G02B17/0663

Telecentric reflective imager
10261296 · 2019-04-16 · ·

A reflective imager design that is telecentric in image space, or equivalently telecentric at an image plane, or equivalently having an exit pupil located substantially at infinity, while also having an external entrance pupil and a high throughput or fast optical speed is described.

Method for designing off-axial optical system with freeform surface

A method for designing off-axial optical system with freeform surfaces is provided. An initial system is established. A freeform surface of the off-axial optical system that needs to be solved is defined as a freeform surface. A number of feature rays are selected. A number of intersections of the feature rays with the freeform surface are calculated point by point based on a given object-image relationship and a vector form of Snell's law. A number of first feature data points are obtained from the intersections and surface fitted to obtain the freeform surface. All the freeform surfaces of the off-axial optical system that need to be solved are obtained by the method above to form a before-iteration off-axial optical system. The before-iteration off-axial optical system is used as the initial system for multiple iterations to obtain an after-iteration off-axial optical system.

Method for designing freeform surfaces off-axial imaging system with a real exit pupil

A method for designing freeform surface off-axial three-mirror imaging system with a real exit pupil is related. An initial system is established. A surface located before the real exit pupil is defined as surface M. A number of feature rays are selected. A number of ideal intersections of the feature rays with surface M are calculated. A number of intersections of the feature rays with each surface before surface M are calculated, and each surface before surface M is obtained by surface fitting. A number of intersections of the feature rays with surface M are calculated, and surface M is obtained by surface fitting. Surface M substitute for an initial surface, and repeating steps above, until the intersections of the feature rays with surface M are close to the ideal intersections, and the intersections of the feature rays with an image surface are close to the ideal image points.

Hybrid reflective/refractive head mounted display
12044857 · 2024-07-23 ·

A hybrid reflective/refractive HMD includes a structural frame, refractive optical lens elements, and optics housings coupled to the structural frame and positioned in front of a user's first and second eyes. Light-emitting visual sources and reflective optical surfaces are contained in the optics housings. Visual content is transmitted from light-emitting visual sources to the reflective optical surfaces. The visual content is reflected within the reflective optical surfaces at least four times without passing through a refractive optical lens element. The visual content is transmitted to the user's first eye or the user's second eye. Simultaneous with the transmission of the visual content to the user's first eye or the user's second eye, a real-world view of the outside surrounding environment is transmitted to the user's first eye or the user's second eye. The visual content is overlaid onto the real-world view of the outside surrounding environment.

REFLECTIVE TELESCOPE WITH WIDE FIELD OF VIEW
20190064497 · 2019-02-28 ·

Systems and methods for providing a wider FOV for a telescope system are disclosed. In one embodiment, a telescope includes a primary mirror having an orifice, where an optical path originates from an object positioned in front of the primary mirror and reflects off the primary mirror. A secondary mirror is disposed adjacent to the primary mirror, where the optical path reflects off the secondary mirror and passes through the orifice in the primary mirror. The telescope includes a set of extended field corrector optics disposed along the optical path, the extended field corrector optics positioned to reflect light incident from the secondary mirror, where the set of extended field corrector optics comprises two corrector mirrors. A tertiary mirror is disposed along the optical path and adjacent to the extended field corrector optics, the tertiary mirror positioned to reflect the light incident from the extended field corrector optics.

Imaging optical unit for EUV projection lithography
10191386 · 2019-01-29 · ·

An imaging optical unit for EUV projection lithography serves to image an object field into an image field. Mirrors guide imaging light from the object field to the image field. An aperture stop is tilted by at least 1 in relation to a normal plane which is perpendicular to an optical axis. The aperture stop has a circular stop contour. In mutually perpendicular planes, a deviation of a numerical aperture NA.sub.x measured in one plane from a numerical aperture NA.sub.y measured in the other plane is less than 0.003, averaged over the field points of the image field. What emerges is an imaging optical unit, in which homogenization of an image-side numerical aperture is ensured so that an unchanging high structure resolution in the image plane is made possible, independently of an orientation of a plane of incidence of the imaging light in the image field.

PROJECTION OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD, AND PROJECTION EXPOSURE APPARATUS COMPRISING SUCH A PROJECTION OPTICAL UNIT
20190025562 · 2019-01-24 ·

A projection optical unit images an object field in an image field. The projection optical unit includes a plurality of mirrors guides imaging light from the object field to the image field. At least two of the mirrors are arranged directly behind one another in the beam path of the imaging light for grazing incidence with an angle of incidence of the imaging light which is greater than 60?. This results in an imaging optical unit that can exhibit a well-corrected imageable field with, at the same time, a high imaging light throughput.

IMAGING OPTICAL SYSTEM
20190025710 · 2019-01-24 ·

An imaging optical system for a projection exposure system has at least one anamorphically imaging optical element. This allows a complete illumination of an image field in a first direction with a large object-side numerical aperture in this direction, without the extent of the reticle to be imaged having to be enlarged and without a reduction in the throughput of the projection exposure system occurring.

Reflective triplet foreoptics for multi-channel double-pass dispersive spectrometers
10185133 · 2019-01-22 · ·

A non-relayed reflective triplet and a double-pass imaging spectrometer including the reflective triplet configured as its objective. In one example the reflective triplet includes a primary mirror that receives and reflects electromagnetic radiation from a viewed scene and defines an optical axis of the optical system, a secondary mirror that receives and reflects the electromagnetic radiation reflected from the primary mirror, and a tertiary mirror that receives the electromagnetic radiation reflected from the secondary mirror and focuses the electromagnetic radiation onto an image plane to form an image of the viewed scene. The primary, secondary, and tertiary mirrors together are configured to form a virtual exit pupil for the optical system, the image plane being located between the tertiary mirror and the virtual exit pupil. The reflective triplet is on-axis in aperture and off-axis in field of view.

OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.