A semiconductor device manufacturing system and a method for manufacturing semiconductor device are provided. The semiconductor device manufacturing system includes a substrate processing device and a processor. The substrate processing device includes a processing chamber, a gas supply module and a gas source. The processor is configured to monitor and control the gas supplied into the substrate processing device.

A flow control device is disclosed. The flow control device includes a solenoid, the solenoid including an armature. Also, a piston connected to the armature. The piston includes a primary orifice. The piston having an open position and a closed position. A piston spring connected to the piston is also includes and at least one secondary orifice. The movement of the piston to the open position at least partially opens the at least one secondary orifice and the movement of the piston to the closed position at least partially closes the at least one secondary orifice. The movement of the armature actuates the piston movement and controls fluid flow from the primary orifice through the at least one secondary orifice.

A metal reuse system for an extreme ultra violet (EUV) radiation source apparatus includes a first metal collector for collecting metal from vanes of the EUV radiation source apparatus, a first metal storage coupled to the first metal collector via a first conduit, a metal droplet generator coupled to the first metal storage via a second conduit, and a first metal filtration device disposed on either one of the first conduit and the second conduit.

A building monitoring system, wherein the system comprises an HVAC monitor, which comprised a condensing unit connector, an air handler connector, a thermostat connector and a control module, a wetness detector; and a communicator. The communicator accesses a location of the building monitoring system and selectively communicates with a technician based at least in part on the location. A monitor system for use with an existing HVAC unit, wherein the HVAC unit has a condenser or furnace, an air handler, and a thermostat, the HVAC monitor system comprising at least one condenser or furnace sensor, at least one air handler sensor and at least one control module. A wetness monitor system, comprising at least one wetness detector connected to a control, wherein the control is also connected to a network and the network is connected to a flow shutoff valve. A method of monitoring a location for wetness comprising detecting wetness through at least one wetness detector, monitoring the state of a shutoff valve.

A smart electronic power steering system and method for a retrofitted electric vehicle are provided. In one embodiment, an electronic power steering system of an electric vehicle is provided. The electronic power steering system comprises one or more computer-readable storage media, a processing system operatively coupled with the one or more computer-readable storage media, and program instructions stored on the one or more computer-readable storage media that, based on being read and executed by the processing system, direct the electronic power steering system to receive a maximum pressure value and a flow rate from the electric vehicle; convert the maximum pressure value and the flow rate into one or more power steering component settings; and send the one or more power steering component settings to one or more power steering components of the electric vehicle.

The present invention relates to a self-powered remote control system for a smart valve, the system comprising: a smart valve for regulating the flow of a fluid in a pipe; a sensing module for sensing the flow rate, pressure, and temperature of the fluid in the pipe; a power generation module for generating power according to the flow of the fluid; a control module for controlling the lifting or lowering of the opening/closing plate of the smart valve according to the flow rate, pressure, or temperature state sensed by the sensing module; and an administrator terminal for transmitting and receiving control signals to and from the control module, wherein the power generation module comprises: a conical fluid guide member provided in a direction in which the fluid is supplied; and a rotating member rotated by the fluid guided through the fluid guide member, whereby the operation of the smart valve can be controlled by manipulating the administrator terminal at a remote location, so as to supply the fluid into the pipe or intercept the supply of the fluid into the pipe.

The present disclosure relates to a control system for a vehicle, comprising: at least one compressor arranged to generate compressed fluid having a massflow rate; at least one fluidic control effector in fluidic communication with the at least one compressor and arranged to change the direction of travel of the vehicle when the compressed fluid is incident on the at least one fluidic control effector; a dump duct for expelling excess compressed fluid not delivered to the at least one fluidic control effector out of the vehicle; a dump valve for controlling the massflow rate of compressed fluid delivered to the dump duct; and a controller electrically coupled to the dump valve and configured to adjust the dump valve. The present disclosure also relates to an aircraft having the control system and a method of controlling a vehicle.

A flow rate control apparatus with improved reliability is provided. The flow rate control apparatus comprises a flow rate measuring unit for measuring a flow rate of chemical solution in a chemical solution supply line, a flow rate control unit for comparing a preset target flow rate profile and an applied flow rate profile, and controlling the flow rate of the chemical solution so that the applied flow rate profile matches the target flow rate profile, and a processor for switching the flow rate control unit to a first mode in response to a signal for the flow rate of the chemical solution measured by the flow rate measuring unit being less than a preset level, wherein, in the first mode, the applied flow rate profile includes a profile of a flow rate estimation model simulated using a flow rate of chemical solution measured by the flow rate measuring unit.

A method for actuating a valve with an electromagnetic valve drive through which electric current is conducted to open or close the valve or to hold the valve in an open or closed position includes receiving an opening signal, determining an adapted opening signal which is adapted to physical limits of the valve or valve drive, and determining a feed-forward signal for feed-forward control of an electric current to drive the electromagnetic valve drive to open the valve in reaction to the adapted opening signal. The method further includes calculating an actuation signal for actuating the valve drive using the feed-forward signal, and outputting the actuation signal.

Systems and methods for optimizing the application of pulse width modulation (PWM) in a voltage signal for delivering a current in a valve used to alternatively deliver pressurized gas to and vent from chambers in a vitrectomy probe used to drive a cutter.