An optical filter device (1000) includes: a first mirror (101) transmitting portion of incident light; a second mirror (201) spaced apart from the first mirror (101), and transmitting portion of the incident light; actuators (300) driving the first mirror (101) to change a space between the first mirror (101) and the second mirror (201); and a detection electrode (400) detecting displacement of the first mirror (101). The detection electrode (400) includes: a movable comb electrode (410) including movable combs (414) and connected to the first mirror (101); and a stationary comb electrode (420) including stationary combs (424) facing the movable combs (414) in parallel with each other. The movable combs (414) are displaced in parallel with the stationary combs (424) when the movable comb electrode (410) is displaced together with the first mirror (101).

A MEMS device is obtained by forming a temporary biasing structure on a semiconductor body, and forming an actuation coil on the semiconductor body, the actuation coil having at least one first end turn, one second end turn and an intermediate turn arranged between the first and the second end turns and electrically coupled to the first end turn through the temporary biasing structure. In this way, the intermediate turn is biased at approximately the same potential as the first end turn during galvanic growth, and, at the end of growth, the actuation coil has an approximately uniform thickness. At the end of galvanic growth, portions of the temporary biasing structure are selectively removed to electrically separate the first end turn from the intermediate turn and from a dummy biasing region adjacent to the first end turn.

The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

An FPGA of a control device performs the following control in a case where laser light which is spatially modulated according to a Lissajous curve is scanned and an intensity of the laser light is time-modulated according to an image formed for each partial region divided from a scanning region of the laser light to form the image. The FPGA performs control of a region surrounded by a grid line passing through a plurality of intersections which are continuous in an X direction and a grid line passing through a plurality of intersections which are continuous in a Y direction that intersects the X direction among a plurality of intersections of the Lissajous curve to be the partial region.

A scanning device includes a base and a gimbal, mounted within the base so as to rotate relative to the base about a first axis. A first mirror, which has a first area, is mounted within the gimbal so as to rotate about a second axis, which is perpendicular to the first axis. A second mirror, which has a second area that is at least twice the first area, is also mounted within the gimbal so as to rotate about a third axis, which is parallel to the second axis, in synchronization with the first mirror.

An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

A light deflecting device which suppresses a vibration caused by swing of a light deflecting unit and transmitted to a fixed unit and prevents noise from being made on a housing to which the fixed unit is attached, including a light deflecting unit having paired beams on both sides of a movable unit having a light reflecting unit and a coil, and a fixed unit to which the light deflecting unit is swingably fixed through the beams and which includes a magnetic field forming unit, swings the movable unit with the beams as torsional rotation axes by an electromagnetic force generated by a driving current flowing to the coil and a magnetic field formed by the magnetic field forming unit, and a counter swing member in the fixed unit to be swung in a reverse phase to the light deflecting unit so it is opposed to the light deflecting unit.

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of each of the pair of the first connection portions includes a first linear portion that extends along a second axis direction. An outer edge of each of the pair of the second connection portions includes a second linear portion that extends along a first axis direction.

An MEMS chip includes a substrate, a movable assembly, a fastening assembly, and a drive assembly. The fastening assembly is located between the substrate and the movable assembly. The movable assembly includes a fastening portion, a movable portion, and a first support beam. The first support beam is connected to the movable portion and the fastening portion. A first avoidance slot is disposed on a face that is of the movable portion and that faces the fastening assembly. The fastening assembly is grounded. A boss and a first position limiting pole are disposed on a face that is of the fastening assembly and that faces the movable assembly. The boss is connected to the fastening portion and configured to support the fastening portion. The first position limiting pole corresponds to the first avoidance slot. The drive assembly is connected to the movable portion to drive the movable portion to move.