For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.

An optical encoder is provided. The encoder includes an optical disc mounted on a shaft, the optical disc containing pit and land markings; an optical pickup unit for an optical disc that receives light from the optical disc and supplies as an output an electrical signal representative of the received light, comprising: a reading head objective lens, and dynamic steering actuators that control the focus and tracking of the reading head objective lens; a processor that receives as an input the electrical signal from the optical pickup unit and reports motion of the substrate based on the received at least one electrical signal.

An optical encoder is provided. The encoder includes an optical disc mounted on a shaft, the optical disc containing pit and land markings; an optical pickup unit for an optical disc that receives light from the optical disc and supplies as an output an electrical signal representative of the received light, comprising: a reading head objective lens, and dynamic steering actuators that control the focus and tracking of the reading head objective lens; a processor that receives as an input the electrical signal from the optical pickup unit and reports motion of the substrate based on the received at least one electrical signal.

An improved optical encoder uses an optical pick-up unit that provides for degrees of freedom in the tracking and focus axes that are unavailable in conventional optical encoders thereby improving the encoders' performance. In an embodiment the encoder employs an optical disc marked with pits and lands which may be arranged in a spiral pattern. The optical disc is mounted on the shaft whose motion is to be monitored by the optical encoder. The encoder may be arranged to read the markings on the optical disc using the three-beam pickup method.

An improved optical encoder uses an optical pick-up unit that provides for degrees of freedom in the tracking and focus axes that are unavailable in conventional optical encoders thereby improving the encoders' performance. In an embodiment the encoder employs an optical disc marked with pits and lands which may be arranged in a spiral pattern. The optical disc is mounted on the shaft whose motion is to be monitored by the optical encoder. The encoder may be arranged to read the markings on the optical disc using the three-beam pickup method.

A reproducing device (100) includes (i) an optical pickup (6) for irradiating, with reproduction light, an optical disk (1) which is a super-resolution medium, (ii) an RF signal processing circuit (9) for converting, into a reproduction signal, light which reflected off optical disk (1), (iii) an i-MLSE detecting section (141) for evaluating quality of the reproduction signal, and (iv) a spherical aberration correcting section (142) for correcting a spherical aberration by using a result of evaluation of the quality of the reproduction signal.

A reproducing device (100) includes (i) an optical pickup (6) for irradiating, with reproduction light, an optical disk (1) which is a super-resolution medium, (ii) an RF signal processing circuit (9) for converting, into a reproduction signal, light which reflected off optical disk (1), (iii) an i-MLSE detecting section (141) for evaluating quality of the reproduction signal, and (iv) a spherical aberration correcting section (142) for correcting a spherical aberration by using a result of evaluation of the quality of the reproduction signal.

An improved optical encoder uses an optical pick-up unit that provides for degrees of freedom in the tracking and focus axes that are unavailable in conventional optical encoders thereby improving the encoders' performance. In an embodiment the encoder employs an optical disc marked with pits and lands which may be arranged in a spiral pattern. The optical disc is mounted on the shaft whose motion is to be monitored by the optical encoder. The encoder may be arranged to read the markings on the optical disc using the three-beam pickup method.

An improved optical encoder uses an optical pick-up unit that provides for degrees of freedom in the tracking and focus axes that are unavailable in conventional optical encoders thereby improving the encoders' performance. In an embodiment the encoder employs an optical disc marked with pits and lands which may be arranged in a spiral pattern. The optical disc is mounted on the shaft whose motion is to be monitored by the optical encoder. The encoder may be arranged to read the markings on the optical disc using the three-beam pickup method.

A reproducing device (100) includes (i) an optical pickup (6) for irradiating, with reproduction light, an optical disk (1) which is a super-resolution medium, (ii) an RF signal processing circuit (9) for converting, into a reproduction signal, light which reflected off optical disk (1), (iii) an i-MLSE detecting section (141) for evaluating quality of the reproduction signal, and (iv) a spherical aberration correcting section (142) for correcting a spherical aberration by using a result of evaluation of the quality of the reproduction signal.