A laser machining apparatus includes: a laser beam emission device; a visible laser beam emission device; a scanner; and a controller. The controller is configured to perform: generating machining data including coordinate data representing a machining pattern to be machined on a workpiece; machining the workpiece with a laser beam according to the machining data by controlling the laser beam emission device and the scanner; generating, in response to receiving a resuming command after the machining has been halted at a stopping position, a guide pattern based on a stopping point coordinate and the machining data, the guide pattern being used for resuming the machining from the stopping position, the stopping point coordinate indicating the stopping position and being determined by the coordinate data; and projecting the guide pattern onto the workpiece with a visible laser beam by controlling the visible laser beam emission device and the scanner.

A laser machining apparatus includes: a laser beam emission device; a visible laser beam emission device; a scanner; and a controller. The controller is configured to perform: generating machining data including coordinate data representing a machining pattern to be machined on a workpiece; machining the workpiece with a laser beam according to the machining data by controlling the laser beam emission device and the scanner; generating, in response to receiving a resuming command after the machining has been halted at a stopping position, a guide pattern based on a stopping point coordinate and the machining data, the guide pattern being used for resuming the machining from the stopping position, the stopping point coordinate indicating the stopping position and being determined by the coordinate data; and projecting the guide pattern onto the workpiece with a visible laser beam by controlling the visible laser beam emission device and the scanner.

A disclosed motor control device includes: a PI controller which controls a velocity of a motor; an input unit which receives specification information including information of a weight and a center of mass of a tool; a calculation unit which calculates a gravitational torque based on the specification information; a storage which stores the gravitational torque output from the calculation unit and an integral value output from the PI controller, and outputs the gravitational torque and the integral value in response to a break signal; and a selection unit which sets, to the PI controller, the integral value output from the storage, according to a collision sensitivity input from the input unit.

A disclosed motor control device includes: a PI controller which controls a velocity of a motor; an input unit which receives specification information including information of a weight and a center of mass of a tool; a calculation unit which calculates a gravitational torque based on the specification information; a storage which stores the gravitational torque output from the calculation unit and an integral value output from the PI controller, and outputs the gravitational torque and the integral value in response to a break signal; and a selection unit which sets, to the PI controller, the integral value output from the storage, according to a collision sensitivity input from the input unit.

Disclosed is a substrate processing apparatus including one or more operation elements, the substrate processing apparatus includes a processing unit controlling operation of the substrate processing apparatus, and a controller controlling independently the one or more operation elements of the substrate processing apparatus, monitoring operation of the processing unit, and maintaining operation states of the one or more operation elements when the operation of the processing unit is restarted or terminated.

Disclosed is a method and apparatus for machining a workpiece (2). The method comprises specifying a path along which a cutting tool (6) is moved during machining the workpiece (2), the path comprising segments (26); defining, for each segment (26), an exit point on that segment (26); defining, for each segment (26), an exit path (38) from the exit point of that segment (26) to a point remote from the workpiece (2); performing a machining process including moving the cutting tool (6) along the tool path and machining the workpiece (2); and, during the machining process, when one or more criteria are satisfied: interrupting the machining process and, without machining the workpiece (2), moving the cutting tool (6) to the exit point of the current segment (26) and then along the exit path (38) of the current segment (26).

Disclosed is a method and apparatus for machining a workpiece (2). The method comprises specifying a path along which a cutting tool (6) is moved during machining the workpiece (2), the path comprising segments (26); defining, for each segment (26), an exit point on that segment (26); defining, for each segment (26), an exit path (38) from the exit point of that segment (26) to a point remote from the workpiece (2); performing a machining process including moving the cutting tool (6) along the tool path and machining the workpiece (2); and, during the machining process, when one or more criteria are satisfied: interrupting the machining process and, without machining the workpiece (2), moving the cutting tool (6) to the exit point of the current segment (26) and then along the exit path (38) of the current segment (26).

A control system of a machine tool includes an analysis device, the analysis device includes acquisition portions which acquire chronological control data when a work is machined and which acquire spatial machined surface measurement data after the machining of the work, a storage portion which stores the control data and the machined surface measurement data, a data-associating processing portion which associates the control data and the machined surface measurement data with each other in two machining directions, a machined surface failure detection portion which detects a failure on the machined surface of the work and a location thereof based on the machined surface measurement data in the two machining directions and an identification portion which identifies a drive axis that causes the failure from the detected failure and the machining direction of the control data corresponding to the detected failure location.

A control system of a machine tool includes an analysis device, the analysis device includes acquisition portions which acquire chronological control data when a work is machined and which acquire spatial machined surface measurement data after the machining of the work, a storage portion which stores the control data and the machined surface measurement data, a data-associating processing portion which associates the control data and the machined surface measurement data with each other in two machining directions, a machined surface failure detection portion which detects a failure on the machined surface of the work and a location thereof based on the machined surface measurement data in the two machining directions and an identification portion which identifies a drive axis that causes the failure from the detected failure and the machining direction of the control data corresponding to the detected failure location.

Methods and systems for determining elevator car locations are provided. Aspects includes operating, by a processor, a machine room sensor to collect vibration data associated with one or more components in a machine room of an elevator system, wherein the elevator system comprises an elevator car and a hoistway and analyzing the vibration data to determine a position of the elevator car in the hoistway.