A blade driving device includes an opening forming member forming an opening portion, a pivotal member pivoting about the opening portion, blades configured to enter or exit from the opening portion upon receiving power transmitted from the pivotal member, a cover member arranged so that the pivotal member and the plurality of blades are located between the cover and the opening forming member, and engaging portions engaging the of blades with the opening forming member. The pivotal member comes into slidable contact with the engaging portions in a process of pivoting. A pivotal position of the pivotal member with respect to the opening forming member is defined by the engaging portions.

A blade driving device includes an opening forming member forming an opening portion, a pivotal member pivoting about the opening portion, blades configured to enter or exit from the opening portion upon receiving power transmitted from the pivotal member, a cover member arranged so that the pivotal member and the plurality of blades are located between the cover and the opening forming member, and engaging portions engaging the of blades with the opening forming member. The pivotal member comes into slidable contact with the engaging portions in a process of pivoting. A pivotal position of the pivotal member with respect to the opening forming member is defined by the engaging portions.

A shutter assembly comprises a base coupled to a photosensor assembly, a flexure device supported by the base, and a shutter arm rotatably coupled to the base via the flexure device. An actuation mechanism is coupled to the shutter arm via the flexure device, and is operable, upon application of an electric field, to rotate the shutter arm from a first position to a second position (or to a third position) to manage light relative to a photosensitive device of the photosensor assembly. Upon rotation of the shutter arm to the second position, the flexure device stores energy such that, upon removal of the electric field, the flexure device releases the stored energy to return the shutter arm to the first position. A keeper magnet can be provided to maintain the shutter arm in the second (actuated) position, so that the electric field can be removed while the keeper magnet maintains a magnetic force to keep the shutter arm in the second position.

A shutter assembly comprises a base coupled to a photosensor assembly, a flexure device supported by the base, and a shutter arm rotatably coupled to the base via the flexure device. An actuation mechanism is coupled to the shutter arm via the flexure device, and is operable, upon application of an electric field, to rotate the shutter arm from a first position to a second position (or to a third position) to manage light relative to a photosensitive device of the photosensor assembly. Upon rotation of the shutter arm to the second position, the flexure device stores energy such that, upon removal of the electric field, the flexure device releases the stored energy to return the shutter arm to the first position. A keeper magnet can be provided to maintain the shutter arm in the second (actuated) position, so that the electric field can be removed while the keeper magnet maintains a magnetic force to keep the shutter arm in the second position.

Miniaturization by simplification of a structure is achieved while suppressing a bound of an opening/closing blade and securing improvement of functionality. A blade opening/closing apparatus includes: a base body that includes an aperture; a driving body that is movably supported by the base body and is operated by a driving force of a drive source; an opening/closing blade that is moved by an operation of the driving body and opens/closes the aperture; and a braking body that controls a movement speed of the opening/closing blade via the driving body, the driving body including, on one surface thereof, an engagement portion that is to be engaged with the opening/closing blade and transmits the driving force to the opening/closing blade, the driving body including, on another surface thereof, a braked portion to which a braking force of the braking body is to be applied.

Miniaturization by simplification of a structure is achieved while suppressing a bound of an opening/closing blade and securing improvement of functionality. A blade opening/closing apparatus includes: a base body that includes an aperture; a driving body that is movably supported by the base body and is operated by a driving force of a drive source; an opening/closing blade that is moved by an operation of the driving body and opens/closes the aperture; and a braking body that controls a movement speed of the opening/closing blade via the driving body, the driving body including, on one surface thereof, an engagement portion that is to be engaged with the opening/closing blade and transmits the driving force to the opening/closing blade, the driving body including, on another surface thereof, a braked portion to which a braking force of the braking body is to be applied.

Disclosed herein are a shutter device, a method of controlling the shutter device, a photolithography machine and a method of controlling an exposure dose thereof. The shutter device includes a light blocking unit and a voice coil motor. The voice coil motor includes a permanent magnet module, a guide track assembly and a coil assembly. The coil assembly is arranged on the guide track assembly, and the permanent magnet module is adapted to produce a magnetic field in the guide track assembly. The light blocking unit includes two shutter blades both connecting to the coil assembly. When energized, the coil assembly will produce a magnetic field having a direction same as or opposite to the direction of the magnetic field in the guide track assembly so that the coil assembly moves forward or backward along the guide track assembly to drive the two shutter blades to open or close.

Disclosed herein are a shutter device, a method of controlling the shutter device, a photolithography machine and a method of controlling an exposure dose thereof. The shutter device includes a light blocking unit and a voice coil motor. The voice coil motor includes a permanent magnet module, a guide track assembly and a coil assembly. The coil assembly is arranged on the guide track assembly, and the permanent magnet module is adapted to produce a magnetic field in the guide track assembly. The light blocking unit includes two shutter blades both connecting to the coil assembly. When energized, the coil assembly will produce a magnetic field having a direction same as or opposite to the direction of the magnetic field in the guide track assembly so that the coil assembly moves forward or backward along the guide track assembly to drive the two shutter blades to open or close.

A variable aperture module includes a blade assembly including movable blades, a positioning element including positioning structures and a driving part including a rotation element. The movable blades are disposed around an optical axis to form a light passable hole with adjustable size for different hole size states and each have an inner surface to define the contour of the light passable hole in each hole size state. The positioning structures correspond to the movable blades. The rotation element is rotatable with respect to the positioning element and is configured to rotate the movable blades to adjust a size of the light passable hole. There are matte structures disposed on each inner surface. Each matte structure is single structure extending towards the optical axis, such that at least part of the contour of the light passable hole has an undulating shape at least in several hole size states.

A variable aperture module includes a blade assembly including movable blades, a positioning element including positioning structures and a driving part including a rotation element. The movable blades are disposed around an optical axis to form a light passable hole with adjustable size for different hole size states and each have an inner surface to define the contour of the light passable hole in each hole size state. The positioning structures correspond to the movable blades. The rotation element is rotatable with respect to the positioning element and is configured to rotate the movable blades to adjust a size of the light passable hole. There are matte structures disposed on each inner surface. Each matte structure is single structure extending towards the optical axis, such that at least part of the contour of the light passable hole has an undulating shape at least in several hole size states.