Provided are projectors, each including a light source configured to emit laser light, a substrate spaced apart from the light source by a distance, a pattern mask including a pattern on a first surface of the substrate, the first surface facing the light source, and a meta-lens including a plurality of first nanostructures on a second surface of the substrate, the second surface facing the first surface, the nanostructures having a shape dimension of a sub-wavelength that is less than a wavelength of light emitted from the light source.

An optical package includes a beam combiner that combines laser light from a laser unit into a single laser beam, a movable mirror apparatus, and a fixed folding mirror which reflects the single laser beam toward the movable mirror apparatus. Beam equalizer optics cause increase of a slow axis divergence rate of the single laser beam such that its slow axis divergence rate is equal to its fast axis divergence rate. The movable mirror apparatus directs the single laser beam through an exit window. The beam equalizer optics include at least one negative spherical lens shaped such that a slow axis divergence rate of incident light is increased but a fast axis divergence rate of incident light is unaltered.

An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.

A light source optical system includes: a first optical system configured to guide a first light beam having a first wavelength emitted from a light source to a wavelength conversion element; the wavelength conversion element configured to convert the first light beam into a second light beam having a second wavelength different from the first wavelength, and emit the second light beam; and a second optical system through which the second light beam emitted from the light conversion element passes. The second optical system includes a light guide element configured to guide a portion of the second light beam from one end surface of the light guide element to the other end surface of the light guide element to separate the portion of the second light beam from the second light beam.

A device comprising: an illumination device for emitting an illumination beam, the illumination device comprising: an emitter array comprising multiple light emitters; and a meta-structure or micro-prism array comprising multiple transmission areas, the meta-structure of micro-prisms being positioned to receive light emitted from the emitter array, in which light from the meta-structure of micro-prism forms the illumination beam, in which a first one of said multiple transmission areas is arranged to emit light in a different direction than a second one of said multiple transmission areas.

The invention relates to a device and a method for projecting a plurality of radiation points onto an object surface, comprising at least one radiation source for emitting electromagnetic radiation, comprising at least one beam path, via which the radiation emitted at least temporarily by the emitters is deflected in the direction of the object surface, and comprising a controller which, in order to change at least one property of the emitted radiation, controls the radiation source according to a light object to be generated on the object surface. The controller is designed in such a way that at least two of the plurality of emitters of the radiation source are each individually controlled in order to change at least one property of the emitted radiation according to the light object to be generated, and at least one optical element for shaping, directing and/or converting the electromagnetic radiation is arranged in the beam path.

A photonics package may include a substrate, a hanging connector, and a fast-axis collimator (“FAC”). The hanging connector is typically affixed to a side of the substrate other than the side through which a light output is emitted. The hanging connector may be L-shaped in cross-section, having a base section and an extended section projecting from the base section. The base section affixes to the substrate while the extended section affixes to the FAC, so that the FAC extends downward along the emitter surface of the substrate; a vertex of the FAC is coplanar with an emitter outputting the light output.

A light-emitting device includes: a substrate including a base and a side wall; a plurality of semiconductor laser elements arrayed in a first direction on an upper surface of the base; a sealing member fixed to the substrate, wherein the sealing member and the substrate define a sealed space in which the semiconductor laser element is located; and a lens array disposed above the sealing member, the lens array including a plurality of lens sections arrayed in the first direction. In the lens array, a maximum outer diameter of each lens sections is 1.25 times or more than an inter-vertex distance between adjacent ones of the lens sections in the first direction.

A laser module includes: a laser diode bar including a plurality of emitters configured to emit laser light from a front surface and leak light from a rear surface; a housing including a reflecting surface configured to surround a space together with the laser diode bar and reflect, toward the space, light leaked from the rear surface, in a scattering manner; and a detector configured to detect light reflected by the reflecting surface. A laser module includes: a laser diode bar including a plurality of emitters configured to emit laser light from a front surface and leak light from a rear surface; a condenser lens on which light leaked from rear surfaces of all of the plurality of emitters impinges; and a detector configured to detect light transmitted through the condenser lens.

In a plane perpendicular to the optical axis (10) of a lens (2), the direction in which the cylindrical surface has zero curvature is the direction of generatrix of the lens (2), and the direction in which the cylindrical surface has non-zero curvature and that is orthogonal to the direction of generatrix is the direction of curvature of the lens (2). A light source (1) is disposed at the focal position (21) in the direction of generatrix on the side of the incident surface (3) of the lens (2), and emits light toward the incident surface (3) of the lens (2), the light having a difference between the divergence angle in the direction of generatrix of the lens (2) and the divergence angle in the direction of curvature of the lens (2).