A microelectromechanical gyroscope which comprises one or more Coriolis masses driven by a drive transducer and a force-feedback system. The force-feedback circuit comprises first and second sideband modulators and the self-test circuit comprises first and second sideband demodulators.

A microelectromechanical gyroscope which comprises one or more Coriolis masses driven by a drive transducer and a force-feedback system. The force-feedback circuit comprises first and second sideband modulators and the self-test circuit comprises first and second sideband demodulators.

A method includes depositing a silicon layer over a first oxide layer that overlays a first silicon substrate. The method further includes depositing a second oxide layer over the silicon layer to form a composite substrate. The composite substrate is bonded to a second silicon substrate to form a micro-electro-mechanical system (MEMS) substrate. Holes within the second silicon substrate are formed by reaching the second oxide layer of the composite substrate. The method further includes removing a portion of the second oxide layer through the holes to release MEMS features. The MEMS substrate may be bonded to a CMOS substrate.

A method includes depositing a silicon layer over a first oxide layer that overlays a first silicon substrate. The method further includes depositing a second oxide layer over the silicon layer to form a composite substrate. The composite substrate is bonded to a second silicon substrate to form a micro-electro-mechanical system (MEMS) substrate. Holes within the second silicon substrate are formed by reaching the second oxide layer of the composite substrate. The method further includes removing a portion of the second oxide layer through the holes to release MEMS features. The MEMS substrate may be bonded to a CMOS substrate.

According to one embodiment, a vibration device is disclosed. The device includes a mass unit including a mass unit, a catch and release mechanism to catch and release the mass unit and including an electrode unit, and a control unit to control catching and releasing of the mass unit by a voltage to be applied between the mass unit and the electrode unit. The control unit controls the voltage such that a voltage greater than a steady voltage is to be applied between the mass and electrode units before the steady voltage is applied between the mass and electrode units. The voltage greater than the steady voltage is to be applied in at least part of a period during which the mass unit is vibrating after the mass unit is released from the catch and release mechanism.

According to one embodiment, a vibration device is disclosed. The device includes a mass unit including a mass unit, a catch and release mechanism to catch and release the mass unit and including an electrode unit, and a control unit to control catching and releasing of the mass unit by a voltage to be applied between the mass unit and the electrode unit. The control unit controls the voltage such that a voltage greater than a steady voltage is to be applied between the mass and electrode units before the steady voltage is applied between the mass and electrode units. The voltage greater than the steady voltage is to be applied in at least part of a period during which the mass unit is vibrating after the mass unit is released from the catch and release mechanism.

The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

A micro-electromechanical device includes a frame; a proof mass connected to the frame through a first mechanical link which allows pivoting of the proof mass to relative to the frame about a first axis of rotation parallel to a mean plane of the frame; and a lever for detecting pivoting of the mass, connected to the proof mass through a second mechanical link allowing rotation of the lever relative to the proof mass about a second axis. The second link includes two walls connecting perpendicularly to each other, one to the lever and the other to the proof mass, one of the walls being parallel to the second axis of rotation.

A sensor includes a weight body, a frame which is located so as to surround the weight body when viewed from above, a beam part which is provided with flexibility and in which a first end is connected to the weight body and a second end is connected to the frame, and a detection part which is provided on the beam part and detects deformation of the beam part as an electric signal. The beam part includes a main part in which a cross-sectional shape in a direction perpendicular to a longitudinal direction connecting the first end and the second end is a rectangular shape, and an extending part which protrudes from at least one of an upper surface or a lower surface of the main part and extends in the longitudinal direction or extends in a width direction perpendicular to the longitudinal direction when viewed from above.

A sensor includes a weight body, a frame which is located so as to surround the weight body when viewed from above, a beam part which is provided with flexibility and in which a first end is connected to the weight body and a second end is connected to the frame, and a detection part which is provided on the beam part and detects deformation of the beam part as an electric signal. The beam part includes a main part in which a cross-sectional shape in a direction perpendicular to a longitudinal direction connecting the first end and the second end is a rectangular shape, and an extending part which protrudes from at least one of an upper surface or a lower surface of the main part and extends in the longitudinal direction or extends in a width direction perpendicular to the longitudinal direction when viewed from above.