Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

A light detection and ranging (LiDAR) system is provided. The present embodiment provides a LiDAR system in which side angles of a rotating polygon mirror having multiple facets are diversified to change an angle of a laser beam refracted from a side facet, thereby sensing a plurality of vertical lines at the same time. The present embodiment provides a LiDAR system which allows an object to be sensed with a circular pattern, a circular matrix pattern, or a line matrix pattern by diversifying a pattern of a laser beam oscillated due to the rotation of a rotating polygon mirror having multiple facets and a wedge prism.

An optical scanning device and an imaging apparatus are provided. The optical scanning device includes a light source for emitting a light beam, a first optical unit for collimating the light beam emitted by the light source in a main scanning direction and focus the light beam in an auxiliary scanning direction, an optical deflector for deflecting the light beam, and an imaging optical system for guiding the light beam to a scanned surface for imaging. When the optical deflector deflects the light beam at a maximum deflection angle, the light beam in the main scanning direction forms a maximum incident angle Φ.sub.max with a normal line of the scanned surface. A spot tilt rate e/a of a light spot on the scanned surface satisfies

[00001]$\frac{e}{a}\le 10\%,$

where a is a size of the light spot in the main scanning direction and e is a spot tilt.

An optical scanning device includes light sources, a deflector, an optical element, and light blockers. The light blockers are spaced apart in a rotation direction of the deflector. An inequality θ1<θ2 is satisfied, where when viewed from the rotation axis direction, θ1 is an angle formed by a line segment connecting the end portion of a light blocker disposed most downstream in the rotation direction to a rotation axis center of the deflector and a line segment connecting the end portion of a light blocker disposed most upstream in the rotation direction to the rotation axis center, and θ2 is an angle formed by a line segment connecting an upstream end portion of one mirror surface in the rotation direction to the rotation axis center and a line segment connecting a downstream end portion of the one mirror surface in the rotation direction to the rotation axis center.

An apparatus including: a deflector deflecting a light flux from a light source to scan a surface in a main scanning direction; and an imaging optical system including first and second optical elements, and guiding the light flux deflected by the deflector to the surface. When sagittal shapes of an incident surface and an exit surface of each of the first and second optical elements are represented by the following equations:

[00001]$x=\frac{z^2/r^{\prime }}{1+{\left(1-{\left(z/r^{\prime }\right)}^2\right)}^{1/2}}+\underset{n=1}{\overset{8}{.Math.}}\underset{m=0}{\overset{16}{.Math.}}{M}_{\mathrm{mn}}{y}^m{z}^n$$r^{\prime }=r\left(1+\underset{i=1}{\overset{16}{.Math.}}{E}_i{y}^i\right)$

in at least one of incident surface or exit surface of first optical element and each of incident surface and exit surface of second optical element, at least one of values of M.sub.m n is not equal to 0 provided that m is not equal to 0, and incident surface and exit surface of second optical element have M.sub.01 of the same sign.

The light guide device includes a first light guide part, a polygon mirror, a second light guide part, and an adjustment part. The first light guide part reflects and guides the laser light emitted from the laser generator. The polygon mirror has a reflective part (33), and the reflective part (33) reflects the laser light guided by the first light guide part while the reflective part (33) rotates. The second light guide part reflects the laser light reflected at the reflective part (33) of the polygon mirror and directs the light so that the laser light is illuminated to the workpiece at each reflective part (33), respectively. The adjustment part adjusts the position of the light incident on the polygon mirror in the rotation axis direction of the optical axis, thereby changing the positions of light incident on the irradiation target in the line width direction. The irradiation target is irradiated with the light while the position of the light in a line width direction.

The light guide device includes a first light guide part, a polygon mirror, and a second light guide part. The first light guide part reflects and guides the laser light emitted from the laser generator. The polygon mirror is configured to be rotatable and includes a plurality of reflective parts (33), the reflective parts (33) being arranged to form a regular polygonal reflective surface when viewed in a rotation axis direction, the polygon mirror reflecting the laser light guided by the first light guide part by the reflective part while rotating. The second light guide part reflects the laser light reflected at the reflective part (33) of the polygon mirror and guides the laser light so that the laser light is irradiated to the workpiece at each of the reflective parts (33). The reflective part (33) of the polygon mirror is configured to reflect the incident laser light so that the optical axis of the incident light offset in the rotation axis direction. At least two reflective parts (33) differ from each other in position in the rotation axis direction.

A rotating reflector is a resin rotating reflector including: a rotating part; and a blade provided around the rotating part and functioning as a reflecting surface, wherein the rotating part has a hole in which a rotary shaft is inserted.

A light detection and ranging (LiDAR) system is provided. The present embodiment provides a LiDAR system in which side angles of a rotating polygon mirror having multiple facets are diversified to change an angle of a laser beam refracted from a side facet, thereby sensing a plurality of vertical lines at the same time. The present embodiment provides a LiDAR system which allows an object to be sensed with a circular pattern, a circular matrix pattern, or a line matrix pattern by diversifying a pattern of a laser beam oscillated due to the rotation of a rotating polygon mirror having multiple facets and a wedge prism.

In an optical scanning apparatus, a first positioning portion has two seating surfaces that hold a mirror and a second positioning portion has only one seating surface that holds the mirror. A force of pressure of a first urging member is greater than a force of pressure of a second urging member, thereby preventing a vibration of the mirror.