Patent classifications
G05D1/6895
GROUND-BASED TRANSPORT APPARATUS AND LOGISTICS PROCESSING SYSTEM INCLUDING THE SAME
A ground-based transport apparatus for transporting a container in a semiconductor manufacturing plant includes a driving controller configured to move the ground-based transport apparatus on a ground of the semiconductor manufacturing plant, a housing on the driving controller, a shelf structure in the housing and including a plurality of shelves, and a manipulator arm assembly in the housing and spaced apart from the shelf structure. The manipulator arm assembly is configured to remove the container from a first shelf of the plurality of shelves, and set the container on a second shelf of the plurality of shelves. The driving controller is further configured to transport the container between a plurality of facilities, and store the container in a ground-based storage apparatus disposed on the ground of the semiconductor manufacturing plant. Each facility of the plurality of facilities includes a substrate treating apparatus. The container stores a substrate.