Systems, methods, and apparatuses for providing on-board electromagnetic radiation sensing using beam splitting in a radiation sensing apparatus. The radiation sensing apparatuses can include a micro-mirror chip including a plurality of light reflecting surfaces. The apparatuses can also include an image sensor including an imaging surface. The apparatuses can also include a beamsplitter unit located between the micro-mirror chip and the image sensor. The beamsplitter unit can include a beamsplitter that includes a partially-reflective surface that is oblique to the imaging surface and the micro-mirror chip. The apparatuses can also include an enclosure configured to enclose at least the beamsplitter and a light source. With the apparatuses, the light source can be attached to a printed circuit board (PCB). Also, the enclosure can include an inner surface that has an angled reflective surface that is configured to reflect light from the light source in a direction towards the beamsplitter.

An optical module includes a support, a movable part supported by the support so as to be swingable about an axis, a mirror provided to the movable part, a drive coil provided to the movable part, a temperature monitoring element provided to the support, and a magnet that generates a magnetic field acting on the drive coil. The support is thermally connected to the magnet.

An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.

An optical element driving mechanism is provided, including a fixed part, a movable part and a driving assembly. The fixed part has a main axis, includes an outer frame and a base. The outer frame has a top surface and a sidewall. The top surface intersects the main axis. The sidewall extends from the edge of the top surface along the main axis. The base includes a base plate intersecting the main axis and securely connected to the outer frame. The movable part moves relative to the fixed part, and connects to an optical element having an optical axis. The driving assembly drives the movable part to move relative to the fixed part. The main axis is not parallel to the optical axis.

A light path shifting device is provided with a glass plate which incident light enters, a first frame for holding the glass plate, a second frame for supporting the first frame in the state of being swingable around a first oscillation axis, a base member for supporting the second frame in the state of being swingable around a second oscillation axis crossing the first oscillation axis, a first actuator for oscillating the first frame, and a second actuator for oscillating the second frame, and is capable of shifting the light path of the incident light in a first direction and a second direction crossing the first direction by oscillating the first frame and the second frame to thereby change an incident angle of the incident light to the glass plate.

A method of Lissajous scanning includes transmitting a plurality of light pulses at a plurality of time moments based on a trigger signal; driving about a first rotation axis at a first driving frequency (f1) according to a first driving signal and driving about a second rotation axis at a second driving frequency (f2) according to second driving signal; controlling the first and second driving signals to generate a Lissajous scanning pattern according to a predefined frame rate (FR); selecting the first and second driving frequencies such that the frame rate is a greatest common divisor thereof and such that they satisfy the following equation: f2−f1=(2*N+1)*FR; determining the plurality of time moments; and generating the trigger signal based on the determined plurality of time moments, wherein the plurality of time moments (t.sub.i) are determined according to the following equation: $t_i=\frac{2i+1}{8*\mathrm{FR}*F_1{F}_2},\mathrm{where}\text{:}{F}_1=\frac{f_1}{\mathrm{FR}},F_2=\frac{f_2}{\mathrm{FR}},i=0,1,2.Math.\left(4F_1{F}_2-1\right).$

A MEMS mirror device includes a frame body (an outer movable frame body), an inner movable member, a first beam, a reflective mirror member, and a coupling member. The inner movable member is disposed inside the frame body. The first beam couples the inner movable member rotatably to the frame body. The reflective mirror member has a reflective surface and a rear surface. The coupling member couples the reflective mirror member and the inner movable member. The first beam is coupled to the inner movable member at the rear surface of the reflective mirror member. The MEMS mirror device may be reduced in size.

A highly reliable micromachine, display element, or the like is provided. As a micromachine or a transistor including the micromachine, a transistor including an oxide semiconductor in a semiconductor layer where a channel is formed is used. For example, a transistor including an oxide semiconductor is used as at least one transistor in one or a plurality of transistors driving a micromachine.

According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (Θ); providing the actuating means with a drive signal which has an amplitude which is equal to the determined drive signal amplitude.

Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post.