A micromirror comprising a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis. A first comb drive with a first portion fixed relative to the mirror and a second portion fixed relative to the mount, and the first comb drive are adapted to actuate the mirror about the first axis. A first support structure pivotally attached to the mount by a second pivoting structure that permits pivotal movement of the mount relative to the first support structure about a second axis, and the second axis is non-parallel to the first axis. A second comb drive with a first portion fixed relative to the mount and a second portion fixed relative to the first support structure, and the second comb drive is adapted to actuate the mount about the second axis.

In one example, an on-mirror adaptive optics system may include a substrate including a deformable surface, a controller and a plurality of pockets defined in a substrate. Each of the pockets may include a an electrooptical sensor and an actuator. The controller may be communicatively coupled to the electrooptical sensor and the actuator. The controller may be configured to generate control voltages based on signals received from the electrooptical sensor to deform a portion of the deformable surface proximate a corresponding pocket of the plurality of pockets.

Methods, apparatuses, and methods of manufacture are described that provide one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended which reduces moment of inertia during use.

A head-up display device and a transportation device are provided. The head-up display device includes a light source, a scanner configured to scan light emitted from the light source to form scanned light, an angle adjuster configured to change an exit angle of the scanned light, a display unit configured to form an image according to the scanned light from the angle adjuster, and a projection assembly configured to project the image formed on the display component to a selected area.

A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

An image capturing system includes a light source configured to emit light toward an object or scene that is to be imaged. The system also includes a time-of-flight image sensor configured to receive light signals based on reflected light from the object or scene. The system also includes a processor operatively coupled to the light source and the time-of-flight image sensor. The processor is configured to perform compressive sensing of the received light signals. The processor is also configured to generate an image of the object or scene based at least in part on the compressive sensing of the received light signals.

The disclosure provides a dispersion management method and apparatus based on non-periodic spectral phase jumps. Precise dispersion is provided by virtue of non-periodic spectral phase jumps, the dispersion can be tuned freely with engineering of the phase jump. A device based on non-periodic spectral phase jump also has a wide working bandwidth and could promote the development of ultrafast optics. The method includes: spatially separating a light pulse with different frequency components, and meanwhile, making the light pulse with the different frequency components propagate in parallel; enabling the light pulse with the different frequency components and propagating in parallel to be incident on a non-periodic phase jump device to obtain non-periodic spectral phase jumps, forming a phase grating effect to obtain two ±1-order diffracted pulses having opposite group delays, and introducing frequency dependent relative delay for the different spectral components in the two diffracted pulses.

A method for producing a MEMS device comprises fabricating a first semiconductor layer and selectively depositing a second semiconductor layer over the first semiconductor layer, wherein the second semiconductor layer comprises a first part composed of monocrystalline semiconductor material and a second part composed of polycrystalline semiconductor material. The method furthermore comprises structuring at least one of the semiconductor layers, wherein the monocrystalline semiconductor material of the first part and underlying material of the first semiconductor layer form a spring element of the MEMS device and the polycrystalline semiconductor material of the second part and underlying material of the first semiconductor layer form at least one part of a comb drive of the MEMS device.

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

A MEMS-mirror device (1) is provided that comprises a support (2), a mirror body (3) that is rotationally suspended with respect to the support along a rotation axis (4), and an actuator (7A, 7B) to induce a rotation in the mirror body around the rotation axis. The mirror body (3) has a mirror surface (311) that in a neutral state defines a reference plane (x, y) having a longitudinal axis (y) through a center of the mirror body parallel to the rotation axis (4) and a lateral axis (x) transverse to the longitudinal axis. The mirror body (3) has a central portion (31) and integral therewith a pair of extension portions (32A, 32B) that extend in mutually opposite directions along the longitudinal axis. Each of the extension portions (32A, 32B) is flexibly coupled at a lateral side (322A, 322B) to the support with a respective plurality (6A, 6B) of torsion beams (61) which in a neutral state of the mirror body extend in the reference plane (x, y). The torsion beams of a respective plurality of torsion beams have a respective first end (611) attached to the support and a respective second end (612) attached to the respective extension portion, wherein the respective first end and the respective second end have mutually different positions (y1, y2) in the direction of the longitudinal axis (y) and in the lateral direction (x) are at mutually opposite sides (x1, x2) of the rotation axis (4).