In one example, an apparatus comprises a semiconductor integrated circuit, the semiconductor integrated circuit including a microelectromechanical system (MEMS) device layer and a silicon substrate, the MEMS layer including at least one micro-mirror assembly, the at least one micro-mirror assembly including a micro-mirror and electrodes. The at least one micro-mirror assembly further includes a light reduction layer formed below a surface of the silicon substrate. A method of fabricating the semiconductor integrated circuit is also provided.

In one example, an apparatus comprises a semiconductor integrated circuit, the semiconductor integrated circuit including a microelectromechanical system (MEMS) device layer and a silicon substrate, the MEMS device layer including at least one micro-mirror assembly, the at least one micro-mirror assembly including a micro-mirror and electrodes. The at least one micro-mirror assembly further includes a light reduction layer on the silicon substrate. A method of fabricating the semiconductor integrated circuit is also provided.

In one example, an apparatus comprises a semiconductor integrated circuit, the semiconductor integrated circuit including a microelectromechanical system (MEMS) device layer, an oxide layer, and a silicon substrate, the oxide layer being sandwiched between the MEMS device layer and the silicon substrate, the MEMS device layer including at least one micro-mirror assembly, the at least one micro-mirror assembly including a micro-mirror and electrodes. The at least one micro-mirror assembly further includes a light reduction layer between at least a part of the MEMS device layer and the oxide layer. A method of fabricating the semiconductor integrated circuit is also provided.

A micro-electro-mechanical system (MEMS) device includes a mirror; at least one hinge; an electrostatic comb structure; and a control device. The control device causes, for a period of time, a voltage to be supplied to the electrostatic comb structure to cause the electrostatic comb structure to tilt the mirror about the at least one hinge in a particular direction. The control device causes, after the period of time and at an instant of time, the voltage to cease being supplied to the electrostatic comb structure. A tilt angle of the mirror, at the first instant of time, is less than a maximum tilt angle of the mirror in the particular direction. An angular momentum of the mirror, at the instant of time, is greater than zero kilogram meters squared per second in the particular direction.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a part of an optical path between the beam splitter unit 3 and the fixed mirror 16. The light transmitting portion 14 is a portion that corrects an optical path difference that occurs between an optical path between the beam splitter unit 3 and the movable mirror 22 and the optical path between the beam splitter unit 3 and the fixed mirror 16. The second surface 21b of the base 21 and the third surface 13a of the optical function member 13 are joined to each other.

An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

An electrostatic comb drive-based silicon-based MEMS optical switch and an N×N array. The optical switch is primarily constituted by two parts, namely two separated crossing waveguide mirrors and an electrostatic comb driver. The crossing waveguide mirrors are constituted by two crossing waveguides and four adiabatic tapered waveguides. The electrostatic comb driver comprises an electrostatic comb, an island spring structure, and a transmission rod. The electrostatic comb is a pair of comb teeth structures, a voltage is applied to fixed comb teeth therein, and the other parts remain grounded. Under the effect of an electrostatic force, movable comb teeth move towards the fixed comb teeth, a spring distends and pushes via the transmission rod the movable crossing waveguide mirror to move towards the fixed crossing waveguide mirror, and the separated crossing waveguide mirrors are recombined into a complete crossing waveguide.

Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

A display apparatus of the present disclosure includes: an image detection unit that determines whether an empty second subframe is present in input image data, in addition to a first subframe that displays an image; a correction image generation unit that generates correction image data for correcting the input image data; a control unit that performs control to display the correction image data generated by the correction image generation unit during the period of the second subframe, when the image detection unit detects that the second subframe is present in the input image data; and a display panel that includes a light modulation device provided for each pixel, and modulates irradiation light from a light source, on the basis of input image data including the correction image data.

A MEMS actuator includes: a drive circuit for applying a drive voltage having a time waveform, which periodically repeats rising and falling and includes a period to be a constant voltage after the rising and before the falling, between a fixed comb electrode and a movable comb electrode; and a timing detection circuit that generates a capacitance derivative signal indicating a derivative value of a capacitance between the fixed comb electrode and the movable comb electrode by converting a current signal, which is output from the fixed comb electrode or the movable comb electrode within the period due to a change in the capacitance, into a voltage signal and detects a timing when the capacitance derivative signal reaches a threshold value. The drive circuit controls a relationship between the timing detected by the timing detection circuit and a timing of the falling to be constant.