Actuators for rotating an optical-path-folding-element with two, first and second, degrees of freedom in an extended rotation range around two respective rotation axes, folded cameras including such actuators and dual-cameras including a folded camera as above together with an upright camera.

An optical mount including a first frame and a second frame; wherein the first frame includes a drive adjuster configured to move along a first direction and the drive adjuster is in contact with a ramp on a pusher piston, such that a movement of the drive adjuster causes the pusher piston to move along a second direction; wherein the pusher piston is configured to push kinematic contacts on the second frame resulting in a controlled movement of the second frame by the drive adjuster.

A measurement illumination optical unit guides illumination light into an object field of a projection exposure apparatus for EUV lithography. The illumination optical unit has a field facet mirror with a plurality of field facets and a pupil facet mirror with a plurality of pupil facets. The latter serve for overlaid imaging in the object field of field facet images of the field facets. A field facet imaging channel of the illumination light is guided via any one field facet and any one pupil facet. A field stop specifies a field boundary of an illumination field in the object plane. The illumination field has a greater extent along one field dimension than any one of the field facet images. At least some of the field facets include tilt actuators which help guide the illumination light into the illumination field via various field facets and one and the same pupil facet.

An optical arrangement for use in an optical imaging device includes an optical element unit and a detection device and/or an actuating device. The optical element unit includes at least one optical element. The detection device determines in a plurality of M degrees of freedom in each case a detection value which is representative of a relative position or orientation of an element reference of the optical element in relation to a primary reference of the detection device in the respective degree of freedom. The detection device includes a plurality of N detection units, each of which outputs a detection signal which is representative of a distance and/or a displacement of the detection unit in relation to a secondary reference assigned to the optical element and the respective detection unit.

A radial positioning device is disclosed. The radial positioning device can include a body. The body can include a circumferential surface having a spring location and at least one interface portion operable to interface with a mating component. The body can also have a recess with a depth that varies relative to the circumferential surface about the body. The radial positioning device can also include a spring disposed in the recess. The spring can have a radial dimension greater than the depth of the recess at the spring location. The spring can be operable to contact the mating component at the spring location and compress in the radial dimension to provide a spring force that biases the at least one interface portion and the mating component against one another.

A vehicular exterior rearview mirror assembly includes a mounting arm and a mirror head having a mirror reflective element. An electrically-operated actuator includes a first attachment element that attaches at an actuator-mounting bracket of the mounting arm and a second attachment element that attaches at the mirror head. The actuator is electrically operated to cause adjustment of the mirror head relative to the mounting arm about first and second pivot axes. A mounting post of the mounting arm passes through an opening of the mirror head, the opening providing clearance between the mirror head and the mounting arm to allow movement of the mirror head relative to the mounting arm during electrical operation of the actuator when the base mounting portion of the vehicular exterior rearview mirror assembly is mounted at the exterior portion of the side door of the equipped vehicle.

An actuator module of a vehicle head-up display according to one embodiment of the present invention includes a driving unit including a driving motor and a lead screw forming a driving axis of the driving motor, a driving transmission unit of which upward and downward movement is controlled only within a section preset by the driving unit, a link unit which is disposed between and connected to an aspheric mirror and the driving transmission unit and adjusts a rotational angle of the aspheric mirror according to the upward and downward movement of the driving transmission unit, a motor mount which is connected to one side of the driving unit and has a space in which an adjacent component and a plurality of cables are installable, and an elastic part which is disposed between and connected to the driving unit and the driving transmission unit and provides an elastic force.

A vehicle head-up display (HUD) device includes a case, a screen part disposed inside the case, an aspheric mirror disposed on one side of the screen part, a folding mirror part disposed above the other side of the screen part, a light-emitting display disposed below the other side of the screen part, and an actuator that changes a reflective surface of the folding mirror part by operating the folding mirror part, wherein light emitted by the light-emitting display is displayed externally due to the folding mirror part and the aspheric mirror, and when the reflective surface of the folding mirror part is changed by the actuator, an irradiation direction of external light incident on the light-emitting display due to the aspheric mirror and the folding mirror part is changed to externally of the light-emitting display.

Actuators for rotating an optical-path-folding-element with two, first and second, degrees of freedom in an extended rotation range around two respective rotation axes, folded cameras including such actuators and dual-cameras including a folded camera as above together with an upright camera.

A method for localizing an abnormality in a travel path of an optical component in or for a lithography apparatus includes: a) moving the optical component in at least one first degree of freedom; b) detecting a movement (R.sub.z) of the optical component and/or a force acting on the optical component in at least one second degree of freedom; and c) localizing the abnormality as a function of the movement detected in b) and/or the force detected in b).