A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T1 is a width of a space between the outer beam and the structure, T2 is a width of a space between the inner and outer beams, and T2<T1.

A rotation rate sensor including a substrate, a drive structure, which is movable with regard to the substrate, a detection structure, and a Coriolis structure, the drive structure, the Coriolis structure, and the detection structure being essentially situated in a layer, in that an additional layer is situated essentially in parallel to the layer above or underneath the layer, a mechanical connection between the Coriolis structure and the drive structure being established with a first spring component, the first spring component being configured as a part of the additional layer, and/or a mechanical connection between the detection structure and the substrate being established with a second spring component, the second spring component being configured as a part of the additional layer.

A rotation rate sensor including a substrate, a drive structure, which is movable with regard to the substrate, a detection structure, and a Coriolis structure, the drive structure, the Coriolis structure, and the detection structure being essentially situated in a layer, in that an additional layer is situated essentially in parallel to the layer above or underneath the layer, a mechanical connection between the Coriolis structure and the drive structure being established with a first spring component, the first spring component being configured as a part of the additional layer, and/or a mechanical connection between the detection structure and the substrate being established with a second spring component, the second spring component being configured as a part of the additional layer.

A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

A gyroscope comprises four Coriolis masses arranged around a center point where a lateral axis crosses a transversal axis orthogonally in the device plane. The first and second masses are aligned on the lateral axis, and the third and fourth masses are aligned on the transversal axis. The gyroscope further comprises four pairs of elongated mass elements. The mass elements of the first pair are transversally aligned on opposite sides of the lateral axis outside of the first mass. The mass elements of the second pair are transversally aligned on opposite sides of the lateral axis outside of the second mass. The mass elements of the third pair are laterally aligned on opposite sides of the first transversal axis outside of the third mass. The mass elements of the fourth pair are laterally aligned on opposite sides of the first transversal axis outside of the fourth mass.

A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.

A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.