According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.

According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.

Microelectromechanical and/or nanoelectromechanical device comprising a fixed part (4), at least one suspended part (2) intended to be moveable in the plane of said device with respect to the fixed part (4) along at least one first direction (Y), a first means (6) for suspending said suspended part (2), said first suspension means (6) comprising two suspension elements (8.1, 8.2) each suspension element (8.1, 8.2) comprising a first end fixed directly to the suspended part (2) and a second end connected to the fixed part (4), each suspension element (8.1, 8.2) having a half-ellipse shape in the plane and extending between the first end and the second end, the two suspension elements (8.1, 8.2) being arranged with respect to each other so as to form an ellipse.

A micromechanical rotation rate sensor with a sensor element. The micromechanical rotation rate sensor including a drive device for driving an oscillation of the sensor element and an acquisition device for acquiring a measurement signal. The acquisition device includes a first and second electrode structure for acquiring a mechanical deflection or a force effect of the sensor element parallel to an acquisition direction provided substantially perpendicular to the drive direction. A variable capacitance may be formed between the sensor element and the first electrode structure and between the sensor element and the second electrode structure. The acquisition device is provided for differential acquisition of the variable capacitances, which each comprise a static capacitance component and a dynamic capacitance component provided for the opposite variation. The micromechanical rotation rate sensor is configured such that the static capacitance component is ascertained by a variation of the predetermined voltage.

A micromechanical rotation rate sensor with a sensor element. The micromechanical rotation rate sensor including a drive device for driving an oscillation of the sensor element and an acquisition device for acquiring a measurement signal. The acquisition device includes a first and second electrode structure for acquiring a mechanical deflection or a force effect of the sensor element parallel to an acquisition direction provided substantially perpendicular to the drive direction. A variable capacitance may be formed between the sensor element and the first electrode structure and between the sensor element and the second electrode structure. The acquisition device is provided for differential acquisition of the variable capacitances, which each comprise a static capacitance component and a dynamic capacitance component provided for the opposite variation. The micromechanical rotation rate sensor is configured such that the static capacitance component is ascertained by a variation of the predetermined voltage.

A gyroscope including a mass capable of movement due to excitation and a mass capable of movement due to detection, a mechanism applying an excitation signal to the excitation mass in a first direction, a mechanism detecting the movement of the detection mass in a second direction orthogonal to the first direction, a mechanism detecting the movement of the excitation mass in the second direction, and a processor processing detection signals emitted by the mechanism detecting movements of the detection mass and the mechanism detecting movements of the excitation mass in the second direction, to obtain a phase bias, quadrature bias, and amplification factor.

A gyroscope including a mass capable of movement due to excitation and a mass capable of movement due to detection, a mechanism applying an excitation signal to the excitation mass in a first direction, a mechanism detecting the movement of the detection mass in a second direction orthogonal to the first direction, a mechanism detecting the movement of the excitation mass in the second direction, and a processor processing detection signals emitted by the mechanism detecting movements of the detection mass and the mechanism detecting movements of the excitation mass in the second direction, to obtain a phase bias, quadrature bias, and amplification factor.

A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.

A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.

Systems and methods are described herein for detecting and measuring inertial parameters, such as acceleration. In particular, the systems and methods relate to vibratory inertial sensors implementing time-domain sensing techniques. Within a composite mass sensor system, a sense mass may oscillate at a frequency different from its actuation frequency, allowing flexibility when integrating the sensor into drive systems without sacrificing sensitivity.