A substrate processing apparatus includes a spray nozzle that allows a plurality of liquid droplets to collide with a substrate held by a spin chuck, a liquid piping that supplies a mixed liquid of water and a chemical liquid to the spray nozzle, a first flow control valve and a second flow control valve each of which changes the concentration of the chemical liquid in the mixed liquid, and a controller that causes the liquid piping to supply the mixed liquid having a concentration of the chemical liquid determined in accordance with a substrate to be processed.

Systems, methods, and computer program products for providing teat dip mixtures. A dispensing system mixes chemical components with a diluent such as water at a variety of concentrations on demand, and is configured to provide multiple teat dip mixtures each having a different composition to different holding tanks. A batch of a respective mixture may be dispensed in response to detecting a low level of the mixture in a respective holding tank. Users may also select a mixture having a particular concentration of one or more components to be dispensed into a particular holding tank by selecting the mixture from a list of pre-determined mixtures.

A gas supply system for providing a plurality of process gases to a process chamber includes a plurality of mass flow controllers each arranged to receive a respective subset of the plurality of process gases. Each of the respective subsets includes more than one of the process gases, and at least one of the process gases is provided to more than one of the plurality of mass flow controllers. Respective valves are arranged upstream of each of the plurality of mass flow controllers to selectively provide the respective subsets to the mass flow controllers. A first quantity of the plurality of mass flow controllers is less than a total number of the plurality of process gases to be supplied to the process chamber. The first quantity is equal to a maximum number of the plurality of process gases to be used in the process chamber at any one time.

A plural component dispensing system includes a dispensing device, first and second fluid component sources, a system controller, and an operator interface device. The first fluid component source is connected to the dispensing device to deliver the first fluid component to the dispensing device. The second fluid component source is connected to the dispensing device to deliver the second fluid component to the dispensing device. The system controller is connected to regulate operation of the first fluid component source and the second fluid component source to produce a target ratio of the first fluid component and the second fluid component at the dispensing device. The operator interface device is remote from and operatively connected to the system controller. The operator interface device is configured to output system state information received from the system controller and to receive operator input to control an operational state of the system controller.

A plural component dispensing system includes at least one compressed gas pneumatically connected to supply pressurized gas to each of a first pressure vessel that discharges a first fluid component and a second pressure vessel that discharges a second fluid component. Each of the first fluid component and the second fluid component is supplied from the respective pressure vessel through individual flow meters to a device. A first pressure regulator is pneumatically connected between the first pressure vessel and the at least one compressed gas source to regulate pressure of the first pressure vessel. A controller receives sensed first and second volumetric flow rates from the individual flow meters and controls the first pressure regulator based on the sensed volumetric flow rates to produce a target ratio of the first fluid component and the second fluid component at the device.

Methods and gas flow control assemblies configured to deliver gas to process chamber zones in desired flow ratios. In some embodiments, assemblies include one or more MFCs and a back pressure controller (BPC). Assemblies includes a controller, a process gas supply, a distribution manifold, a pressure sensor coupled to the distribution manifold and configured to sense back pressure of the distribution manifold, a process chamber, a one or more mass flow controllers connected between the distribution manifold and process chamber to control gas flow there between, and a back pressure controller provided in fluid parallel relationship to the one or more mass flow controllers, wherein precise flow ratio control is achieved. Alternate embodiments include an upstream pressure controller configured to control flow of carrier gas to control back pressure. Further methods and assemblies for controlling zonal gas flow ratios are described, as are other aspects.

Methods and gas flow control assemblies configured to deliver gas to process chamber zones in desired flow ratios. In some embodiments, assemblies include one or more MFCs and a back pressure controller (BPC). Assemblies includes a controller, a process gas supply, a distribution manifold, pressure sensor coupled to the distribution manifold and configured to sense back pressure of the distribution manifold, a process chamber, a one or more mass flow controllers connected between the distribution manifold and process chamber to control gas flow there between, and a back pressure controller provided in fluid parallel relationship to the one or more mass flow controllers, wherein precise flow ratio control is achieved. Alternate embodiment include an upstream pressure controller configured to control flow of carrier gas to control back pressure. Further methods and assemblies for controlling zonal gas flow ratios are described, as are other aspects.

Methods and systems of admixing hydrocarbon liquids from two or more sets of tanks into a single pipeline to provide in-line mixing thereof. In an embodiment of the in-line mixing system, hydrocarbon liquids stored in at least one tank of each of two or more sets of tanks positioned at a tank farm are blended into a blend flow pipe via in-line mixing and the blended mixture is pumped through a single pipeline. In one or more embodiments, the in-line mixing system employs a separate spillback or recirculation loop that is fluidly connected to each set of the two or more sets of tanks to control the flow of the hydrocarbon fluid/liquid from each set of tanks to the blend flow pipe. Associated methods of operating one or more embodiments of the system include regulation of spillback or recirculation loop flow rate and/or pressure to drive the actual blend ratio towards a desired blend ratio.

A process for continuously preparing a polyolefin composition made from or containing a bimodal or multimodal polyolefin and one or more additives in an extruder device equipped with at least one hopper. The process includes the steps of supplying a bimodal or multimodal polyolefin in form of a polyolefin powder to the hopper; (a) measuring the flow rate of the polyolefin powder or (b) measuring the flow rate of the prepared polyolefin pellets; supplying one or more additives to the hopper; adjusting the flow rates of the additives supplied to the hopper in response to the measured flow rate of the polyolefin powder or adjusting the flow rate of the polyolefin powder in response to the measured flow rate of the polyolefin pellets; melting and homogenizing the polyolefin powder and additives within the extruder device; and pelletizing the molten polyolefin composition into the polyolefin pellets.

This invention provides apparatuses and methods to supply a steady volume of liquid with low pressure fluctuation that can be used to form a liquid blend or to supply other equipment or tools. The invention uses a flow controller that controls the flow rate for liquid that is fed to a liquid supply pipe from a recirculation loop that is connected thereto, the recirculation loop has a dip tube for insertion into a liquid supply container, pump, and liquid backpressure control device.