An apparatus related method for measuring a property of a target material. The system may include a pump device that generates a pump beam. A modulation device may receive the pump beam and generate a modulated pump beam by modulating an intensity amplitude of the pump beam, which may be directed to the target material. A probe device may generate a probe beam, which is directed to the target material. A part of the probe beam may be reflected off of the target material, and has similar frequency characteristic as the modulated pump beam. A detection device may detect the reflected probe beam and produce a signal. An analyzing device may receive the signal and calculate the target material property by comparing the modulated frequency characteristics of the signal to those of the pump beam. At least one of the pump and the probe beams may be infrared light.

It is desirable to provide an information processing apparatus, an information processing method, a program, and a monitoring system capable of monitoring a condition of a measured surface highly accurately and using the monitoring result effectively. To attain the aforementioned object, according to a mode of the present invention, an information processing apparatus includes an obtaining module and a generating module. The obtaining module obtains measuring data about a measured surface. The generating module generates covering material information about a covering material that covers the measured surface based on a feature of the obtained measuring data.

A height measurement apparatus includes: a light irradiation unit that irradiates a sample with irradiation light; a camera system that detects light from the sample irradiated with the irradiation light; and a control apparatus that calculates a height of the sample based on the wavelength information. The camera system includes an inclined dichroic mirror of which a transmittance and a reflectance change according to a wavelength in a predetermined wavelength range and which separates the light from the sample by transmitting and reflecting the light, a light detector that detects a reflected light quantity from light reflected by the inclined dichroic mirror, a light detector that detects a transmitted light quantity from light transmitted through the inclined dichroic mirror, and a processing unit that calculates the wavelength information based on a ratio between the reflected light quantity and the transmitted light quantity, to output the wavelength information.

Embodiments of systems and methods for monitoring one or more characteristics of a substrate are disclosed. Various embodiments of utilizing optical sensors (in one embodiment a camera) to provide data regarding characteristics of a fluid dispensed upon the substrate are described. A variety of hardware improvements and methods are provided to improve the collection and analysis of the sensor data. More specifically, a wide variety of hardware related techniques may be utilized, either in combination or singularly, to improve the collection of data using the optical sensor. These hardware techniques may include improvements to the light source, improvements to the optical sensors, the relationship of the physical orientation of the light source to the optical sensor, the selection of certain pixels of the image for analysis, and the relationship of the optical sensor frame rate with the rotational speed of the substrate.

Since the fat content of pork is a deciding factor in grading the quality of meat, the use of a noninvasive subcutaneous probe for real-time, in situ monitoring of the fat components is of importance to vendors and other interested parties. Fortunately, in situ, in vivo monitoring of subcutaneous fat can be accomplished with spatially offset Raman spectroscopy (SORS) using a fiber-optic probe. The probe acquires Raman spectra as a function of spatial offset. These spectra are used to determine the relative composition of fat-to-skin. The Raman intensity ratio varies disproportionately depending on the fat content, with variations in slope that are correlated to the thickness of the fat layer. Ordinary least square (OLS) regression using two components indicates that depth-resolved SORS spectra reflect the relative thickness of the fat layer.

A method of producing a model capable of reducing an influence of spectral variation of reflected light from a workpiece, such as a wafer, and capable of determining an accurate film thickness is disclosed. The method includes: determining sample features representing features of sample spectra of reflected lights from a sample having a film; obtaining similarities by calculating a similarity between each of the sample spectra and a representative spectrum; and producing a film-thickness estimation model by performing machine leaning using training data including the sample features, the similarities, and film thicknesses corresponding to the sample spectra.

Systems and processes are provided for measuring carbon deposits on an engine. In some examples, a light source can be transmitted through a viewing window of an engine onto an area of an internal surface of the engine and reflected back through the viewing window and detected using an optical sensor. A topography of the area can be determined based, at least in part, on the reflected light source detected by the optical sensor and used to determine whether carbon deposits have increased, decreased, or remained constant on the area.

A method for determining thickness of layers of the tear film includes reconstructing a full- or hyper-spectral interference pattern from an imaged multi-spectral pattern. Tear film thickness can then be estimated from the full- or hyper-spectral interference pattern. Using a full- or hyper-spectral interference pattern provides a greater number of frequency sampling points for increased tear film thickness estimation accuracy, without traditional time consuming techniques.

A real-time ablation sensor uses an optical detector, such as a spectrometer or radiometer, to detect ablation of a material, for example by detecting a signal indicative of ablation of the material, which may be an engineered material. The optical detector may detect reflected light, either from the material being ablated, or from products of the ablation, such as in the vicinity of the material being ablated. A light source may be used to provide light that is reflected by the material and/or the ablation products, with the reflected light received by the detector. The light may be of a selected wavelength or wavelengths, with the selection made in combination with the selection/configuration of the material to be ablated, and/or the selection/configuration of the optical detector.

A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.