A projection device according to the present disclosure includes a light emission display panel in which a plurality of pixels including a light emission element are arranged in a matrix shape, a scanning mirror configured to reflect, toward a scanned surface, imaging light emitted from the light emission display panel and performs two-dimensional scanning of the reflected imaging light on the scanned surface, and a projection optical system configured to guide the imaging light from the light emission display panel to the scanning mirror.

A disclosed reluctance actuator includes a magnetizable stator, at least one coil, and a yoke. The coil is configured to generate a magnetic field in the stator and the yoke is configured to partially close the magnetic flux of the stator. The yoke is further configured as a movable element that performs lifting/tilting movements. An actuator system including a non-magnetic housing and a reluctance actuator is also disclosed. In the actuator system, the reluctance actuator may be at least partially located in the non-magnetic housing. A method of performing lifting/tilting movements of the yoke of a reluctance actuator is also disclosed. The method includes controlling a current in the at least one coil of the reluctance actuator to thereby generate a magnetic field in the stator. The magnetic field generates a lifting/tilting movement of the yoke due to interaction between the magnetic field and the yoke.

An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. Each of the second connection portions includes a portion having a width larger than a width of a portion of the second movable part other than the first and second connection portions. An inner edge of each of the second connection portions, includes a depression recessed in a second axis direction, and an outer edge of each of the pair of second connection portions, includes a protrusion protruding in the second axis direction.

This document relates to an optical device that uses a mirror scanning system as part of a display engine, where images generated by the mirror scanning system can be propagated through a waveguide or other such optical assembly to a user's eye. The mirror scanning system can utilize a magnetic assembly, where the mirror of the scanning system can be held in place magnetically instead of using support structures such as torsion bars or beams. Actuators can then be actuated to control the tilt of the mirror by way of magnetic fields, providing a greater field of movement for the optical element and enabling a spherical scan area to be produced.

A micromirror array includes a substrate, a plurality of mirrors for reflecting incident radiation, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the respective mirror. The micromirror array further includes, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the respective post to displace the respective post relative to the substrate, thereby displacing the respective mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

A method for manufacturing a light scanning system includes a process of assembling a plurality of device structures, each of device structures including a mirror device and a magnet, a process of acquiring, for each of device structures, first data for correcting a change in a deflection angle of the mirror with respect to a change in a frequency of a current signal, and second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, a process of acquiring, for at least one of device structures, third data for correcting a change in a deflection angle of the mirror with respect to a change in an operating temperature, and a process of storing the first, second, and third data in the storage part.

A light scanning system includes a mirror device, a magnet, a temperature sensor, and an arithmetic part. The arithmetic part generates first and second current signals based on a first target deflection angle and a first target frequency, a second target deflection angle and a second target frequency, an operating temperature, first data for correcting a change in a deflection angle of a mirror with respect to a change in a frequency of a current signal input to each of first and second drive coils, second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, and third data for correcting a change in a deflection angle of the mirror with respect to a change in the operating temperature.

An optical element driving mechanism is provided, including a fixed part, a movable part and a driving assembly. The fixed part has a main axis, includes an outer frame and a base. The outer frame has a top surface and a sidewall. The top surface intersects the main axis. The sidewall extends from the edge of the top surface along the main axis. The base includes a base plate intersecting the main axis and securely connected to the outer frame. The movable part moves relative to the fixed part, and connects to an optical element having an optical axis. The driving assembly drives the movable part to move relative to the fixed part. The main axis is not parallel to the optical axis.

A scanning device includes a planar scanning mirror disposed within a frame and having a reflective upper surface. A pair of flexures have respective first ends connected to the frame and respective second ends connected to the mirror at opposing ends of a rotational axis of the mirror. A rotor including a permanent magnet is disposed on the lower surface of the mirror. A stator includes first and second cores disposed in proximity to the rotor on opposing first and second sides of the rotational axis and first and second coils of wire wound respectively on the cores. A drive circuit drives the first and second coils with respective electrical currents including a first component selected so as to control a transverse displacement of the mirror and a second component selected so as to control a rotation of the mirror about the rotational axis.

A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.