A laser stabilizing system configured to stabilize a laser beam emitted from a laser source includes a beam steering device, a first beam splitter, a first light detector, a second beam splitter, and a second light detector. The beam steering device is configured to steer a direction and a position of the laser beam in four or more degrees of freedom. The first beam splitter is configured to split the laser beam from the beam steering device into a first partial beam and a second partial beam. The first light detector is disposed on a transmission path of the first partial beam. The second beam splitter is configured to split the second partial beam into a third partial beam and a fourth partial beam. The second light detector is disposed on a transmission path of the third partial beam. A laser source module is also provided.

A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

A spatial light modulator (SLM) including a two-dimensional (2D) array of n rows of m pixels, and a stacked drive circuit including at least one, one-dimensional (1D) array of n*m drivers monolithically integrated on the same substrate and methods of fabricating and methods of using the same in materials processing applications are provided. Generally, each pixel includes at least one modulator, and is configured to modulate light incident thereon in response to drive signals received from the stacked drive circuit. The 1D array of the stacked drive circuit includes a single row of n*m drivers arranged adjacent to and laterally separated from the 2D array of pixels. Other embodiments are also described.

An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar spring which oscillatably supports the movable plate around a first axis; a displacement portion which is connected to the first torsion bar spring; a second torsion bar spring which oscillatably supports the displacement portion around a second axis intersecting with the first axis; a permanent magnet which is provided on the displacement portion to be inclined with respect to the first axis and the second axis; and a coil which is provided to be separated from the displacement portion and generates a magnetic field acting on the permanent magnet. The displacement portion includes a frame surrounding the movable plate, and a damper which has a smaller thickness than that of the frame and extends in a direction intersecting with a direction in which the second torsion bar spring extends from the frame.

An opto-electro-mechanical system for manipulating optical radiation comprising a rotationally or translationally movable element, wherein the element is itself an optical element or comprises an optical element. Furthermore the system comprises a stator for the movable element having a recess enabling a deflection range, a flexible connection between the stator and the movable element providing a corresponding kinematically defined mobility, and an actuator for deflecting the movable element, wherein the stator is connected as one piece to the movable element, and the one-piece connection consists of silicate glass- and the recess is arranged around the movable element in such a way that the movable element is deflectable in accordance with the kinematically defined mobility with elastic deformation of the connection by means of the actuator.

A moving apparatus includes a fixed unit including a first fixed plate and a second fixed plate that are arranged to face each other; a driving unit including a first member and a second member that operate in pairs; and a movable unit including a first part and a second part, the first part is arranged inside the fixed unit. The second part is arranged outside the fixed unit. A center of gravity of the movable unit is outside the fixed unit. The first member is arranged on one of the first fixed plate and the second fixed plate. The center of gravity of the movable unit is closer to the one of the first fixed plate and the second fixed plate than the other of the first fixed plate and the second fixed plate. The second member is arranged on the second part to face the first member.

The invention relates to a deformable mirror comprising a deformable membrane (2) having a reflecting face (3) and being mounted on a support provided with at least one actuator designed to deform said membrane (2), said actuator comprising at least one movable member (7) fixed to the membrane (2) via an adhesive joint (8) and having a main body (11) located away from the adhesive joint (8), said body being extended by an active part (12) that penetrates said adhesive joint (8) partly or completely in such a way that the adhesive spreads over the concealed face (4), parallel to the reflecting face (3), and adheres at least partly to the side wall (14) of said active part (12), this part (12) forming a tip (32) limiting the bonding footprint on said reflecting face (3). Deformable mirror for adaptive optics.

The present invention relates to an apparatus for driving and measuring a MEMS mirror system, the MEMS mirror system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, having a pulse generator and a measuring unit, each electrically connected to the coil. The pulse generator is preferably configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil. The measuring unit is preferably configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal. In a further aspect of the invention a method is provided for driving and measuring the MEMS mirror system.

An image generating unit includes a fixed unit including a first fixed plate and a second fixed plate; and a movable unit movably supported by the fixed unit. The movable unit includes a movable part movably supported between the first fixed plate and the second fixed plate; an image generating part provided on the movable part and configured to receive illumination light to generate an image; and a heat radiating part coupled to the movable part and configured to radiate heat generated in the image generating part, the second fixed plate being sandwiched between the heat radiating part and the movable part.

An image generating unit includes a fixed member on which one of a driving magnet and a coil is provided; a heat radiating part on which the other of the driving magnet and the coil is provided; and an image generating part, to which the heat radiating part is attached, configured to receive illumination light to generate an image.