A gas pressure within a treatment chamber 2 can be more accurately regulated to a predicted target pressure whereby there can be provided a pressure control apparatus which can easily and speedily regulate the gas pressure for various combination of the treatment chamber 2, a sanction chamber 3 and a valve 4. A required inflow rate (Qi) at which it is necessary for gas to flow into the treatment chamber 2 in order to reach a preset target pressure (Psp) within the treatment chamber is calculated on the basis of the expression of Qi=Qo+(P/t)V and the thus calculated required inflow rate (Qi) is flown into the treatment chamber 2 to control the pressure within the treatment chamber 2 to the required pressure (Psp). In calculation of a current predicted outflow rate (Qo(n)) at which gas is discharged from the treatment chamber on the basis of the expression Qo(n)=P2*f1(P2), using a current pressure (P2) within the suction pump and a known characteristic suction rate (Sp=f1(P2)) of the suction pump under prescribed pressure, the current pressure (P2) within the suction pump is calculated according to the expression P2=P1(Qo(n1)/f2(, P)) from an accurate conductance (Cv(, P)=f2(, P)) calculated by adding the error between the current pressure (P1) actually measured within the treatment chamber and a known specified pressure (P) within the treatment chamber at the characteristic conductance (Cv=f2()) of the valve at the opening/closing angle () associated with the current position of the switching plate of the valve to the known characteristic conductance (Cv=f2()) of the valve at the opening/closing angle () associated with the current position of the switching plate of the valve, and the current predicted outflow rate Qo(n) at which gas is discharged from the treatment chamber is calculated.

A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.

To provide an electric valve control device capable of preventing a delay at the time of starting a control of an electric valve by shortening a standby time of an air conditioner or the like when power is input again or a sleep mode is cancelled and an electric valve device including the same. After receiving a power-off signal predicting a power-off operation of an electric valve 9 or a sleep transition signal predicting a sleep mode transition operation thereof from an outside, (current) valve opening degree information at the time of stopping an operation of the electric valve 9 is stored in an EEPROM (a nonvolatile storage unit) 11c. At the time of inputting power again or cancelling a sleep mode, the current (immediately precedent) valve opening degree information stored in the EEPROM 11c is read from the EEPROM 11c to resume a control of the electric valve 9.

A method and apparatus for a pump control system. One or more embodiments include a controller communicatively coupled to one or both of a pump and a motor connected to the pump. A device is connected to the controller and configured to connect to a computer network, the device enabling the controller to electronically send, via the computer network to a remote device connected to the computer network, data comprising operational parameters associated with one or both of the pump and the motor.

A heating, ventilation, and air conditioning (HVAC) system includes an evaporator coil and a compressor fluidly coupled to the evaporator coil via a suction line. A condenser coil is fluidly coupled to the compressor via a discharge line and fluidly coupled to a metering device via a liquid line. A charge compensator is fluidly coupled to the liquid line via a connection line. A charge compensator re-heat valve is disposed in the connection line.

A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

A digital refrigeration controller (100) with integrated module driven Step Motor Electronic Expansion Valve. The digital refrigeration controller (100) comprises a System (200) with a Processing Unit (206) for management of the digital controller (100), Unit (206) being connected to Serial Communication Interface (202), Sensor Signal Conditioning System (203), Charge Control System (204), Human-Machine Interface (205), Power Supply Detection and Selection System (207), Backup Power Supply Charging System (208), Real Time Clock (209) and Step Motor Electronic Expansion Valve Drive System (210). System (200) comprises further the following elements: Power Supply (201), a Backup Power Supply (211) and a Current Monitor (212). In case of power outage, the different elements of the system interact to keep the step motor electronic expansion valve closed without the need of external modules.

A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.

A valve system includes a tank, a valve member, a driving device configured to move the valve member for opening and closing the tank, and a control unit. The circuit of the control unit is programmed to move the valve member in the open direction after beginning of a process, and then reverse a direction of movement of the valve member to a standby position in a valve closed state. If the first rate of pressure change in the internal pressure of the tank since the cycle began is greater than a target rate of change, the circuit determines a waiting time such that a second rate of pressure change of the internal pressure from the start to the end of the cycle is equal to the target rate of change, and then keeps the driving device in the standby position until the determined waiting time has elapsed.

A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.