit the plurality of spectral lines.

The present disclosure provides for two-dimensional mode matching by receiving an optical signal traveling in a first direction; and scattering the optical signal according to a scattering strength that progressively changes in the first direction. In various embodiments, the scattering strength progressively changes by increasing or decreasing in the first direction. A plurality of scatterers disposed in a path of the optical signal change in widths that progressively increase or decrease along the first direction. In various embodiments, a second optical signal is received in the grating coupler from a second direction; and is scattered into a surface of a photonic chip via a grating coupler. In some embodiments, the second direction is perpendicular to the first direction.

The present disclosure provides for two-dimensional mode matching by receiving an optical signal traveling in a first direction; and scattering the optical signal according to a scattering strength that progressively changes in the first direction. In various embodiments, the scattering strength progressively changes by increasing or decreasing in the first direction. A plurality of scatterers disposed in a path of the optical signal change in widths that progressively increase or decrease along the first direction. In various embodiments, a second optical signal is received in the grating coupler from a second direction; and is scattered into a surface of a photonic chip via a grating coupler. In some embodiments, the second direction is perpendicular to the first direction.

The present disclosure provides a waveguide structure including an optical component. The optical component includes a plurality of grating coupler teeth over a semiconductive substrate and a plurality of grating coupler openings between adjacent grating coupler teeth, wherein the grating coupler openings are configured to receive a light wave. Each of the grating coupler teeth includes a dielectric stack and an etch stopper embedded in the dielectric stack, wherein the etch stopper has a resistance to a fluorine solution that is higher than that of the dielectric stack. A method of manufacturing a semiconductor device is also provided.

The present disclosure provides a waveguide structure including an optical component. The optical component includes a plurality of grating coupler teeth over a semiconductive substrate and a plurality of grating coupler openings between adjacent grating coupler teeth, wherein the grating coupler openings are configured to receive a light wave. Each of the grating coupler teeth includes a dielectric stack and an etch stopper embedded in the dielectric stack, wherein the etch stopper has a resistance to a fluorine solution that is higher than that of the dielectric stack. A method of manufacturing a semiconductor device is also provided.

A biosensing system includes a biosensor, a light source, first and second photodetectors, and a calculator. The light source is disposed to irradiate the biosensor, so as to generate two or more of a coupled light beam, a reflected light beam, a transmitted light beam and a diffracted light beam. The first photodetector is disposed to measure an intensity of one of the generated light beams that is indicative of an effect of an analyte on light to obtain a first intensity value. The second photodetector is disposed to measure an intensity of another one of the generated light beams that is indicative of an effect of the analyte on light to obtain a second intensity value. The calculator performs compensation calculation based at least on the first and second intensity values.

A biosensing system includes a biosensor, a light source, first and second photodetectors, and a calculator. The light source is disposed to irradiate the biosensor, so as to generate two or more of a coupled light beam, a reflected light beam, a transmitted light beam and a diffracted light beam. The first photodetector is disposed to measure an intensity of one of the generated light beams that is indicative of an effect of an analyte on light to obtain a first intensity value. The second photodetector is disposed to measure an intensity of another one of the generated light beams that is indicative of an effect of the analyte on light to obtain a second intensity value. The calculator performs compensation calculation based at least on the first and second intensity values.

Examples herein relate to multi-layer grating couplers. In particular, implementations herein relate to multi-layer grating couplers that include a first grating layer, an angle correction layer disposed over the first grating layer, and an oxide layer disposed between the first grating layer and the angle correction layer. The multi-layer grating coupler further includes a waveguide layer disposed at a same elevation as or below the first grating layer. The first grating layer is configured to convert a propagation direction of light from an in-plane direction through the waveguide layer to a near-vertical or non-in-plane direction into the angle correction layer. The angle correction layer is configured to tilt an output coupling angle of the light from the first grating layer such that the light exits the multi-layer grating coupler into an optical fiber at a same angle as the optical fiber.

Wavelength division multiplexing (WDM) has enabled telecommunication service providers to fully exploit the transmission capacity of optical fibers. State of the art systems in long-haul networks now have aggregated capacities of terabits per second. Moreover, by providing multiple independent multi-gigabit channels, WDM technologies offer service providers with a straight forward way to build networks and expand networks to support multiple clients with different requirements. In order to reduce costs, enhance network flexibility, reduce spares, and provide re-configurability many service providers have migrated away from fixed wavelength transmitters, receivers, and transceivers, to wavelength tunable transmitters, receivers, and transceivers as well as wavelength dependent add-drop multiplexer, space switches etc. However, to meet the competing demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost it is desirable to exploit/adopt monolithic optical circuit technologies, hybrid optoelectronic integration, and microelectromechanical systems (MEMS).

The application relates to radars, and provides a chip with a beamforming network based on a photonic crystal resonant cavity tree structure and a fabrication method thereof. The chip includes a beamforming network layer, including an incidence coupling grating, first to Nth photonic crystal resonant cavity combinations, first to (N+1)th optical waveguides and an emergence coupling grating which are successively connected; branches of each photonic crystal resonant cavity combination is an integral multiple of that of the previous photonic crystal resonant cavity combination, and two photonic crystal resonant cavity combinations are connected by an optical waveguide.