A projection optical unit for microlithography includes a plurality of mirrors and has a numerical aperture having a value larger than 0.5. The plurality of mirrors includes at least three grazing incidence mirrors, which deflect a chief ray of a central object field point with an angle of incidence of greater than 45°. Different polarized light beams passing the projection optical unit are rotated in their polarization direction by different angles of rotation. The projection optical unit includes first and second groups of mirrors. The second group of mirrors includes the final two mirrors of the plurality of mirrors at the image side. A linear portion in the pupil dependence of the total geometrical polarization rotation of the projection optical unit is less than 20% of a linear portion in the pupil dependence of the geometrical polarization rotation of the second group of mirrors.

A Bi-spectral Korsch-type anastigmat telescope has an optical axis and a visible channel comprising a concave first mirror, a convex second mirror and a concave third mirror and a visible detector that is sensitive in a visible band, the mirrors being arranged so that the first mirror and the second mirror form, of an object at infinity, an intermediate image located between the second mirror and the third mirror, the third mirror forming, from this intermediate image, a final image in the visible focal plane of the telescope, wherein the visible detector is placed, an infrared channel comprising first and second mirrors in common with the visible channel, a third IR mirror, a fourth IR mirror, and an IR detector that is sensitive in an infrared band, the third and fourth IR mirrors being configured to form, from the intermediate image, a final image in an IR focal plane.

An optical sensor system includes a primary mirror configured to receive electromagnetic radiation from the objects, a secondary mirror configured to receive the electromagnetic radiation reflected from the primary mirror, and a tertiary mirror configured to receive the electromagnetic radiation reflected from the secondary mirror. The system further includes a dichroic beamsplitter configured to direct electromagnetic radiation from a first spectrum along a first axis and to direct electromagnetic radiation from a second spectrum along a second axis. The system further includes a first image plane configured to receive the electromagnetic radiation from the first spectrum along the first axis to form a first image of the objects and a second image plane configured to receive the electromagnetic radiation from the second spectrum along the second axis to form a second image of the objects.

An image display apparatus including a first light source, a spherical lens configured to receive light output from the first light source, an aspherical lens configured to receive light output from the spherical lens, a first free curved mirror configured to receive light output from the aspherical lens is incident, a second free curved mirror configured to receive light output from the first free curved mirror, a third free curved mirror configured to receive light output from the second free curved mirror, and an image display panel configured to receive light output from the third free curved mirror and configured to display image information, wherein a light path of the light output from the first free curved mirror, a light path of the light output from the second free curved mirror, and a light path of the light output from the third free curved mirror intersect each other.

A telescope system (100) comprises a steering minor (M5) arranged in a part of its optical path (L5-L6) between a first telescope stage (10) and a second telescope stage (20). The steering mirror (M5) is configured to controllably rotate over a rotation angle (θm) for controlling a view angle (θv) of the telescope system (100) from the entrance aperture (A1). The steering mirror (M5) is disposed at an intermediate pupil (Pi) of the telescope system (100), at which position an image of the aperture stop (As) is formed by one or more of the optical components (M7,M6) there between.

A telescope includes a primary mirror, a secondary mirror configured to move along a first axis, and a tertiary mirror configured to move along a second axis. The secondary and tertiary mirrors are configured to move along respective axes in a synchronized manner to focus a beam of electromagnetic radiation from the primary mirror. The telescope further may include an anamorphic deformable mirror configured to achieve wavefront control and correction of optical aberrations. The telescope further may include a first linear actuator configured to move the secondary mirror along the first axis and a second linear actuator configured to move the tertiary mirror along the second axis.

A freeform surface off-axial three-mirror imaging system comprising a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The secondary mirror comprises a first freeform surface and a second freeform surface. Each reflective surface of the primary mirror, the first freeform surface, the second freeform surface and the tertiary mirror is an xy polynomial freeform surface. The freeform surface off-axial three-mirror imaging system comprises a first effective focal length and a second effective focal length different from the first effective focal length.

An optical sensor system includes a primary mirror configured to receive electromagnetic radiation from the objects, a secondary mirror configured to receive the electromagnetic radiation reflected from the primary mirror, and a tertiary mirror configured to receive the electromagnetic radiation reflected from the secondary mirror. The system further includes a dichroic beamsplitter configured to direct electromagnetic radiation from a first spectrum along a first axis and to direct electromagnetic radiation from a second spectrum along a second axis. The system further includes a first image plane configured to receive the electromagnetic radiation from the first spectrum along the first axis to form a first image of the objects and a second image plane configured to receive the electromagnetic radiation from the second spectrum along the second axis to form a second image of the objects.

A telescope includes a primary mirror, a secondary mirror configured to move along a first axis, and a tertiary mirror configured to move along a second axis. The secondary and tertiary mirrors are configured to move along respective axes in a synchronized manner to focus a beam of electromagnetic radiation from the primary mirror. The telescope further may include an anamorphic deformable mirror configured to achieve wavefront control and correction of optical aberrations. The telescope further may include a first linear actuator configured to move the secondary mirror along the first axis and a second linear actuator configured to move the tertiary mirror along the second axis.

An inspection device according to the present disclosure includes a spheroidal mirror configured to reflect illumination light as convergent light, a plane mirror configured to reflect the illumination light incident as the convergent light and cause the reflected illumination light to be incident on an object of inspection as incident light, a projection optical system configured to focus reflected light of the incident light reflected by the object of inspection, and a detector configured to detect reflected light focused by the projection optical system, wherein an angle of incidence of an incident optical axis being an optical axis of the incident light on the object of inspection is greater than 6 [deg], an angle of reflection of a reflected optical axis being an optical axis of the reflected light on the object of inspection is greater than 6 [deg].