A microelectromechanical systems (MEMS) scanner having actuator pairs adjacent to sides of a scanning mirror. Actuator pairs include individual actuators that are physically located adjacent to opposite sides of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror. Torsional beam flexures suspend the scanning mirror from a frame structure and facilitate rotation of the scanning mirror about a rotational axis. During operation of the MEMS scanner, a drive signal may be applied to the actuator pair to cause each individual actuator, of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures are connected to the tips of the actuators via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure—thereby causing rotation of the scanning mirror about the rotational axis.

Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.

A light control system includes an optical reflector element and a control device. The optical reflector element includes a reflector, and a first oscillator and a second oscillator that are disposed with the reflector being interposed therebetween. When the control device is to oscillate a first oscillator and a second oscillator to cause the first and second oscillators to rotate in the same direction around a first axis, the control device: oscillates a first driver and a second driver of the first oscillator to cause each of the first and second drivers to have a first portion and a second portion that oscillate in opposite directions in the thickness direction; and oscillates a first driver and a second driver of the second oscillator to cause each of the first and second drivers to have a third portion and a fourth portion that oscillate in opposite directions in the thickness direction.

An actuator device, a projection device including the actuator device, and a projection method applicable to the actuator device, are provided. The actuator device includes a base, a frame, an optical element, and at least one driving assembly. The projection method includes the following steps. The frame is disposed in the base, the optical element is disposed in the frame, and the at least one driving assembly is disposed between the base and the frame. The at least one driving assembly is controlled to drive the frame through a first signal, so that the optical element swings reciprocally relative to the base based on a first swing angle, a second swing angle, and a third swing angle of a first actuating shaft.

An electromagnetic radiation system for directing an electromagnetic radiation beam (11) at a target (28) having a first arrangement (12) in which the radiation beam (11) is directed along a marking beam path that is within a marking range of the electromagnetic radiation system and a second arrangement (12, 15) in which the radiation beam (27) is directed along a different beam path (27) that is not within the marking range of the electromagnetic radiation system, wherein a positional relationship between the marking beam path (11) and the different beam path (27) satisfies a predetermined condition at the target (28) when the electromagnetic radiation system is at a predetermined distance (29) from the target (28).

A driving controller derives a first shift time that is a shift time used for correcting a generation timing of a first reference signal representing that an angle of a mirror portion around a first axis is equal to a first reference angle, and is a shift time of a point in time when the angle of the mirror portion around the first axis is equal to the first reference angle with respect to a point in time when an output signal of a first angle detection sensor represents that the angle of the mirror portion around the first axis is equal to the first reference angle, based on an output signal of a photodetector.

Techniques are described herein for dynamically adjusting a resonant frequency of a resonance circuit to optimize power transfer to a mirror device such as a MEMS mirror. A variable capacitance circuit can be operated responsive to a bias control signal. A capacitance control circuit can vary the bias control signal to the resonance circuit responsive to a sense signal. The sense circuit is configured to generate the sense signal responsive to an output of the mirror device. By monitoring a signal level from the output of the mirror device 130, and adjusting the bias control signal of the resonance circuit, the exact resonance frequency of the resonance circuit can be adjusted until a peak signal level is observed, thus improving the efficiency of the energy transferred from the driver circuit 110 to the mirror device 130, and counteracting the impact of parasitic capacitances on the resonance.

A light deflector includes: a conductor layer formed as an integral layer on an SOI oxide film layer; a piezoelectric element having an upper electrode, a piezoelectric film, and a conductor layer serving as a lower electrode; an interlayer insulating film covering the conductor layer and the piezoelectric element from the surface side; a plurality of wirings formed on the surface of the interlayer insulating film in such a manner as to extend in the region of the surface of the interlayer insulating film under which the conductor layer exists; and a ground electrode connected to the conductor layer.

A movable device includes: a mechanism configured to drive a movable portion, the mechanism including: a gear including a first protrusion; and a cam in contact with the movable portion; and a driver to drive the mechanism, the driver including: a second protrusion to engage with the first protrusion; and an actuator to cause the second protrusion to reciprocate in response to application of voltage or electric current, to rotate the gear in a predetermined direction, to rotate the cam with the rotation of the gear to drive the movable portion. The first protrusion has a shape in which a downstream portion in the predetermined direction is lower in a direction perpendicular to the predetermined direction than an upstream portion. The second protrusion has a shape in which a downstream portion in the predetermined direction is higher in the direction perpendicular to the predetermined direction than an upstream portion.