An opto-electro-mechanical system for manipulating optical radiation comprising a rotationally or translationally movable element, wherein the element is itself an optical element or comprises an optical element. Furthermore the system comprises a stator for the movable element having a recess enabling a deflection range, a flexible connection between the stator and the movable element providing a corresponding kinematically defined mobility, and an actuator for deflecting the movable element, wherein the stator is connected as one piece to the movable element, and the one-piece connection consists of silicate glass- and the recess is arranged around the movable element in such a way that the movable element is deflectable in accordance with the kinematically defined mobility with elastic deformation of the connection by means of the actuator.

An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

An apparatus having an optical structure and ridges is described, wherein the ridges connect the optical structure to a supporting structure and wherein the optical structure is able to perform a movement in relation to a reference plane.

An apparatus having an optical structure and ridges is described, wherein adhesive is arranged between the ridges and the optical structure, wherein the adhesive is effective to effect, after its annealing, a predetermined orientation of the optical structure in relation to a reference plane.

A radiation imaging apparatus includes an imaging surface; a light source; and an array of micro mirrors that rotate via radiation absorbed in the micro mirrors and reflect light from the light source to generate a distribution of reflected light on the imaging surface. The array first micro mirrors and second micro mirrors. The first micro mirrors have a first structure and the second micro mirrors have a second structure different than the first structure. The second structure is configured to correct for one or more environmental influences on the radiation imaging apparatus. A photodetector captures an image of the distribution of reflected light on the imaging surface. A processor is coupled to the photodetector. A communication interface is coupled with the processor; and a computing device is located separately from the radiation imaging apparatus and in communication with the communication interface.

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

An apparatus having an optical structure and ridges is described, wherein adhesive is arranged between the ridges and the optical structure, wherein the adhesive is effective to effect, after its annealing, a predetermined orientation of the optical structure in relation to a reference plane.

An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom contacting surface and a second insulating layer contacting the cantilevered metallic layer on a portion of a top contacting surface. The second, cantilevered portion of the metallic layer is prestressed causing the distal end to deform away from the substrate. Applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate.

An image generating unit includes an image generating part configured to generate an image from illumination light; a driving magnet configured to generate a magnetic field; a driving coil arranged in the magnetic field of the driving magnet; a heat radiating part coupled to the image generating part and configured to radiate heat of the image generating part. The driving magnet and the driving coil move the image generating part and the heat radiating part. The driving coil is placed at the heat radiating part via a substance, thermal conductivity of the substance being lower than thermal conductivity of the heat radiating part.

The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a light source and a MEMS-based scanning element for steering at least a portion of the light provided by the light source in at least one dimension as an output light signal, as well as one or more optical elements for collimating and/or redirecting light within a sealed chamber defined by the elements of a housing. In some embodiments, the one or more optical elements include a reflective lens that collimates the light provided by the light source while simultaneously correcting phase-front error imparted by the scanning element while steering the output beam.