An angular velocity sensor includes an angular velocity sensor element, a drive circuit, a detection circuit, and a reference potential supply circuit. The angular velocity sensor element has a monitor electrode, a drive electrode, a sense electrode, and a weight. The reference potential supply circuit supplies a reference potential to the angular velocity sensor element. The reference potential supply circuit has a first CV converter, a second CV converter, a comparator, and a reference potential adjustment circuit. The first CV converter is connected to the monitor electrode. The second CV converter is connected to the sense electrode. The comparator compares a frequency of a signal being output from the first CV converter with a frequency of a signal being output from the second CV converter, and outputs a signal depending on a result of the comparison.

A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

A sensor is disclosed for detecting a rotational motion about a resulting sensitivity axis. The sensor includes at least two dual mass gyroscope units, each of the gyroscope units are adapted to detect a rotational motion about a sensitivity axis of the respective gyroscope unit. The sensitivity axes being parallel to each other and to the resulting sensitivity axis. The gyroscope units are interconnected at the inertial masses of the gyroscope units which cause the gyroscope unit to operate synchronously.

A device for detecting an acceleration in one direction and a speed of rotation along one direction, including a support and two structures mechanically coupled to each other in opposite phase and suspended relative to the support, each of the structures including: an excitation mass; an excitation mechanism configured to move the excitation mass in a given direction; an inertial mass suspended to the excitation mass; a detector connected to the inertial mass to be displaced by same, and the detector connected to the support; a mechanism for detecting displacement of the inertial mass; and a controller controlling the excitation mechanism and processing signals delivered by the detecting mechanism.

A device for detecting an acceleration in one direction and a speed of rotation along one direction, including a support and two structures mechanically coupled to each other in opposite phase and suspended relative to the support, each of the structures including: an excitation mass; an excitation mechanism configured to move the excitation mass in a given direction; an inertial mass suspended to the excitation mass; a detector connected to the inertial mass to be displaced by same, and the detector connected to the support; a mechanism for detecting displacement of the inertial mass; and a controller controlling the excitation mechanism and processing signals delivered by the detecting mechanism.

A drive circuit includes a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage, a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter, and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion.

A drive circuit includes a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage, a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter, and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion.