A distributed multi-node control system (100) and method, relating to the field of control technology. The distributed multi-node control system (100) comprises: a first control node (11), a second control node (12), a plurality of servo nodes (20) and a plurality of execution devices (30), the first control node (11) and the second control node (12) being respectively communicationally connected to the plurality of servo nodes (20), the servo nodes (20) being electrically connected to the execution devices (30) and configured to control operating states of the corresponding execution devices (30), the first control node (11) being configured to control an operating state of at least one first servo node (21) among the plurality of servo nodes (20), the second control node (12) being configured to control an operating state of at least one second servo node (22) among the plurality of servo nodes (20).

A data collection system pertaining to one embodiment of the present invention collects time-series data which is output from sensors installed on equipment which is a monitored object and carries out detecting an abnormality of the equipment. The data collection system stores plural fault models as data for comparison with time-series data and, in a learning process, determines a range to examine within time-series data by comparing the time-series data with each one of the fault models. An abnormality detection process includes extracting a partial frequency spectrum to examine from the frequency spectrum of time-series data, using information on the range to examine within the time-series data determined through the learning process, and carrying out detecting an abnormality of the equipment using the extracted frequency spectrum.

A method for visually displaying a facility mimic diagram of a technical facility which has an operator station server and an operator station client, wherein the method includes transferring the facility mimic diagram from the operator station server to the operator station client, where the facility mimic diagram includes an alarm signal indicator, communicating a duration for visually displaying the indicator, visually displaying the facility mimic diagram with the alarm signal indicator, informing the operator station client about an emergence of a new alarm signal in the management system via a message, determining a value an actual display time has to visually display the alarm signal indicator, determining whether a display time for the visual display of the alarm signal indicator with the new alarm signal would overshoot the value of the duration, limiting the visual display of the alarm signal indicator when the available duration is overshot.

A system, a control unit, and a method for controlling operation of a technical system are provided. The technical system includes a plurality of sensors. The method includes receiving first sensor data from a first sensor of the plurality of sensors. The method includes detecting a first sensor anomaly based on failure of the first sensor to generate the first sensor data. The failure of the first sensor includes generation of anomalous first sensor data. The method also includes validating the first sensor anomaly based on a comparison between the first sensor data and a virtual first sensor data. Thereafter, a control command is generated to the technical system by replacing the virtual first sensor data in lieu of the first sensor data when the first sensor anomaly is validated.

A method and a system for controlling a lot risk score based dynamic lot measurement on the basis of equipment reliability index are provided. The method for controlling a measurement, according to an embodiment of the present invention, calculates an equipment reliability index of specific equipment for a specific process in semiconductor manufacturing, calculates a risk score of the specific equipment for the specific process on the basis of an equipment reliability index, and determines, on the basis of the risk score, whether to measure a semiconductor product processed by the specific equipment for the specific process. Therefore, differential quality monitoring and management is possible according to the equipment reliability index, a measuring instrument can be efficiently used, quality and yield can be improved through timely measurement, and management convenience can be increased through automatic and dynamic lot measurement control.

A fraudulent diagnostic machine detection apparatus capable of preventing the occurrence of fraudulent processing due to a fraudulent diagnostic machine being connected in parallel with a legitimate diagnostic machine is a fraudulent diagnostic machine detection apparatus comprising node ECUs of a diagnosis target connected to a communication line and a gateway connected between the communication line and a diagnostic machine connection coupler, wherein the gateway detects an electrical circuit change caused by a pin connection of the diagnostic machine connection coupler being branched and the plurality of diagnostic machines being connected in parallel.

A method of salvaging an output is provided. The method includes defining a condition for terminating a run of a tool, checking whether the condition is likely to be met during a running of the tool, terminating the running in an event the condition is likely to be met, checking a validity of an incomplete output of the tool generated during the running and finalizing the incomplete output in an event the incomplete output is valid.

A control apparatus for controlling an industrial machine includes a deterioration diagnostic unit that has a diagnostic function, which is repeatedly executed at predetermined timing, for diagnosing deterioration of each component of the industrial machine and outputs an alarm signal in response to deterioration equal to or more than a predetermined level in each component, an alarm control unit that outputs a stop command to the industrial machine based on the alarm signal and informs that the industrial machine is in an alarm stop state, and a cancellation operation receiving unit that receives the cancellation operation for cancelling the alarm stop state regardless of deterioration of each component. The deterioration diagnostic unit cancels the alarm stop state brought on by the diagnostic function based on the cancellation operation, and allows the industrial machine to operate until the diagnostic function is executed next.

A quality control device that controls quality of a product manufactured through a plurality of processes, includes a prediction model generation unit that generates a prediction model to predict quality of a product with respect to unknown process data by performing learning using known process data obtained from the plurality of processes and a measured value of quality of the product with respect to the known process data as learning data; a quality prediction unit that derives a predictive value of quality of each of a plurality of products, which are manufactured after the prediction model is generated, on the basis of the prediction model using process data of the plurality of products as input data; and an inspection target decision unit that decides the product for which the predictive value having the smallest margin with respect to a preset standard is obtained as an inspection target, among the plurality of predictive values of quality obtained by the quality prediction unit.

A system and a method are provided including a system controller for a refrigeration or HVAC system having a compressor rack with a compressor and a condensing unit with a condenser fan. The system controller monitors and controls operation of the refrigeration or HVAC system. A rack controller monitors and controls operation of the compressor rack. The system controller determines a flood-back discharge temperature corresponding to a flood-back condition, receives an actual discharge temperature associated with the compressor rack, compares the actual discharge temperature with the flood-back discharge temperature, and generates a notification to the rack controller based on the comparison.